Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Fiducial lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.
These calibration standards are unique,
economically priced, yet fully-featured and traceable
for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
Available in two feature size ranges, and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.
Pelcotec™ CDMS-XY-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T-ISO Traceable Certificate (345KB PDF)
Pelcotec™ CDMS-XY-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T-ISO Traceable Certificate (347KB PDF)
* Pelcotec™ CDMS-XY-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1C-ISO Conformance Certificate (513KB PDF)
* Pelcotec™ CDMS-XY-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C-ISO Conformance Certificate (702KB PDF)
* Recertification in an ISO 17025:2017 accredited calibration laboratory available.
Comparison Table Below
Feature sizes for the Pelcotec™ CDMS-XY-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Feature sizes for the Pelcotec™ CDMS-XY-0.1T-ISO and -0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
|
 |
NEW Pelcotec™ CDMS-XY-1T-ISO
Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
See SEM mount selections, types A-R |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 693-1
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted
| each
| $250.00
|
|
| 693-1A
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A
| each
| 275.00
|
|
| 693-1B
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B
| each
| 275.00
|
|
| 693-1C
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C
| each
| 275.00
|
|
| 693-1D
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D
| each
| 275.00
|
|
| 693-1E
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E
| each
| 275.00
|
|
| 693-1F
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F
| each
| 275.00
|
|
| 693-1G
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount
| each
| 400.00
|
|
| 693-1K
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K
| each
| 275.00
|
|
| 693-1L
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L
| each
| 275.00
|
|
| 693-1M
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M
| each
| 275.00
|
|
| 693-1O
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O
| each
| 275.00
|
|
| 693-1P
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P
| each
| 275.00
|
|
| 693-1Q
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q
| each
| 275.00
|
|
| 693-1R
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R
| each
| 275.00
|
|
| 693-1AFM
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc
| each
| 275.00
|
|
| 693-1S
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide
| each
| 275.00
|
|
|
 |
NEW Pelcotec™ CDMS-XY-0.1T-ISO
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SE, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm
See SEM mount selections, types A-R |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 694-01
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted
| each
| $1250.00
|
|
| 694-01A
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A
| each
| 1275.00
|
|
| 694-01B
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B
| each
| 1275.00
|
|
| 694-01C
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C
| each
| 1275.00
|
|
| 694-01D
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D
| each
| 1275.00
|
|
| 694-01E
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E
| each
| 1275.00
|
|
| 694-01F
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F
| each
| 1275.00
|
|
| 694-01G
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount
| each
| 1400.00
|
|
| 694-01K
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K
| each
| 1275.00
|
|
| 694-01L
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L
| each
| 1275.00
|
|
| 694-01M
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M
| each
| 1275.00
|
|
| 694-01O
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O
| each
| 1275.00
|
|
| 694-01P
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P
| each
| 1275.00
|
|
| 694-01Q
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q
| each
| 1275.00
|
|
| 694-01R
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R
| each
| 1275.00
|
|
| 694-01AFM
| Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc
| each
| 1275.00
|
|
| 694-01S
| Pelcotec™ CDMS-XY-1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25x75mm glass slide
| each
| 1275.00
|
|
|
|
NEW Pelcotec™ CDMS-XY-1C-ISO
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #697-1-RECERT in the product table below).
See SEM mount selections, types A-R |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 697-1
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted
| each
| $1750.00
|
|
| 697-1A
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A
| each
| 1775.00
|
|
| 697-1B
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B
| each
| 1775.00
|
|
| 697-1C
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C
| each
| 1775.00
|
|
| 697-1D
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D
| each
| 1775.00
|
|
| 697-1E
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E
| each
| 1775.00
|
|
| 697-1F
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F
| each
| 1775.00
|
|
| 697-1G
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount
| each
| 1900.00
|
|
| 697-1K
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K
| each
| 1775.00
|
|
| 697-1L
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L
| each
| 1775.00
|
|
| 697-1M
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M
| each
| 1775.00
|
|
| 697-1O
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O
| each
| 1775.00
|
|
| 697-1P
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P
| each
| 1775.00
|
|
| 697-1Q
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q
| each
| 1775.00
|
|
| 697-1R
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R
| each
| 1775.00
|
|
| 697-1AFM
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc
| each
| 1775.00
|
|
| 697-1S
| Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide
| each
| 1775.00
|
|
| 697-1-RECERT
| Recertification Service for the 697-1 through 697-1S family of ISO CDMS Products
| each
| 700.00
|
|
|
|
NEW Pelcotec™ CDMS-XY-0.1C-ISO
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #698-01-RECERT in the product table below).
See SEM mount selections, types A-R |
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 698-01
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted
| each
| $2500.00
|
|
| 698-01A
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A
| each
| 2525.00
|
|
| 698-01B
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B
| each
| 2525.00
|
|
| 698-01C
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C
| each
| 2525.00
|
|
| 698-01D
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D
| each
| 2525.00
|
|
| 698-01E
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E
| each
| 2525.00
|
|
| 698-01F
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F
| each
| 2525.00
|
|
| 698-01G
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount
| each
| 2650.00
|
|
| 698-01K
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K
| each
| 2525.00
|
|
| 698-01L
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L
| each
| 2525.00
|
|
| 698-01M
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M
| each
| 2525.00
|
|
| 698-01O
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O
| each
| 2525.00
|
|
| 698-01P
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P
| each
| 2525.00
|
|
| 698-01Q
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q
| each
| 2525.00
|
|
| 698-01R
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R
| each
| 2525.00
|
|
| 698-01AFM
| Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc
| each
| 2525.00
|
|
| 698-01S
| Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide
| each
| 2525.00
|
|
| 698-01-RECERT
| Recertification Service for the 698-01 through 698-01S family of ISO CDMS Products
| each
| 1000.00
|
|
|
| |
Pelcotec™ CDMS-XY-1-ISO |
Pelcotec™ CDMS-XY-0.1-ISO |
| Substrate size: 2.5 x 2.5mm |
✓ |
✓ |
| Substrate thickness: 525 ±10µm |
✓ |
✓ |
| Unique serial identification number per chip |
✓ |
✓ |
| Calibration squares at 2mm, 1mm, 0.5mm |
✓ |
✓ |
| Graticule lines perpendicular to X and Y axes ruled at 10um, 5µm, 2µm and 1µm pitch |
✓ |
✓ |
| High Resolution version only - Additional graticule lines perpendicular to X and Y axes ruled at 500, 250 and 100nm pitch |
— |
✓ |
| Feature material: 50nm Cr (2mm - 5µm) |
✓ |
✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) |
✓ |
✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) |
— |
✓ |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) |
T versions |
T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) |
C versions |
C versions |
| Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available |
C versions only |
C versions only |
| Available unmounted |
✓ |
✓ |
| SEM mounts A-R available |
✓ |
✓ |
| Precision better than 0.3% |
✓ |
✓ |
from AISthesis Products, Inc.,
as an ISO/IEC 17025:2017 accredited calibration laboratory.