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Calibration Overview
Critical Dimension Magnification Standards Overview

Pelcotec™ CDMS-XY
Critical Dimension Magnification Standards

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS-XY Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Scale lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.

Fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques, yielding superior line edge quality.

The Pelcotec™ CDMS - XY Calibration Standard is available with two feature size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:


Pelcotec™ CDMS-XY-1T
Fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T Traceable Certificate (214KB PDF)

Pelcotec™ CDMS-XY-0.1T
Fully traceable with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T Traceable Certificate (188KB PDF)

Pelcotec™ CDMS-XY-1C
Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Representative CDMS-XY-1C Conformance Certificate (270KB PDF)

Pelcotec™ CDMS-XY-0.1C
Individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF)

Comparison Table Below



Feature sizes for the Pelcotec™ CDMS-XY-1T and -1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

Feature sizes for the Pelcotec™ CDMS-XY-0.1T & 0.1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-XY-1T

NIST traceable* with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM

*Uses average data measured for each production wafer.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
684-1 Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, unmounted each $100.00
Qty:
684-1A Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount A each 110.00
Qty:
684-1B Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount B each 110.00
Qty:
684-1C Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount C each 110.00
Qty:
684-1D Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount D each 110.00
Qty:
684-1E Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount E each 110.00
Qty:
684-1F Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount F each 110.00
Qty:
684-1G Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, you supply mount each 230.00
Qty:
684-1K Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount K each 110.00
Qty:
684-1L Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount L each 110.00
Qty:
684-1M Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount M each 110.00
Qty:
684-1O Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount O each 110.00
Qty:
684-1P Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount P each 110.00
Qty:
684-1Q Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount Q each 110.00
Qty:
684-1R Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, Mount R each 110.00
Qty:
684-1AFM Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, 12mm AFM Disc each 110.00
Qty:
684-1S Pelcotec™ CDMS-XY-1T, 2mm - 1µm, traceable, 25 x 75mm glass slide each 110.00
Qty:




PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-XY-0.1T

NIST traceable* with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB

*Uses average data measured for each production wafer.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
685-01 Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, unmounted each $565.00
Qty:
685-01A Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount A each 575.00
Qty:
685-01B Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount B each 575.00
Qty:
685-01C Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount C each 575.00
Qty:
685-01D Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount D each 575.00
Qty:
685-01E Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount E each 575.00
Qty:
685-01F Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount F each 575.00
Qty:
685-01G Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, you supply mount each 695.00
Qty:
685-01K Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount K each 575.00
Qty:
685-01L Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount L each 575.00
Qty:
685-01M Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount M each 575.00
Qty:
685-01O Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount O each 575.00
Qty:
685-01P Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount P each 575.00
Qty:
685-01Q Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount Q each 575.00
Qty:
685-01R Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, Mount R each 575.00
Qty:
685-01AFM Pelcotec™ CDMS-XY-0.1T, 2mm - 100nm, traceable, 12mm AFM Disc each 575.00
Qty:
685-01S Pelcotec™ CDMS-XY-1T, 2mm - 100nm, traceable, 25x75mm glass slide each 575.00
Qty:




PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-XY-1C

Certified* against NIST standard with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM

*Each scale calibrated against a NIST measured standard

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm.

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
689-1 Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, unmounted each $880.00
Qty:
689-1A Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount A each 890.00
Qty:
689-1B Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount B each 890.00
Qty:
689-1C Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount C each 890.00
Qty:
689-1D Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount D each 890.00
Qty:
689-1E Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount E each 890.00
Qty:
689-1F Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount F each 890.00
Qty:
689-1G Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, you supply mount each 1010.00
Qty:
689-1K Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount K each 890.00
Qty:
689-1L Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount L each 890.00
Qty:
689-1M Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount M each 890.00
Qty:
689-1O Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount O each 890.00
Qty:
689-1P Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount P each 890.00
Qty:
689-1Q Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount Q each 890.00
Qty:
689-1R Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, Mount R each 890.00
Qty:
689-1AFM Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, 12mm AFM Disc each 890.00
Qty:
689-1S Pelcotec™ CDMS-XY-1C, 2mm - 1µm, certified, 25 x 75mm glass slide each 890.00
Qty:




PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-XY-0.1C

Certified* against NIST standard with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB

* Each scale calibrated against a NIST measured standard

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
690-01 Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, unmounted each $1420.00
Qty:
690-01A Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount A each 1430.00
Qty:
690-01B Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount B each 1430.00
Qty:
690-01C Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount C each 1430.00
Qty:
690-01D Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount D each 1430.00
Qty:
690-01E Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount E each 1430.00
Qty:
690-01F Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount F each 1430.00
Qty:
690-01G Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, you supply mount each 1550.00
Qty:
690-01K Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount K each 1430.00
Qty:
690-01L Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount L each 1430.00
Qty:
690-01M Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount M each 1430.00
Qty:
690-01O Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount O each 1430.00
Qty:
690-01P Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount P each 1430.00
Qty:
690-01Q Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount Q each 1430.00
Qty:
690-01R Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, Mount R each 1430.00
Qty:
690-01AFM Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, 12mm AFM Disc each 1430.00
Qty:
690-01S Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, certified, 25 x 75mm glass slide each 1430.00
Qty:




  Pelcotec™ CDMS-XY-1 Pelcotec™ CDMS-XY-0.1
Substrate: Silicon ✓ ✓
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Feature size: 2mm to 1µm ✓ ✓
Feature size: 500, 250 and 100nm — ✓
Feature material: 50nm Cr (2mm - 5µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) — ✓
NIST traceable ✓ ✓
Certification available ✓ ✓
Available unmounted ✓ ✓
Mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓