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  Calibration Overview
CDMS Critical Dimension Magnification Standards Overview		  
 

NEW Pelcotec™ Etched Si CDMS-XY ISO
Critical Dimension Magnification Standard

ISO

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS-XY ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Etched lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation

Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).

The Pelcotec™ Etched Si CDMS-XY Calibration Standard is available in two feature size ranges, and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.

Pelcotec™ Etched Si CDMS-XY-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T-ISO Traceable Certificate (345KB PDF)

Pelcotec™ Etched Si CDMS-XY-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 50nm for a magnification range from 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T-ISO Traceable Certificate (347KB PDF)

* Pelcotec™ Etched Si CDMS-XY-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1C-ISO Conformance Certificate (513KB PDF)

* Pelcotec™ Etched Si CDMS-XY-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 50nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C-ISO Conformance Certificate (702KB PDF)

* Recertification in an ISO 17025:2017 accredited calibration laboratory available.


Comparison Table Below



Feature sizes for the Pelcotec™ Etched Si CDMS-XY-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

Feature sizes for the Pelcotec™ Etched Si CDMS-XY-0.1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm





 SDMS-2
500nm, 250nm, 100nm and 50nm lines are only on the Etched Si CDMS-XY-0.1T-ISO and 0.1C-ISO products
PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-1T-ISO

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
709-1 Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $450.00
Qty:
709-1A Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 475.00
Qty:
709-1B Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 475.00
Qty:
709-1C Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 475.00
Qty:
709-1D Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 475.00
Qty:
709-1E Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 475.00
Qty:
709-1F Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 475.00
Qty:
709-1G Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each 600.00
Qty:
709-1K Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 475.00
Qty:
709-1L Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 475.00
Qty:
709-1M Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 475.00
Qty:
709-1O Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 475.00
Qty:
709-1P Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 475.00
Qty:
709-1Q Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 475.00
Qty:
709-1R Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 475.00
Qty:
709-1AFM Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 475.00
Qty:
709-1S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide each 475.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-0.1T-ISO

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 50nm for magnification 10x-200,000x for SE, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
710-01 Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $2000.00
Qty:
710-01A Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 2025.00
Qty:
710-01B Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 2025.00
Qty:
710-01C Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 2025.00
Qty:
710-01D Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 2025.00
Qty:
710-01E Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 2025.00
Qty:
710-01F Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 2025.00
Qty:
710-01G Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each 2150.00
Qty:
710-01K Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 2025.00
Qty:
710-01L Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 2025.00
Qty:
710-01M Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 2025.00
Qty:
710-01O Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 2025.00
Qty:
710-01P Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 2025.00
Qty:
710-01Q Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 2025.00
Qty:
710-01R Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 2025.00
Qty:
710-01AFM Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 2025.00
Qty:
710-01S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 50nm, etched lines on Si, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25x75mm glass slide each 2025.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #713-1-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
713-1 Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each P.O.R.
Qty:
713-1A Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each P.O.R.
Qty:
713-1B Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each P.O.R.
Qty:
713-1C Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each P.O.R.
Qty:
713-1D Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each P.O.R.
Qty:
713-1E Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each P.O.R.
Qty:
713-1F Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each P.O.R.
Qty:
713-1G Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
713-1K Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each P.O.R.
Qty:
713-1L Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each P.O.R.
Qty:
713-1M Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each P.O.R.
Qty:
713-1O Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each P.O.R.
Qty:
713-1P Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each P.O.R.
Qty:
713-1Q Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each P.O.R.
Qty:
713-1R Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each P.O.R.
Qty:
713-1AFM Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each P.O.R.
Qty:
713-1S Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each P.O.R.
Qty:
713-1-RECERT Recertification Service for the 713-1 through 713-1S family of ISO CDMS Products each 700.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-0.1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 50nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #714-01-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
714-01 Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each P.O.R.
Qty:
714-01A Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each P.O.R.
Qty:
714-01B Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each P.O.R.
Qty:
714-01C Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each P.O.R.
Qty:
714-01D Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each P.O.R.
Qty:
714-01E Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each P.O.R.
Qty:
714-01F Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each P.O.R.
Qty:
714-01G Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
714-01K Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each P.O.R.
Qty:
714-01L Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each P.O.R.
Qty:
714-01M Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each P.O.R.
Qty:
714-01O Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each P.O.R.
Qty:
714-01P Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each P.O.R.
Qty:
714-01Q Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each P.O.R.
Qty:
714-01R Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each P.O.R.
Qty:
714-01AFM Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each P.O.R.
Qty:
714-01S Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 50nm, etched lines on Si, A2LA/ILAC Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each P.O.R.
Qty:
714-01-RECERT Recertification Service for the 714-01 through 714-01S family of ISO CDMS Products each 1000.00
Qty:




  Pelcotec™ Etched Si
CDMS-XY-1-ISO		 Pelcotec™ Etched Si
CDMS-XY-0.1-ISO
Substrate: High conductivity silicon (resistivity of 0.001 - 0.002 Ohm/cm) ✓ ✓
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Unique serial identification number per chip    
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ✓ ✓
Graticule lines perpendicular to X and Y axes ruled at 10um, 5um, 2um and 1um pitch ✓ ✓
High Resolution version only - Additional graticule lines perpendicular to X and Y axes ruled at 500, 250, 100nm and 50nm pitch — ✓
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions C versions
Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available C versions only C versions only
Available unmounted ✓ ✓
SEM mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓
Line edge roughness of +/- 0.3nm per 1um length of line edge. ✓ ✓
Measurements reported with an uncertainty (k=2)* of ±0.012μm C versions C versions


* Reported uncertainties represent expanded uncertainties expressed at approximately the 95%confidence level using a coverage factor of k = 2. The reported expanded measurement uncertainty is stated as the standard measurement uncertainty multiplied by the coverage factor K such that the coverage probability corresponds to the approximately 95%.


Etched Si CDMS product supplied with certification to ISO 17025:2017 requirement
from AISthesis Products, Inc., as an ISO/IEC 17025:2017 accredited calibration laboratory.

ISO
Certificate Number: 4904.01