Structure:
Pattern type:
Step heights:
Period:
Chip size:
Effective area: |
Si Wafer with SiO2 layer for grating
1-Dimensional (in Z-axis direction)
20±1.5nm for TGZ-20
110±2nm for TGZ-100
520±3nm for TGZ-500
3 ±0.01µm 5 x 5 x 0.5mm Central square of 3 x 3mm |
 |
Note: Values for step heights are nominal; actual step height is given with the product and could be ±5% |
Prod #
| Description
| Unit
| Price
| Order / Quote
|
629-10
| Calibration grating TGZ-20, Z=20nm, unmounted
| each
| $172.00
|
|
629-10AFM
| Calibration grating TGZ-20, Z=20nm, mounted on 12mm AFM disc
| each
| 175.00
|
|
629-20
| Calibration grating TGZ-100, Z=110nm, unmounted
| each
| 172.00
|
|
629-20AFM
| Calibration grating TGZ-100, Z=110nm, mounted on 12mm AFM disc
| each
| 175.00
|
|
629-30
| Calibration grating TGZ-500, Z=520nm, unmounted
| each
| 172.00
|
|
629-30AFM
| Calibration grating TGZ-500, Z=520nm, mounted on 12mm AFM disc
| each
| 175.00
|
|
|