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Calibration Overview
SEM Supplies & Accessories
TEM Calibration

Scanning Electron Microscopy Calibration

Magnification | EDS/WDS/EPMA/XPS | Resolution | Performance Testing

Magnification & FIB Standards
Pelcotec™ CDMS Critical Dimension Magnification Standards	Pelcotec™ G-1 Silicon Calibration Specimen 1µm Pitch	Pelcotec™ LMS-20 Low Magnification Calibration Standard	MRS-6 Magnification Reference Standard 1,500X to 1,000,000X
Critical Dimension (CD) Calibration Test Specimen for SEM/FIB/AFM	2D Holographic Array Very High Resolution Calibration Standards for SEM, FIB, AFM and Auger	Low Magnification Calibration Ruler	MRS-4 Magnification Reference Standard 10X to 200,000X
Planotec 10µm Pitch Silicon Calibration Specimen	292nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger	500nm Cross Line Grating Replica	MRS-3 Magnification Reference Standard 10X to 50,000X
145nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger	Fine Copper Mesh Grid Low Magnification Standard

X-Ray Microanalysis Standards (EDS/WDS/EPMA/XPS)
UHV-EL Reference Standards for EDS/WDS	PELCO® XCS EDS Calibration Standards	PELCO X-Checker® X-Ray Reference Calibration for SEM	PELCO® Faraday Cup
PELCO® NiOx Test Specimen for Analytical Electron Microscopy (AEM)	Planotec GSR & Particle Analysis Calibration Kit

Resolution Standards
AuSome™ Resolution Standard for SEM, FIB & FESEM	Gold on Carbon High Resolution Test Specimens	Tin on Carbon Resolution Test Specimens NEW Sizes Available!	Low Magnifcation Resolution Test Specimens

Performance Testing
Back Scattered Electron Test Specimens	JN-1 SEM Demonstration Specimens	PELCO® Astigmatism Corrector

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International: Telephone: 530-243-2200; Fax 530-243-3761; Email: [email protected]
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