in 

Calibration Overview
Critical Dimension Magnification Standards Overview

Pelcotec™ CDMS Critical Dimension
Magnification Standards

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration.

These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.

The Pelcotec™ CDMS Calibration Standard is available with two feature size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:

Pelcotec™ CDMS-1T
Fully traceable with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1T Traceable Certificate (271KB PDF)

Pelcotec™ CDMS -0.1T
Fully traceable with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1T Traceable Certificate (272KB PDF)

Pelcotec™ CDMS-1C
Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1C Conformance Certificate (190KB PDF)

Pelcotec™ CDMS-0.1C
Individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1C Conformance Certificate (190KB PDF)

Pelcotec™ Technical Notes for CDMS - Critical Dimension Magnification Standards (149KB PDF)


Comparison Table Below



Feature sizes for the Pelcotec™ CDMS-1T and CDMS-1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.

Feature sizes for the Pelcotec™ CDMS-0.1T & CDMS-0.1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.

 SDMS-2


The Pelcotec™ CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm. The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a low power plasma cleaner.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.03% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Plus, each Pelcotec™ CDMS calibration standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The standard may also be prepared on a custom mount of your choice.

Store the Pelcotec™ CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.




PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-1T

NIST traceable with features from 2mm to 1µm for magnification 10x - 20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
682-1 Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, unmounted each $70.00
Qty:
682-1A Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount A each 79.50
Qty:
682-1B Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount B each 79.50
Qty:
682-1C Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount C each 79.50
Qty:
682-1D Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount D each 79.50
Qty:
682-1E Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount E each 79.50
Qty:
682-1F Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount F each 79.50
Qty:
682-1G Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, you supply mount each 170.00
Qty:
682-1K Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount K each 79.50
Qty:
682-1L Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount L each 79.50
Qty:
682-1M Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount M each 79.50
Qty:
682-1O Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount O each 79.50
Qty:
682-1P Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount P each 79.50
Qty:
682-1Q Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount Q each 79.50
Qty:
682-1R Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, Mount R each 79.50
Qty:
682-1AFM Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, 12mm AFM Disc each 79.50
Qty:
682-1S Pelcotec™ CDMS-1T, 2mm - 1µm, traceable, 25 x 75mm glass slide each 79.50
Qty:




PELCO CDMS Magnification Standard

Pelcotec™ CDMS-0.1T

NIST traceable with features from 2mm to 100nm for magnification 10x - 200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
683-01 Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, unmounted each $375.50
Qty:
683-01A Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount A each 385.50
Qty:
683-01B Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount B each 385.50
Qty:
683-01C Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount C each 385.50
Qty:
683-01D Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount D each 385.50
Qty:
683-01E Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount E each 385.50
Qty:
683-01F Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount F each 385.50
Qty:
683-01G Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, you supply mount each 475.50
Qty:
683-01K Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount K each 385.50
Qty:
683-01L Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount L each 385.50
Qty:
683-01M Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount M each 385.50
Qty:
683-01O Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount O each 385.50
Qty:
683-01P Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount P each 385.50
Qty:
683-01Q Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount Q each 385.50
Qty:
683-01R Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, Mount R each 385.50
Qty:
683-01AFM Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, 12mm AFM Disc each 385.50
Qty:
683-01S Pelcotec™ CDMS-0.1T, 2mm - 100nm, traceable, 25 x 75mm glass slide each 385.50
Qty:




PELCO CDMS-1T AND 1C

Pelcotec™ CDMS-1C

Certified against NIST standard with features from 2mm to 1µm for magnification 10x - 20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
686-1 Pelcotec™ CDMS-1C, 2mm - 1µm, certified, unmounted each $585.50
Qty:
686-1A Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount A each 595.50
Qty:
686-1B Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount B each 595.50
Qty:
686-1C Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount C each 595.50
Qty:
686-1D Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount D each 595.50
Qty:
686-1E Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount E each 595.50
Qty:
686-1F Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount F each 595.50
Qty:
686-1G Pelcotec™ CDMS-1C, 2mm - 1µm, certified, you supply mount each 685.50
Qty:
686-1K Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount K each 595.50
Qty:
686-1L Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount L each 595.50
Qty:
686-1M Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount M each 595.50
Qty:
686-1O Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount O each 595.50
Qty:
686-1P Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount P each 595.50
Qty:
686-1Q Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount Q each 595.50
Qty:
686-1R Pelcotec™ CDMS-1C, 2mm - 1µm, certified, Mount R each 595.50
Qty:
686-1AFM Pelcotec™ CDMS-1C, 2mm - 1µm, certified, 12mm AFM Disc each 595.50
Qty:
686-1S Pelcotec™ CDMS-1C, 2mm - 1µm, certified, 25 x 75mm glass slide each 595.50
Qty:




PELCO CDMS Magnification Standard

Pelcotec™ CDMS-0.1C

Certified against NIST standard with features from 2mm to 100nm for magnification 10x - 200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
687-01 Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, unmounted each $835.50
Qty:
687-01A Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount A each 845.50
Qty:
687-01B Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount B each 845.50
Qty:
687-01C Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount C each 845.50
Qty:
687-01D Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount D each 845.50
Qty:
687-01E Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount E each 845.50
Qty:
687-01F Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount F each 845.50
Qty:
687-01G Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, you supply mount each 945.50
Qty:
687-01K Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount K each 845.50
Qty:
687-01L Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount L each 845.50
Qty:
687-01M Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount M each 845.50
Qty:
687-01O Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount O each 845.50
Qty:
687-01P Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount P each 845.50
Qty:
687-01Q Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount Q each 845.50
Qty:
687-01R Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, Mount R each 845.50
Qty:
687-01AFM Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, 12mm AFM Disc each 845.50
Qty:
687-01S Pelcotec™ CDMS-0.1C, 2mm - 100nm, certified, 25 x 75mm glass slide each 845.50
Qty:




  Pelcotec™ CDMS-1 Pelcotec™ CDMS-0.1
Substrate: Silicon ✓ ✓
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Feature size: 2mm to 1µm ✓ ✓
Feature size: 500, 250 and 100nm — ✓
Feature material: 50nm Cr (2mm - 5µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) — ✓
Traceable at the wafer level to NIST T versions T versions
Direct certification of CDMS chip to a NIST standard C versions C versions
Available unmounted ✓ ✓
SEM mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓