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  Calibration Overview
CDMS Critical Dimension Magnification Standards Overview
 
 

NEW Pelcotec™ CDMS ISO Critical
Dimension Magnification Standard

ISO

Available as NIST Traceable or as Certified against a NIST Standard


PELCO CDMS ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.

The Pelcotec™ CDMS Calibration Standard is available in two feature size ranges and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory, for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.

Pelcotec™ CDMS-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1T-ISO Traceable Certificate (325KB PDF)

Pelcotec™ CDMS-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1T-ISO Traceable Certificate (328KB PDF)

* Pelcotec™ CDMS-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Representative CDMS-1C-ISO Conformance Certificate (3680KB PDF)

* Pelcotec™ CDMS-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1C-ISO Conformance Certificate (477KB PDF)

Pelcotec™ Technical Notes for CDMS ISO - Critical Dimension Magnification Standards (149KB PDF)

* Recertification in an ISO 17025:2017 accredited calibration laboratory available.


Comparison Table Below



Feature sizes for the Pelcotec™ CDMS-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.

Feature sizes for the Pelcotec™ CDMS-0.1T-ISO and 0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.






SDMS-2
500nm, 250nm and 100nm lines are only on the CDMS-0.1T-ISO and CDMS-0.1C-ISO product families

The Pelcotec™ CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS ISO calibration standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The CDMS standard may also be mounted on a custom mount of your choice.

Store the Pelcotec™ CDMS ISO Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.





PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-1T-ISO

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
691-1 Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $158.35
Qty:
691-1A Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 175.00
Qty:
691-1B Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 175.00
Qty:
691-1C Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 175.00
Qty:
691-1D Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 175.00
Qty:
691-1E Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 175.00
Qty:
691-1F Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 175.00
Qty:
691-1G Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each P.O.R.
Qty:
691-1K Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 175.00
Qty:
691-1L Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 175.00
Qty:
691-1M Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 175.00
Qty:
691-1O Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 175.00
Qty:
691-1P Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 175.00
Qty:
691-1Q Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 175.00
Qty:
691-1R Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 175.00
Qty:
691-1AFM Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 175.00
Qty:
691-1S Pelcotec™ CDMS-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide each 175.00
Qty:



PELCO CDMS Magnification Standard

NEW Pelcotec™ CDMS-0.1T-ISO

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
692-01 Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $791.70
Qty:
692-01A Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 808.35
Qty:
692-01B Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 808.35
Qty:
692-01C Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable, Mount C each 808.35
Qty:
692-01D Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 808.35
Qty:
692-01E Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 808.35
Qty:
692-01F Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 808.35
Qty:
692-01G Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each P.O.R.
Qty:
692-01K Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 808.35
Qty:
692-01L Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 808.35
Qty:
692-01M Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 808.35
Qty:
692-01O Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 808.35
Qty:
692-01P Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 808.35
Qty:
692-01Q Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 808.35
Qty:
692-01R Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 808.35
Qty:
692-01AFM Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 808.35
Qty:
692-01S Pelcotec™ CDMS-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide each 808.35
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #695-1-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
695-1 Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $1041.70
Qty:
695-1A Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 1066.65
Qty:
695-1B Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 1066.65
Qty:
695-1C Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 1066.65
Qty:
695-1D Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 1066.65
Qty:
695-1E Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 1066.65
Qty:
695-1F Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 1066.65
Qty:
695-1G Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
695-1K Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 1066.65
Qty:
695-1L Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 1066.65
Qty:
695-1M Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 1066.65
Qty:
695-1O Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 1066.65
Qty:
695-1P Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 1066.65
Qty:
695-1Q Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 1066.65
Qty:
695-1R Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 1066.65
Qty:
695-1AFM Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 1066.65
Qty:
695-1S Pelcotec™ CDMS-1C, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 1066.65
Qty:
695-1-RECERT Recertification Service for the 695-1 through 695-1S family of ISO CDMS Products each 400.00
Qty:




PELCO CDMS Magnification Standard

NEW Pelcotec™ CDMS-0.1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #696-01-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
696-01 Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $1583.35
Qty:
696-01A Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 1608.35
Qty:
696-01B Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 1608.35
Qty:
696-01C Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 1608.35
Qty:
696-01D Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 1608.35
Qty:
696-01E Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 1608.35
Qty:
696-01F Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 1608.35
Qty:
696-01G Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
696-01K Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 1608.35
Qty:
696-01L Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 1608.35
Qty:
696-01M Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 1608.35
Qty:
696-01O Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 1608.35
Qty:
696-01P Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 1608.35
Qty:
696-01Q Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 1608.35
Qty:
696-01R Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 1608.35
Qty:
696-01AFM Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 1608.35
Qty:
696-01S Pelcotec™ CDMS-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 1608.35
Qty:
696-01-RECERT Recertification Service for the 696-01 through 696-01S family of ISO CDMS Products each 550.00
Qty:




  Pelcotec™ CDMS-1-ISO Pelcotec™ CDMS-0.1-ISO
Substrate: Silicon
Substrate size: 2.5 x 2.5mm
Substrate thickness: 525 ±10µm
Unique serial identification number per chip
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm
Graticule lines perpendicular to the X axis ruled at 10µm, 5µm, 2µm and 1µm pitch
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch
Feature material: 50nm Cr (2mm - 5µm)
Feature material: 20nm Cr/50nm Au (2µm and 1µm)
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions C versions
Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available C versions only C versions only
Available unmounted
SEM mounts A-R available
Precision better than 0.3%


CDMS product supplied with certification to ISO 17025:2017 requirement
from AISthesis Products, Inc., as an ISO/IEC 17025:2017 accredited calibration laboratory.

ISO
Certificate Number: 4904.01