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Products for semiconductor automated TEM workflow
With the increase in interest in automation of sample preparation for failure analysis in the semiconductor industry, the SEMI industry association has recently published the E177 standard for automated transmission electron microscopy (TEM). The products here are designed to fulfill the requirements for consumables in the automated TEM workflow.
Based on the Lamella Carrier Container (LCC) design in the SEMI E177 standard as implemented by Thermo Fisher Scientific, the FLCC is a one-time use container for delivering fresh LCs (lamella carriers)/FIB grids into the automated TEM workflow. The FLCC is made of injection-molded ESD safe plastic and carries 100 SEMI E177 conforming LCs in either half-moon or round 3mm grid formats. The FLCC ships fully populated with data matrix code (DMC) marked LCs. The DMC is a QR code that identifies each grid in the system. The DMC code identifies the grid type, and contains a 6-digit non-sequential serial number consistent with the requirements of Thermo Fisher Scientific’s automation workflow. Custom DMC labelling is not available.