Disk or Annular Sputter Targets

Disc Targets

High purity disc type sputter targets for a wide variety of sputter or ion coater brands: PELCO^®, Cressington, Agar, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron, Quorum, SPI, and Safematic. The disc or foil type sputter targets are available in 60, 57, 54, 50, 38, 28, and 19mm diameter. Most of the disc type targets are clamped to the target holder by a target clamping ring; simply unscrew the clamping ring and change the target.

Useful Information For Selecting SEM Sputter Target Material

The target diameter can be selected for sputter coater models listed below.

Ø62mm (2-11/25") Sputter Targets
Ø60mm (2-3/8") Sputter Targets
Ø57mm (2-1/4") Sputter Targets
Ø54mm (2-1/8") Sputter Targets
Ø50mm (2") Sputter Targets
Ø38mm (1-1/2") Sputter Targets
Ø28mm (1-1/10") Sputter Targets
Ø19mm (3/4") Sputter Targets

Annular Targets

High purity annular targets (with a hole in the center) for Polaron and Hummer sputter coaters. The annular targets are fabricated on an aluminum target ring and are supplied as complete assemblies with sputter material and aluminum support ring. Available with either pure gold or gold/palladium (60/40% alloy) with a thickness of 0.1mm (0.004") on an aluminum support ring: 82mm O.D. with 60mm I.D for Polaron and 3" O.D with 2" I.D. for Hummer sputter coaters. See Annular Sputter Targets Selection Table for Compatibility.

Used Target Recycling Program

We offer a 16% discount on new precious metal / noble SEM Sputter Targets in exchange for your old used target of same composition and dimensions. This exchange program simplifies your recycling or reclamation procedures and is available for Au, Au/Pd, Pt, Pt/Pd, Pd, Ag and Ir targets. Please select your desired replacement from the list of 60 - 38mm targets below and contact customer service for the exchange program details. Your new target will be shipped once we have received and checked your used target. This offer is not available for targets that have been bonded.

Bonded Target Information

Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as Silver Paint. In this case the target has to be removed from the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use Indium Bonded Targets, #29-49; see Technical Notes, Bonding of Sputter Targets on Fullam Sputter Coaters.

Prod #

Description

Unit

Price

Order / Quote

High purity 62mm (2-11/25") diameter Targets for Hitachi MC1000

91700

NEW Gold Target, 99.99% Au (Ø62mm x 0.1mm)

each

$1738.50

Qty:

91701

NEW Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø62mm x 0.1mm)

each

1600.75

Qty:

91702

NEW Platinum Target, 99.95% Pt (Ø62mm x 0.1mm)

each

1429.75

Qty:

91703

NEW Platinum/Palladium Target, 99.99% Pt:Pd 80/20 ratio (Ø62mm x 0.1mm)

each

1399.25

Qty:

91704

NEW Palladium Target, 99.95% Pd (Ø62mm x 0.1mm)

each

1394.75

Qty:

High purity 60mm (2-3/8") diameter Targets for Denton DESK II / DESK III / DESK IV/ DESK V, Edwards 150 B / SCANCOAT, Emitech K500/K550/K650 and Emscope SC500 sputter coaters*

Manufacturer	Model	62mm 2 11/25"	60mm 2 3/8"	57mm 2 1/4"	54mm 2 1/8"	50mm 2"	38mm 1 1/2"	28mm 1 1/10"	19mm 3/4"
AGAR	Manual type sputter coater			X
AGAR	Automatic sputter coater			X
Bal-Tec	SCD 005				X
Bal-Tec	SCD 040				X
Bal-Tec	SCD 050				X
Bal-Tec	SCD 500				X
Bal-Tec	MED 10				X
Bal-Tec	MED 20				X
Bio-Rad	SC 5200			X
Bio-Rad	SC 502			X
Cressington	108 manual			X
Cressington	108 auto			X
Cressington	108/auto/SE			X
Cressington	NEW 208HRD							X
Cressington	208HR			X
Cressington	308HR						X
Cressington	328UHR						X
Denton	DESK II		X
Denton	DESK III		X
Denton	DESK IV		X
Denton	DESK V		X
Edwards	150 B		X
Edwards	Scancoat		X
Emitech	SC7620/SC7610			X
Emitech	K500X/K550X/K650X		X
Emitech	K575/K575XD/Q150			X
Emscope/Polaron	SC 502			X
Fullam	EffaCoater					X
Fullam	EMS-76					X
Gatan	681 Ion Beam Coater								X
Gatan	682 PECS Ion Beam Coater								X
Gatan	685 PECS II System								X
Hitachi	MC1000	X
ISI	ISI 5400			X
JEOL	JFC-1200			X
JEOL	JFC-1300			X
JEOL	JFC-1400			X
JEOL	JFC-1600			X
JEOL	JFC-2300HR			X
JEOL	Smart Coater					X
LEICA	ACE 200				X
LEICA	ACE 600				X
LEICA	EM MED 020				X
LEICA	EM SCD 005				X
LEICA	EM SCD 050				X
LEICA	EM SCD 500				X
PELCO^®	Model 3			X
PELCO^®	SC4			X
PELCO^®	SC5			X
PELCO^®	SC6			X
PELCO^®	SC7			X
Polaron*	E5000			X
Polaron*	E5200			X
Polaron*	E5400			X
Polaron*	SC7610/SC7620			X
Quorum	Q150			X
Safematic	CCU-010				X
SPI	SPI-Module™			X
SPI	SPI Super™			X
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum

Manufacturer	Model	82mm O.D. x 60mm I.D.	3" O.D. x 2" I.D.
Polaron	E5100	X
Polaron	SC510	X
Polaron	SC515	X
Polaron	SC7640	X
Polaron	SC7680	X
Hummer	V		X
Hummer	VI		X
Hummer	6.2		X
Hummer	8		X
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum

Useful Information for Selecting Target Material for Coating Non-conductive SEM Samples Most SEM sputter coaters allow for using a choice of sputter target material to optimize the coating material for the sample and or application. Below are some useful tips for selecting sputter target metal to coat non-conductive samples. Please be aware that each sample is different and the coating quality is also affected by the interaction of sample material and target material. The metallization of the surface creates a thin conductive layer on a non-conductive sample An additional advantage is that most coating materials have a higher secondary electron (SE) yield as the sample material. Coating material with lower atomic numbers are more suitable for backscattered electron (BE) imaging of the sample. The information below is valid when using modern DC magnetron SEM sputter coaters.
Aluminum	The sputter yield for Aluminum is very low and it oxidizes very quickly. Not practical with most SEM sputter coaters. SDS (108KB PDF)
Gold	Excellent and most widely used target material for standard SEM coating. Due to the low work function it is very efficient and when using an ultra-cool sputter coaters (such as the Cressington 108auto) there is virtually no heating of sensitive samples. Grain size is visible with high magnifications on modern SEMs. SDS (121KB PDF)
Gold/Palladium	Has a higher work function than pure gold and hence lower sputtering rates. Au/Pd gives smaller grain size when evaporated, but in SEM sputter coaters the difference between Au and Au/Pd is small if practically visible at all. Less suitable for heat sensitive specimens and less suitable for EDS analysis due to two sets of peaks for the coating material.
Palladium	Can be used as a lower cost alternative for low to medium magnification range. Lower SE signal. Alternative to avoid overlapping peaks as with Au when using EDS. SDS (118KB PDF)
Platinum	Fine grain size; smaller than Au or Au/Pd. Higher work function than Au result in slower sputtering rates. Sensitive to "stress cracking" if oxygen is present. More expensive. High SE yield. SDS (119KB PDF)
Platinum/Palladium	Similar grain size as Pt, but less sensitive to stress cracking. Good for FESEM. Best results are achieved in a high resolution coater such as the Cressington 208HR.
Silver	Lower cost alternative for lower magnification range. Large grain size than Au. Suitable for table top SEMs. Lower SE yield than Au or Pt. Coating can oxidize if samples are not stored under vacuum. Alternative for special EDS work. SDS (92KB PDF)
Chromium	Very fine grain size, useful for FESEM. Required high vacuum such as the Cressington 208HR coater to eliminate oxygen. Coating oxidizes and sample can only be stored in high vacuum. Image directly after coating. Excellent alternative for BE imaging of biological samples. Low sputtering rates. SDS (100KB PDF)
Iridium	Very fine grain size. Excellent all-round coating material for FESEM samples. Requires high vacuum coater such as Cressington 208HR. Slower sputtering rates. SDS (92KB PDF)
Tungsten	Alternative for Cr. Very fine grain size, but oxidizes very rapidly. Low sputtering rates
Titanium	SDS (113KB PDF)
Tantalum	SDS (121KB PDF)
Nickel	Alternative for special EDS application, not ideal for SE imaging. Suitable for BE imaging. Very low sputtering rates. Coating oxidizes. SDS (161KB PDF)
Niobium	SDS (125KB PDF)
Cobalt	SDS (145KB PDF)
Copper	Alternative for EDS applications. Suitable for medium/low magnifications, special EDS applications and BE imaging.
Aluminum	SDS (108KB PDF)
Note 1: Carbon is best used for EDS application but it is difficult to sputter - carbon evaporation yields much better and quicker results.

Disc or Annular Sputter Targets for Sputter Coaters

Disc Targets

Annular Targets

Used Target Recycling Program

Bonded Target Information

Disc Type Sputter Targets Selection Table

Disc Sputter Target Ordering Information

NEW 28mm Diameter Targets for the 208HRD High Resolution Sputter Coater

Annular Sputter Targets Selection Table

Annular Sputter Target Ordering Information

Disc or Annular Sputter Targets
for Sputter Coaters