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  Calibration Overview
CDMS Critical Dimension Magnification Standards Overview
 
 

NEW Pelcotec™ CDMS-XY ISO
Critical Dimension Magnification Standard

ISO

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS-XY ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Fiducial lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.

These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.

Available in two feature size ranges, and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.

Pelcotec™ CDMS-XY-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T-ISO Traceable Certificate (345KB PDF)

Pelcotec™ CDMS-XY-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T-ISO Traceable Certificate (347KB PDF)

* Pelcotec™ CDMS-XY-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1C-ISO Conformance Certificate (513KB PDF)

* Pelcotec™ CDMS-XY-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C-ISO Conformance Certificate (702KB PDF)

* Recertification in an ISO 17025:2017 accredited calibration laboratory available.


Comparison Table Below




Feature sizes for the Pelcotec™ CDMS-XY-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

Feature sizes for the Pelcotec™ CDMS-XY-0.1T-ISO and -0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.






PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-1T-ISO

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
693-1 Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $250.00
Qty:
693-1A Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 275.00
Qty:
693-1B Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 275.00
Qty:
693-1C Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 275.00
Qty:
693-1D Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 275.00
Qty:
693-1E Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 275.00
Qty:
693-1F Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 275.00
Qty:
693-1G Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each P.O.R.
Qty:
693-1K Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 275.00
Qty:
693-1L Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 275.00
Qty:
693-1M Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 275.00
Qty:
693-1O Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 275.00
Qty:
693-1P Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 275.00
Qty:
693-1Q Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 275.00
Qty:
693-1R Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 275.00
Qty:
693-1AFM Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 275.00
Qty:
693-1S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide each 275.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-0.1T-ISO

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SE, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
694-01 Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $1333.35
Qty:
694-01A Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 1358.35
Qty:
694-01B Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 1358.35
Qty:
694-01C Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 1358.35
Qty:
694-01D Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 1358.35
Qty:
694-01E Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 1358.35
Qty:
694-01F Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 1358.35
Qty:
694-01G Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each P.O.R.
Qty:
694-01K Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 1358.35
Qty:
694-01L Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 1358.35
Qty:
694-01M Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 1358.35
Qty:
694-01O Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 1358.35
Qty:
694-01P Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 1358.35
Qty:
694-01Q Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 1358.35
Qty:
694-01R Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 1358.35
Qty:
694-01AFM Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 1358.35
Qty:
694-01S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25x75mm glass slide each 1358.35
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #697-1-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
697-1 Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $1833.35
Qty:
697-1A Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 1858.35
Qty:
697-1B Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 1858.35
Qty:
697-1C Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 1858.35
Qty:
697-1D Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 1858.35
Qty:
697-1E Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 1858.35
Qty:
697-1F Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 1858.35
Qty:
697-1G Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
697-1K Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 1858.35
Qty:
697-1L Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 1858.35
Qty:
697-1M Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 1858.35
Qty:
697-1O Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 1858.35
Qty:
697-1P Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 1858.35
Qty:
697-1Q Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 1858.35
Qty:
697-1R Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 1858.35
Qty:
697-1AFM Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 1858.35
Qty:
697-1S Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 1858.35
Qty:
697-1-RECERT Recertification Service for the 697-1 through 697-1S family of ISO CDMS Products each 700.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-0.1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #698-01-RECERT in the product table below).

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
698-01 Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $2666.70
Qty:
698-01A Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 2691.70
Qty:
698-01B Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 2691.70
Qty:
698-01C Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 2691.70
Qty:
698-01D Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 2691.70
Qty:
698-01E Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 2691.70
Qty:
698-01F Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 2691.70
Qty:
698-01G Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each P.O.R.
Qty:
698-01K Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 2691.70
Qty:
698-01L Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 2691.70
Qty:
698-01M Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 2691.70
Qty:
698-01O Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 2691.70
Qty:
698-01P Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 2691.70
Qty:
698-01Q Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 2691.70
Qty:
698-01R Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 2691.70
Qty:
698-01AFM Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 2691.70
Qty:
698-01S Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 2691.70
Qty:
698-01-RECERT Recertification Service for the 698-01 through 698-01S family of ISO CDMS Products each 1000.00
Qty:




  Pelcotec™ CDMS-XY-1-ISO Pelcotec™ CDMS-XY-0.1-ISO
Substrate size: 2.5 x 2.5mm
Substrate thickness: 525 ±10µm
Unique serial identification number per chip
Calibration squares at 2mm, 1mm, 0.5mm
Graticule lines perpendicular to X and Y axes ruled at 10um, 5µm, 2µm and 1µm pitch
High Resolution version only - Additional graticule lines perpendicular to X and Y axes ruled at 500, 250 and 100nm pitch
Feature material: 50nm Cr (2mm - 5µm)
Feature material: 20nm Cr/50nm Au (2µm and 1µm)
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions C versions
Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available C versions only C versions only
Available unmounted
SEM mounts A-R available
Precision better than 0.3%


CDMS product supplied with certification to ISO 17025:2017 requirement
from AISthesis Products, Inc., as an ISO/IEC 17025:2017 accredited calibration laboratory.

ISO
Certificate Number: 4904.01