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  Calibration Overview
CDMS Critical Dimension Magnification Standards Overview		  
 

NEW Pelcotec™ CDMS-XY ISO
Critical Dimension Magnification Standard

ISO

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS-XY ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Fiducial lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.

Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques yielding superior line edge quality.

Available in two feature size ranges, and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory for a total of four versions:

Pelcotec™ CDMS-XY-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T-ISO Traceable Certificate (345KB PDF)

Pelcotec™ CDMS-XY-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T-ISO Traceable Certificate (347KB PDF)

Pelcotec™ CDMS-XY-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1C-ISO Conformance Certificate (513KB PDF)

Pelcotec™ CDMS-XY-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C-ISO Conformance Certificate (702KB PDF)

Comparison Table Below



Feature sizes for the Pelcotec™ CDMS-XY-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

Feature sizes for the Pelcotec™ CDMS-XY-0.1T-ISO & -0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-1T-ISO

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
693-1 Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $250.00
Qty:
693-1A Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 275.00
Qty:
693-1B Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 275.00
Qty:
693-1C Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 275.00
Qty:
693-1D Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 275.00
Qty:
693-1E Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 275.00
Qty:
693-1F Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 275.00
Qty:
693-1G Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each 400.00
Qty:
693-1K Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 275.00
Qty:
693-1L Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 275.00
Qty:
693-1M Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 275.00
Qty:
693-1O Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 275.00
Qty:
693-1P Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 275.00
Qty:
693-1Q Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 275.00
Qty:
693-1R Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 275.00
Qty:
693-1AFM Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 275.00
Qty:
693-1S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 1µm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25 x 75mm glass slide each 275.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-0.1T-ISO

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SE, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
694-01 Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), unmounted each $1250.00
Qty:
694-01A Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount A each 1275.00
Qty:
694-01B Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount B each 1275.00
Qty:
694-01C Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount C each 1275.00
Qty:
694-01D Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount D each 1275.00
Qty:
694-01E Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount E each 1275.00
Qty:
694-01F Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount F each 1275.00
Qty:
694-01G Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), you supply mount each 1400.00
Qty:
694-01K Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount K each 1275.00
Qty:
694-01L Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount L each 1275.00
Qty:
694-01M Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount M each 1275.00
Qty:
694-01O Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount O each 1275.00
Qty:
694-01P Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount P each 1275.00
Qty:
694-01Q Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount Q each 1275.00
Qty:
694-01R Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), Mount R each 1275.00
Qty:
694-01AFM Pelcotec™ CDMS-XY-0.1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 12mm AFM Disc each 1275.00
Qty:
694-01S Pelcotec™ CDMS-XY-1T-ISO, 2mm - 100nm, traceable to NIST (ISO 17025:2017 Sampling Scope of Accreditation), 25x75mm glass slide each 1275.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
697-1 Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $1750.00
Qty:
697-1A Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 1775.00
Qty:
697-1B Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 1775.00
Qty:
697-1C Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 1775.00
Qty:
697-1D Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 1775.00
Qty:
697-1E Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 1775.00
Qty:
697-1F Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 1775.00
Qty:
697-1G Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each 1900.00
Qty:
697-1K Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 1775.00
Qty:
697-1L Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 1775.00
Qty:
697-1M Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 1775.00
Qty:
697-1O Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 1775.00
Qty:
697-1P Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 1775.00
Qty:
697-1Q Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 1775.00
Qty:
697-1R Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 1775.00
Qty:
697-1AFM Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 1775.00
Qty:
697-1S Pelcotec™ CDMS-XY-1C-ISO, 2mm - 1µm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 1775.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ CDMS-XY-0.1C-ISO

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
698-01 Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, unmounted each $2500.00
Qty:
698-01A Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount A each 2525.00
Qty:
698-01B Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount B each 2525.00
Qty:
698-01C Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount C each 2525.00
Qty:
698-01D Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount D each 2525.00
Qty:
698-01E Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount E each 2525.00
Qty:
698-01F Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount F each 2525.00
Qty:
698-01G Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, you supply mount each 2650.00
Qty:
698-01K Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount K each 2525.00
Qty:
698-01L Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount L each 2525.00
Qty:
698-01M Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount M each 2525.00
Qty:
698-01O Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount O each 2525.00
Qty:
698-01P Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount P each 2525.00
Qty:
698-01Q Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount Q each 2525.00
Qty:
698-01R Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, Mount R each 2525.00
Qty:
698-01AFM Pelcotec™ CDMS-XY-0.1C, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 12mm AFM Disc each 2525.00
Qty:
698-01S Pelcotec™ CDMS-XY-0.1C-ISO, 2mm - 100nm, Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab, 25 x 75mm glass slide each 2525.00
Qty:




  Pelcotec™ CDMS-XY-1-ISO Pelcotec™ CDMS-XY-0.1-ISO
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Unique serial identification number per chip ✓ ✓
Calibration squares at 2mm, 1mm, 0.5mm ✓ ✓
Graticule lines perpendicular to X and Y axes ruled at 10um, 5µm, 2µm and 1µm pitch ✓ ✓
High Resolution version only - Additional graticule lines perpendicular to X and Y axes ruled at 500, 250 and 100nm pitch — ✓
Feature material: 50nm Cr (2mm - 5µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ✓ ✓
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) — ✓
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions C versions
Available unmounted ✓ ✓
SEM mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓


CDMS product supplied with certification to ISO 17025:2017 requirement
from AISthesis Products, Inc., as an ISO/IEC 17025:2017 accredited calibration laboratory.

ISO
Certificate Number: 4904.01