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Calibration Overview
SEM Calibration Overview

Line/Grid SEM Magnification Calibration Standards

Scanning Electron Microscopy Test Specimens

Pelcotec™ CDMS - Critical Dimension Magnification Standards

LMS-20
Pelcotec™ LMS-20
Low MagnificationCalibration Standard 		silicon test specimen
Planotec 10µ Silicon
Calibration Specimen 		silicon test specimen
Pelcotec™ G-1 Silicon
Calibration Specimen
1µm Pitch
Low-Mag Calibration Ruler
Low Magnification
Calibration Ruler 		waffle grating replica
500nm Cross Line
Grating Replica 		agar copper mesh grids
Fine Copper
Mesh Grids

 

LMS-20
Details of the Pelcotec™ LMS-20

Pelcotec™ LMS-20 Low Magnification Calibration Standard

The Pelcotec™ LMS-20 Calibration Standard has been specifically designed for precise low magnification calibration and specimen stage calibration. Useful for large area particle analysis, GSR analysis, low magnification SEM applications, and LM applications with reflected light. Useful in the 5x to 1000x magnification range.
Specifications are:
  • Total calibration area is 20 x 10mm with crossed lines and 0.01mm divisions
  • 75nm Cr lines on ultra-flat silicon substrate
  • Cross hairs showed at every 0.1mm with larger cross hairs at 0.5 and 1mm over the complete area
  • Serial number etched on each Pelcotec™ LMS-20 calibration standard
  • NIST traceable version is Pelcotec™ LMS-20T (batch level certificate provided)
  • Individually fully certified version is Pelcotec™ LMS-20C (individual certificate included)
  • Si die size is 22 x 11mm with a thickness of 675µm +/- 10µm, <100> orientation
  • Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
  • Available unmounted or mounted on larger SEM specimen mounts

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the SEM pin mount, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.

Also available for transmitted light microscopy as LMS-20G

See information on SEM mounts

NIST Traceable Pelcotec™ LMS-20T Calibration Standards.
688-1 LMS-20T Sample Certificate of Traceability (221KB PDF)

Made in USA
Prod # Description Unit Price Order / Quote
688-1 Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Unmounted each $165.00
Qty:
688-1G Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mount G, you supply mount each 265.00
Qty:
688-1L Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mount L each 185.00
Qty:
688-1O Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mount O each 185.00
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688-1Q Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mount Q each 185.00
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688-1R Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mount R each 185.00
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688-1S Pelcotec™ LMS-20T, Low Magnification Calibration Standard, Traceable, Mounted on 25 x 75mm slide each 185.00
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Individually Certified Pelcotec™ LMS-20C Calibration Standards.
688-11 LMS-20C Sample Certificate (302KB PDF)

Made in USA
Prod # Description Unit Price Order / Quote
688-11 Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified Unmounted each $668.50
Qty:
688-11G Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified, Mount G, you supply mount each 768.50
Qty:
688-11L Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified, Mount L each 688.50
Qty:
688-11O Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified, Mount O each 688.50
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688-11Q Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified, Mount Q each 688.50
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688-11R Pelcotec™ LMS-20C, Low Magnification Calibration Standard, Certified, Mount R each 688.50
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688-11S Pelcotec™ LMS-20C, Low MagnificationCalibration Standard, Certified, Mounted on 25 x 75mm slide each 688.50
Qty:




silicon test specimen

Pelcotec™ G-1 Silicon Calibration Specimen - 1µm Pitch

Includes 1µm, 10µm and 100µm pitch

The Pelcotec™ G-1 calibration specimen with a 1µm pitch grid is very useful for magnification calibration or image distortion check in the 100x to 10,000x magnification range. Can be used for SEM, Auger, Sims, FIB, and LM (reflected light). Specimen may also be mounted directly on the Pelcotec™ G-1 which will give an accurate internal calibration in the image. Particularly useful when working with powders. Possible alternative for the SIRA calbration specimen (0.462µm pitch) which is no longer available.

The Pelcotec™ G-1 has the following specifications:
  • Total calibration area is 3x3mm with a 1µm pitch grid
  • Lines at 10um and 100um are thicker for easy orientation
  • Includes 1µm, 10µm and 100µm pitch
  • 300nm +/- 30nm deep line etched in ultraflat Si
  • Line width is 200nm at 1µm, 300nm at 10µm and 400nm at 100µm pitch lines
  • Precision is 1µm +/- 0.025µm with a perpendicularity better than 0.01°
  • Serial number etched on each Pelcotec™ G-1 calibration standard
  • NIST traceable version is Pelcotec™ G-1T
  • Individually fully certified version is Pelcotec™ G-1C
  • Si die size is 4x4mm with a thickness of 525µm +/-20µm, <100> orientation
  • Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
  • Available unmounted or mounted on SEM specimen mounts

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.


Details for Pelcotec™ G-1 Calibration Specimen

G-1
G-1
G-1
1µm Pitch Lines
10µm Pitch Lines
SEM Image Shows 1µm Pitch

See information on SEM mounts


NIST Traceable Pelcotec™ G-1T Calibration Standards.
633-1 Sample Certificate of Traceability (157KB PDF)

Made in USA
Prod # Description Unit Price Order / Quote
633-1 Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Unmounted each $85.00
Qty:
633-1A Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount A each 96.50
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633-1B Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount B each 96.50
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633-1C Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount C each 96.50
Qty:
633-1D Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount D each 96.50
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633-1E Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount E each 96.50
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633-1F Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount F each 96.50
Qty:
633-1G Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount G, you supply mount each 185.00
Qty:
633-1K Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount K each 96.50
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633-1L Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount L each 96.50
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633-1M Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount M each 96.50
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633-1O Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount O each 96.50
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633-1P Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount P each 96.50
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633-1Q Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount Q each 96.50
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633-1R Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mount R each 96.50
Qty:
633-1S Pelcotec™ G-1T, 1µm Grid Calibration Standard, Traceable, Mounted on 25x75mm slide each 96.50
Qty:


Individually Certified Pelcotec™ G-1C Calibration Standards.
633-11 Sample Certificate of Calibration (185KB PDF)

Made in USA
Prod # Description Unit Price Order / Quote
633-11 Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Unmounted each $579.50
Qty:
633-11A Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount A each 599.50
Qty:
633-11B Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount B each 599.50
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633-11C Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount C each 599.50
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633-11D Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount D each 599.50
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633-11E Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount E each 599.50
Qty:
633-11F Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount F each 599.50
Qty:
633-11G Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount G, you supply mount each 679.50
Qty:
633-11K Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount K each 599.50
Qty:
633-11L Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount L each 599.50
Qty:
633-11M Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount M each 599.50
Qty:
633-11O Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount O each 599.50
Qty:
633-11P Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount P each 599.50
Qty:
633-11Q Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount Q each 599.50
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633-11R Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mount R each 599.50
Qty:
633-11S Pelcotec™ G-1C, 1µm Grid Calibration Standard, Certified, Mounted on 25x75mm slide each 599.50
Qty:




silicon test specimen
See information on
mounts A-R

Planotec Silicon Calibration Specimen - 10µm Pitch

Useful for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.

PELCO® Technical Notes, Planotec Test Specimen (342KB PDF)

Prod # Description Unit Qty Price Order / Quote
615 Planotec Silicon Test Specimen, Unmounted each 1-9 $79.45
Qty:
10+ 71.50

Prod # Description Unit Price Order / Quote
615-A Planotec Silicon Test Specimen, Mount A each $99.80
Qty:
615-B Planotec Silicon Test Specimen, Mount B each 99.80
Qty:
615-C Planotec Silicon Test Specimen, Mount C each 99.80
Qty:
615-D Planotec Silicon Test Specimen, Mount D each 99.80
Qty:
615-E Planotec Silicon Test Specimen, Mount E each 99.80
Qty:
615-F Planotec Silicon Test Specimen, Mount F each 99.80
Qty:
615-G Planotec Silicon Test Specimen, Mount G, you supply mount each 199.80
Qty:
615-K Planotec Silicon Test Specimen, Mount K each 99.80
Qty:
615-L Planotec Silicon Test Specimen, Mount L each 99.80
Qty:
615-M Planotec Silicon Test Specimen, Mount M each 99.80
Qty:
615-O Planotec Silicon Test Specimen, Mount O each 99.80
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615-P Planotec Silicon Test Specimen, Mount P each 99.80
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615-Q Planotec Silicon Test Specimen, Mount Q each 99.80
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615-R Planotec SiliconTest Specimen, Mount R each 99.80
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615-5 Planotec Test Specimen for incident light microscopy, Mounted on a blackened glass slide each 461.90
Qty:

Planotec Silicon Test Specimens with calibration certificate for mounted test specimens only. The guaranteed accuracy is 1%. The basic reference specimen is calibrated by the National Physical Laboratory (counter part of NIST), of England, by laser beam interferometry. Sample Certification for Planotec Test Specimen (796KB PDF)

Prod # Description Unit Price Order / Quote
660-615-A Planotec Silicon Test Specimen, Certified, Mount A each $916.60
Qty:
660-615-B Planotec SiliconTest Specimen, Certified, Mount B each 867.40
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660-615-C Planotec Silicon Test Specimen, Certified, Mount C each 867.40
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660-615-D Planotec Silicon Test Specimen, Certified, Mount D each 1872.54
Qty:
660-615-E Planotec Silicon Test Specimen, Certified, Mount E each 867.40
Qty:
660-615-F Planotec Silicon Test Specimen, Certified, Mount F each 806.00
Qty:
660-615-G Planotec Silicon Test Specimen, Certified, Mount G, you supply mount each 978.15
Qty:
660-615-K Planotec Silicon Test Specimen, Certified, Mount K each 850.00
Qty:
660-615-L Planotec Silicon Test Specimen, Certified, Mount L each 1425.75
Qty:
660-615-M Planotec Silicon Test Specimen, Certified, Mount M each 872.60
Qty:
660-615-O Planotec Silicon Test Specimen, Certified, Mount O each 872.60
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660-615-P Planotec Silicon Test Specimen, Certified, Mount P each 872.60
Qty:
660-615-Q Planotec Silicon Test Specimen, Certified, Mount Q each 835.00
Qty:
660-615-R Planotec Silicon Test Specimen, Certified, Mount R each 872.60
Qty:
660-615-5 Planotec Test Specimen for incident light microscopy, Certified, Mounted on a blackened glass slide each 935.30
Qty:





Low-Mag Calibration Ruler
See information on mounts A-R

Low Magnification Calibration Ruler

100 markings, divisions 0.01mm on disc

Calibration ruler on 1/8" (3.2mm) nickel-plated copper disc. 1mm long scale with 100 markings, with 0.01mm divisions with an accuracy of +/- 0.0005mm or better. Available unmounted, or mounted on SEM mounts.
PELCO® Technical Notes, SEM Low Magnification Ruler Disc (275KB PDF)

Prod # Description Unit Qty Price Order / Quote
630 Low Magnification Calibration Ruler, Unmounted each 1-9 $100.65
Qty:
10+ 95.65

Prod # Description Unit Price Order / Quote
630-A Low Magnification Calibration Ruler, Mount A each $110.00
Qty:
630-B Low Magnification Calibration Ruler, Mount B each 110.00
Qty:
630-C Low Magnification Calibration Ruler, Mount C each 110.00
Qty:
630-D Low Magnification Calibration Ruler, Mount D each 110.00
Qty:
630-E Low Magnification Calibration Ruler, Mount E each 110.00
Qty:
630-F Low Magnification Calibration Ruler, Mount F each 110.00
Qty:
630-G Low Magnification Calibration Ruler, Mount G, You Supply Mount each 210.00
Qty:
630-K Low Magnification Calibration Ruler, Mount K each 110.00
Qty:
630-L Low Magnification Calibration Ruler, Mount L each 110.00
Qty:
630-M Low Magnification Calibration Ruler, Mount M each 110.00
Qty:
630-O Low Magnification Calibration Ruler, Mount O each 110.00
Qty:
630-P Low Magnification Calibration Ruler, Mount P each 110.00
Qty:
630-Q Low Magnification Calibration Ruler, Mount Q each 110.00
Qty:
630-R Low Magnification Calibration Ruler, Mount R each 110.00
Qty:




waffle grating replica
See information on
mounts A-R

500nm SEM Cross Line Grating Replica

500nm cross line grating carbon replica (waffle pattern) with Au/Pd shadowing. Replica is mounted on a 400 mesh copper TEM grid with a diameter of 3mm. This cross line replica has well-defined trench type grooves, which makes it easy to determine the 500nm pitch or the 2,000 lines per millimeter. Available as unmounted standard or mounted on a SEM mount.

See our #253 Magnification Calibration slide-rule for quick assistance in obtaining magnification based on space counts of this product.
PELCO® Technical Notes, 500nm SEM Cross Line Grating Replica (180KB PDF)

Manufactured in USA
Prod # Description Unit Price Order / Quote
674 SEM Grating Replica, 500nm, Unmounted each $49.50
Qty:
674-A SEM Grating Replica, 500nm, Mount A each 55.50
Qty:
674-B SEM Grating Replica, 500nm, Mount B each 55.50
Qty:
674-C SEM Grating Replica, 500nm, Mount C each 55.50
Qty:
674-D SEM Grating Replica, 500nm, Mount D each 55.50
Qty:
674-E SEM Grating Replica, 500nm, Mount E each 55.50
Qty:
674-F SEM Grating Replica, 500nm, Mount F each 55.50
Qty:
674-G SEM Grating Replica, 500nm, Mount G, You Supply Mount each 153.50
Qty:
674-K SEM Grating Replica, 500nm, Mount K each 55.50
Qty:
674-L SEM Grating Replica, 500nm, Mount L each 55.50
Qty:
674-M SEM Grating Replica, 500nm, Mount M each 55.50
Qty:
674-O SEM Grating Replica, 500nm, Mount O each 55.50
Qty:
674-P SEM Grating Replica, 500nm, Mount P each 55.50
Qty:
674-Q SEM Grating Replica, 500nm, Mount Q each 55.50
Qty:
674-R SEM Grating Replica, 500nm, Mount R each 55.50
Qty:




waffle grating replica
See information on
mounts A-R

Grating Replica, Waffle

(Crossed-Lines)

Carbon replica with Au/Pd shadowing with 2,160 lines per millimeter. Replica is mounted on a 400 mesh copper TEM grid with a diameter of 3mm. See our number 252 Magnification Calibration Slide-Rule for quick assistance in obtaining magnification based on space counts of this product.

PELCO® Technical Notes, SEM Magnification Calibration Diffraction Grating Replica (195KB PDF)

Manufactured in USA
Prod # Description Unit Price Order / Quote
604 SEM Grating Replica, Unmounted each $53.90
Qty:
604-A SEM Grating Replica, Mount A each 59.50
Qty:
604-B SEM Grating Replica, Mount B each 59.50
Qty:
604-C SEM Grating Replica, Mount C each 59.50
Qty:
604-D SEM Grating Replica, Mount D each 59.50
Qty:
604-E SEM Grating Replica, Mount E each 59.50
Qty:
604-F SEM Grating Replica, Mount F each 59.50
Qty:
604-G SEM Grating Replica, Mount G, you supply mount each 157.50
Qty:
604-K SEM Grating Replica, Mount K each 59.50
Qty:
604-L SEM Grating Replica, Mount L each 59.50
Qty:
604-M SEM Grating Replica, Mount M each 59.50
Qty:
604-O SEM Grating Replica, Mount O each 59.50
Qty:
604-P SEM Grating Replica, Mount P each 59.50
Qty:
604-Q SEM Grating Replica, Mount Q each 59.50
Qty:
604-R SEM Grating Replica, Mount R each 59.50
Qty:




agar copper mesh grids

Fine Copper Mesh Grids in Folding Grids (unmounted)

For low magnification calibration of scanning electron microscopes. The fine mesh is held within a Ø3mm 100 mesh folding grid.
Available with 1000 mesh (25.4µm pitch).

Prod # Description Unit Price Order / Quote
631-A, 1000 mesh, pitch 25.4µm
631-A 1000 mesh in 3mm 100 mesh Folding Grid each $50.70
Qty: