Specifications
|
| Chamber size: |
120mm OD x 120mm height (4.75 x 4.75") |
| Target: |
Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick |
| Sample table: |
Holds 12 SEM pin mounts; Height adjustable through 60mm |
| Sputter supply: |
Microprocessor based, safety interlock, variable, 40mA maximum
Programmable digital control |
| Sputter head: |
Low voltage "ultra-cool" planar magnetron
Quick target change
Wrap-around dark-space shield |
| Analog metering: |
Vacuum Atm - 0.001mb |
Thickness monitoring:
(optional) |
Use automatic terminating MTM-20 High Resolution Thickness Controller
or MTM-10 High Resolution Thickness Monitor (manual terminating) |
| Control method: |
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Precision needle valve
Digital timer (5-300 sec) with pause
Automatic vent |
| Desktop system: |
Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system |
Requirements
|
| Electrical: |
100-120 or 200-240 VAC, 50/60Hz
(specify on order) |
| Power: |
500VA (coater and pumping system #7010 together) |
| Argon gas: |
Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4") |