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Cressington Coaters Overview
7003

108 Auto Sputter Coater

ideal for routine sample preparation for scanning electron microscopy



The 108 Auto Sputter Coater with Ø120mm Chamber


The 108 Auto Sputter Coater is ideally suited for high quality coating of non-conducting samples for standard SEM imaging. The added functionality of the automatic features enable fine grain coating on a range of samples with a choice of target materials. The automatic purge and leak functions together with the optional MTM-20 High Resolution Thickness Controller offer consistent thickness for optimized conductive coating results. Cool, fine-grain sputtering is achieved with a very efficient low voltage DC magnetron head. The quick change target method allows a range of metals to be used.

Main Features

  • The 108 Auto Sputter Coater offers the choice of fully automated or manual operation. The specifications also include automatic vent and argon purge control.
  • In automatic mode, the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the MTM-20 High Resolution Thickness Controller (optional) can be used to terminate the sputtering process at the desired thickness. Alternatively, the MTM-10 High Resolution Thickness Monitor (optional) may also be used for manual termination.
  • The digital sputter current control is fully independent of the argon gas pressure in the sputtering chamber to achieve consistent sputtering rates and optimum specimen coverage.
  • The efficient DC magnetron operates on a low voltage for "ultra-cool" sputtering to avoid effects on sample surface.
  • The novel magnetron design gives wide-angle coverage at close sample distance, even for sensitive samples.
  • Separate electronic valves for leak, purge and vent, coupled with a precise needle valve, ensures quick and easy operation.
  • Quick target change allows for a range of materials used: Au, Au/Pd, Pt, Pt/Pd (Au fitted as standard).

108C Auto/SE Carbon Coater 108C Auto/SE Carbon Coater
Sputter Head Standard Ø63mm Stage

 


108 auto sputter coater The 108 Auto has a 120mm outer diameter chamber. For a larger chamber system, the 108 Auto/SE is also available. This system has a larger 150mm outer diameter chamber and has the option of adding the Rotary-Planetary-Tilting or Rotary-Tilting Stages.



108 Auto Sputter Coater Accessories & Consumables
RT Stage for 208 and 108Auto/SE
Rotary-Tilting Stage		 film thickness monitor MTM10, MTM_10
 Thickness Measurement Systems		 sputter targets
Targets 		RVP pump for 108 coaters
Vacuum System
& Connections


Spares & Consumables for 108 Series Coaters
Specifications for the 108 Auto Sputter Coater

Ordering Information

108 Auto
Prod # Description Unit Price Order / Quote
7003 108 Auto Sputter Coater V2, 115VAC* each P.O.R.
Qty:
7003-220 108 Auto Sputter Coater V2, 220VAC* each P.O.R.
Qty:
*The 108 Auto Sputter Coater includes: 91110 Gold Target, (57mm dia. x 0.1mm); 7021 Specimen Mount Stage for 12 pin mounts; Operating Instructions


Accessories & Options for the 108 Auto
Prod # Description Unit Price Order / Quote
Vacuum Pump & Connections
92080 Rotary Vane Pump RVP 100-3.5, 6m³/hr, 115volts, 50/60Hz each $1395.00
Qty:
92080-220 Rotary Vane Pump RVP 100-3.5, 6m³/hr, 230volts, 50/60Hz each 1395.00
Qty:
92080-108 All Metal Connection Kit each 390.00
Qty:
891-31 PELCO® Ultra 19 Rotary Pump Oil each 17.80
Qty:
92061 Exhaust Filter, Max Flow Rate 3CFM, without adapter, 1/2" male NPT thread each 160.75
Qty:
Accessories
9611 Filter for Venting Inlet, complete with 1/4" hose each 14.25
Qty:
896 PELCO Bell Jar Kleen™, 14 oz. each 14.36
Qty:
7032 Argon Pressure Regulator Kit, including dual stage pressure regulator, 3m gas hose and 2 hose clips for 6mm tube fittings each 610.00
Qty:
Optional Rotary Tilting Stage
7050 108 Rotary Tilting Stage for Cressington 108 Auto and 108 Manual Sputter Coaters each P.O.R.
Qty:
9631 9VDC Converter Kit for 108 RT #7050, RT #9660, and RPT #9524 Stages 100-240VAC 50/60Hz each 110.00
Qty:
Optional MTM-10 Thickness Monitor & MTM-20 Thickness Controller
93004 MTM-10 High Resolution Thickness Monitor System* 110VAC, 50/60Hz each 2475.00
Qty:
93004-220 MTM-10 High Resolution Thickness Monitor System* 220VAC, 50/60Hz each 2475.00
Qty:
93006 MTM-20 High Resolution Thickness Controller System* 115VAC, 50/60Hz each P.O.R.
Qty:
93006-220 MTM-20 High Resolution Thickness Controller System* 220VAC, 50/60Hz each P.O.R.
Qty:
93008 Replacement Crystals for MTM-10/20 each 42.00
Qty:
93009 Replacement Crystals for MTM-10/20 each 93.30
Qty:
*The MTM-10 High Resolution Thickness Monitor System and MTM-20 High Resolution Thickness Controller System include: MTM Controller Box, BNC Cable, Oscillator, Vacuum feedthrough; Cables; Crystal holder, test crystal; Instructions


 
Ted Pella, Inc has been an authorized distributor, including exclusive in the Americas, for the complete range of Cressington vacuum coating systems for over 25 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, and the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.