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Cressington Coaters Overview

108 Auto/SE Sputter Coater

for applications where the coating thickness must have a very high degree of uniformity



The 108 Auto/SE Sputter Coater with Ø150mm Chamber


The 108 Auto/SE Sputter Coater is the Special Equipment version of the 108 Auto Sputter Coater. The 108 Auto/SE is intended for use in applications where the coating thickness must have a very high degree of uniformity. Compared to the 108 Auto, the chamber size has been increased to 150mm outer diameter to accommodate the optional Rotary-Planetary-Tilting Stage or Rotary-Tilting Stage.


  9660
Optional Rotary-Planetary-Tilting (RPT) Stage (#9524) demonstrating variable speed settings and adjustable tilt. Shown with MTM crystal monitor installed, also optional.     Optional Rotary-Tilting (RT) Stage
(#9660)


The 108 Auto/SE Sputter Coater can also be fitted with an optional MTM-10 or MTM-20 Thickness Measurement System.

108 Auto/SE Sputter Coater with MTM-20 High Resolution Thickness Controller and RPT Stage


108 Auto/SE Sputter Coater Accessories & Consumables
RT Stage for 208 and 108Auto/SE
Rotary-Tilting/Rotary-Planetary-Tilting Stage		 film thickness monitor MTM10, MTM_10
 Thickness Measurement Systems		 sputter targets
Targets 		RVP pump for 108 coaters
Vacuum System
& Connections


Spares & Consumables for 108 Series Coaters
Specifications for the 108 Auto/SE Sputter Coater

Ordering Information

108 Auto/SE Sputter Coater
Prod # Description Unit Price Order / Quote
7009 108 Auto/SE Sputter Coater V2, 115VAC* each P.O.R.
Qty:
7009-220 108 Auto/SE Sputter Coater V2, 220VAC* each P.O.R.
Qty:
* The 108 Auto SE Sputter Coater includes: 91110 Gold Target; 7021 Specimen Mount Stage for 12 pin mounts; 150mm dia. Chamber; Manual Target Shutter; and Operating Instructions.

Accessories & Options for the 108 Auto/SE
Prod # Description Unit Price Order / Quote
Vacuum Pump & Connections
92080 Rotary Vane Pump RVP 100-3.5, 6m³/hr, 115volts, 50/60Hz each $1395.00
Qty:
92080-220 Rotary Vane Pump RVP 100-3.5, 6m³/hr, 230volts, 50/60Hz each 1395.00
Qty:
92080-108 All Metal Connection Kit each 390.00
Qty:
891-31 PELCO® Ultra 19 Rotary Pump Oil each 17.80
Qty:
92061 Exhaust Filter, Max Flow Rate 3CFM, without adapter, 1/2" male NPT thread each 160.75
Qty:
Accessories
9611 Filter for Venting Inlet, complete with 1/4" hose each 14.25
Qty:
896 PELCO Bell Jar Kleen™, 14 oz. each 14.36
Qty:
Optional Rotary-Planetary-Tilting & Rotary-Tilting Stages
9524 Rotary-Planetary-Tilting (RPT) Stage (variable speed 9V battery powered) each P.O.R.
Qty:
9660 Rotary-Tilting (RT) Stage (variable speed 9V battery powered) each P.O.R.
Qty:
9631 9VDC Converter Kit for 108 RT #7050, RT #9660, and RPT #9524 Stages 100-240VAC 50/60Hz each 110.00
Qty:
MTM-10 Thickness Monitor and MTM-20 Thickness Controller
93004 MTM-10 High Resolution Thickness Monitor System* 110VAC, 50/60Hz each 2475.00
Qty:
93004-220 MTM-10 High Resolution Thickness Monitor System* 220VAC, 50/60Hz each 2475.00
Qty:
93006 MTM-20 High Resolution Thickness Controller System* 115VAC, 50/60Hz each P.O.R.
Qty:
93006-220 MTM-20 High Resolution Thickness Controller System*220VAC, 50/60Hz each P.O.R.
Qty:
93005 MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 110VAC, 50/60Hz each 2600.00
Qty:
93005-220 MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 220VAC, 50/60Hz each 2600.00
Qty:
93007 MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 115VAC, 50/60Hz each P.O.R.
Qty:
93007-220 MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 220VAC, 50/60Hz each P.O.R.
Qty:
93008 Replacement Crystals for MTM-10/20 each 42.00
Qty:
93009 Replacement Crystals for MTM-10/20 each 93.30
Qty:
*The MTM-10 High Resolution Thickness Monitor System and MTM-20 High Resolution Thickness Controller System include: MTM Controller Box, BNC Cable, Oscillator, Vacuum feedthrough; Cables; Crystal holder, test crystal; Instructions
*RPT: Rotary-Tilting-Planetary Stage

Ted Pella, Inc has been an authorized distributor, including exclusive in the Americas, for the complete range of Cressington vacuum coating systems for over 25 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, and the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.