AFM, STM, SPM Calibration Specimens

Block Test Gratings for Z-axis	Triangular Test Grating for X- or Y-axis	Test Grating for Tip Sharpness
Test Grating for Lateral Calibration	Test Grating for X-, Y- and Z-direction	SiC-STEP Calibration Samples

A complete selection of useful, precise, practical calibration and test specimens for scanning probe microscopy (SPM, AFM and STM) applications. Included are calibration specimens for Z-axis, X- or Y-axis, X/Y/Z direction, linearity and tip sharpness parameters. Test specimen can be purchased either unmounted or mounted on a standard 12mm stainless steel AFM disc.

Block Test Gratings for Z-axis Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.

Structure: Pattern type: Step heights: Period: Chip size: Effective area: Si Wafer with SiO2 layer for grating 1-Dimensional (in Z-axis direction) 20±1.5nm for TGZ-20 110±2nm for TGZ-100 520±3nm for TGZ-500 3 ±0.01µm 5 x 5 x 0.5mm Central square of 3 x 3mm Note: Values for step heights are nominal; actual step height is given with the product and could be ±5% Prod # Description Unit Price Order / Quote 629-10 Calibration grating TGZ-20, Z=20nm, unmounted each $172.00 Qty: 629-10AFM Calibration grating TGZ-20, Z=20nm, mounted on 12mm AFM disc each 175.00 Qty: 629-20 Calibration grating TGZ-100, Z=110nm, unmounted each 172.00 Qty: 629-20AFM Calibration grating TGZ-100, Z=110nm, mounted on 12mm AFM disc each 175.00 Qty: 629-30 Calibration grating TGZ-500, Z=520nm, unmounted each 172.00 Qty: 629-30AFM Calibration grating TGZ-500, Z=520nm, mounted on 12mm AFM disc each 175.00 Qty:

Triangular Test Grating for X- or Y-axis The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization. Nominal values for height and pitch are given below. Actual values come with the test grating.

Structure: Pattern type: Edge angle: Edge Radius: Pattern Height: Pitch: Chip size: Effective area: Si wafer with grating in top surface 1-D array of triangular steps with precise linear and angular dimensions approximately 70 degrees ≤10nm 1.8µm - non-calibrated, for information only 3 ±0.01µm 5 x 5 x 0.5mm Central square of 3 x 3mm Prod # Description Unit Price Order / Quote 629-40 Test grating TGT-1500, 3µm pitch, unmounted each $245.00 Qty: 629-40AFM Test grating TGT-1500, 3µm pitch, mounted on 12mm AFM disc each 295.00 Qty:

Test Grating for Tip Sharpness The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.

Structure: Pattern type: Tip angle: Tip radius: Tip height: Period: Diagonal period: Chip size: Effective area: Si wafer with grating in top surface Array of sharp tips About 50 degrees ≤10nm 0.3 - 0.7µm 3 ±0.01µm 2.12µm 5 x 5 x 0.5mm Central square of 2 x 2mm Prod # Description Unit Price Order / Quote 629-50 Test grating TGTZ-400, 300-700nm tips, unmounted each $634.00 Qty: 629-50AFM Test grating TGTZ-400, 300-700nm tips, mounted on 12mm AFM disc each 498.50 Qty:

Test Grating for Lateral Calibration The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.

Structure: Pattern type: Height: Top square size: Edge radius: Period: Chip size: Effective area: Si wafer with grating in top surface Chessboard like array of square pillars with sharp undercut edges 0.3 - 0.6µm 1.2 x 1.2µm ≤10nm 3 ±0.05µm 5 x 5 x 0.5mm Central square of 3 x 3mm Note: Height and top square dimensions are given for information only (non calibrated values). Prod # Description Unit Price Order / Quote 629-60 Test grating TG3D-3000/600, pillars, unmounted each $321.00 Qty: 629-60AFM Test grating TG3D-3000/600, pillars, mounted on 12mm AFM disc each 295.00 Qty:

Test Grating for X-, Y- and Z-direction The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.

Structure: Pattern type: Height: Square size: Period: Chip size: Effective area: Si wafer with SiO2 layer for grating 3-Dimensional array of small squares 20 ±1.5nm 1.5 ±0.15µm 3 ±0.05µm 5 x 5 x 0.5mm Central square of 3 x 3mm Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating. The basic step height can vary from the specified one within 10% (example: step height can be 22 ±1.5nm). Prod # Description Unit Price Order / Quote 629-70 Test grating TG3D-3000/20, squares, unmounted each $576.00 Qty: 629-70AFM Test grating TG3D-3000/20, squares, mounted on 12mm AFM disc each 495.00 Qty:

SiC-STEP Calibration Samples
SiC/0.75	SiC/1.5
6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an AFM scanner's vertical movements in several nanometers interval. The simplicity of calibration of the calibration process is provided by the nearly uniform distribution of half-monolayer high steps (either 0.75 or 1.5nm) on the sample surface demonstrating both chemical and mechanical stability. The step height corresponds to the half of the lattice constant of the 6H-SiC crystal in the (0001) direction. PELCO® Technical Notes for SiC-STEP Calibration Sample (147K pdf)

Specifications: SiC / 0.75 SiC / 1.5 Structure: SiC with Steps Single Step Height: 0.75nm 1.5nm Average Inter Step Distance: 0.15-0.4µm 0.2-0.5µm Misorientation of Surface: ~0.2° ~0.3° Average Roughness of Area Between Steps (terraces): 0.09nm Chip Size: 5 x 5 x 0.3mm SiC/0.75 SiC/1.5 Prod # Description Unit Price Order / Quote 629-85 SiC-STEP Calibration Sample with 0.75nm Step Height, unmounted each $237.00 Qty: 629-85AFM SiC-STEP Calibration Sample with 0.75nm Step Height, mounted on 12mm AFM disc each 245.00 Qty: 629-90 SiC-STEP Calibration Sample with 1.50nm Step Height, unmounted each 237.00 Qty: 629-90AFM SiC-STEP Calibration Sample with 1.50nm Step Height, mounted on 12mm AFM disc each 245.00 Qty: