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Specifications for the
108 Auto/SE Sputter Coater

go to the 108 Auto/SE Sputter Coater

Specifications

Chamber Size: 150mm OD x 165mm height (5.9" x 6.5")
Variable height, 165mm to 250mm (6.5" to 9.8")
Target: Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick
Sample Table: Holds 12 SEM pin mounts; Height adjustable through 60mm
Sputter Supply: Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30, or 40mA)
Sputter Head: Low-voltage novel magnetron design
Quick target change
Wrap-around dark-space shield
Target shutter
Analog Metering: Vacuum Atm - 0.001mb
Current, 0 - 50mA
Thickness Monitoring: Optional, MTM-10
Thickness Controller: Optional, MTM-20 with termination facility
Control Method: Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer (1-300 sec)
Automatic vent
Desktop system: Vacuum pump has a compact design with low vibration operation All metal integrated coupling system

Requirements

Electrical: 100-120 or 200-240 VAC, 50/60Hz
(specify on order)
Power: 500VA (coater and pumping system #7010 together)
Argon gas: Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4")

Footprint

(Height: 325mm)

 


Dimensions (mm)
1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base