| Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Pelcotec™ CDMS Calibration Standards are available either as metallic lines on Si or as etched lines in Si with two feature size ranges for low or high resolution. They are offered either as traceable at the wafer level to a NIST standard or individually certified to a NIST standard with the option of certification to ISO 17025:2017 from AISthesis Products, Inc., as an ISO/IEC 17025:2017 accredited calibration laboratory. CDMS products originally certified individually to ISO 17025:2017 can be recertified at a later date to the same standard in the originating calibration lab using our paid service. The newly added Etched Si CDMS products provide increased line edge quality, a 50nm pitch pattern (XY product only) and are ideal for low keV imaging (≤1keV). |