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Large Sample and 4" Wafer Table
This optional table for the Rotary-Tilting Stage #9660 is made to fit a 4" wafer, three standard glass sides, or to accommodate larger samples. To use this larger stage with the MTM-10 Thickness Monitor or MTM-20 Thickness Controller, the Metal Spacer Ring #8091-2 with MTM Bracket (pictured below) would be required. This Sample Table is made of machined aluminum has an outer diameter of 105mm.
Not compatible with MTM-10 Thickness Monitor or MTM-20 Thickness Controller unless purchased with #8091-2 Metal Spacer Ring with MTM Bracket below.
| Prod #
| Description
| Unit
| Price
| Order / Quote
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| 9660-100
| Large Sample and 4" Wafer Table for #9660 Stage
| each
| $315.00
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Metal Spacer Ring with MTM Bracket,
shown with Crystal Holder (not included)
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NEW Metal Spacer Ring with MTM Bracket
This optional Metal Spacer Ring has an added MTM Crystal Holder bracket (Crystal Holder not included) allowing the Crystal Holder to be attached to the side of the chamber. Attaching the Crystal Holder in this location gives room for the Large Sample Table #9660-100 (above) with the MTM-10 or MTM-20 on the Rotary-Tilting Stage #9660.
To give additional room for larger or taller samples, this bracket can be used with either 150mm Rotary Stage option when used on the 108C Auto/SE #9603/9603-220, 108 Auto/SE #7009/7009-220, along with the High Vacuum 208HRD Sputter Coater and 208C Carbon Coater.
Spacer is 150mm diameter x 15mm tall, machined aluminum, O-ring included.
PELCO® Technical Notes, Metal Spacer with MTM Bracket (546KB PDF)
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 8091-2
| Metal Spacer Ring with MTM Bracket
| each
| $255.00
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