Specifications
|
| Chamber Size |
150mm OD x 165mm high (5.9" x 6.5") standard
Variable height, 165mm - 250mm (6.5" - 9.8") optional |
| Evaporation source |
Bradley type (6.15mm OD rods [1/4"])
Heavy duty stainless construction |
| Evaporation supply |
Microprocessor based Feedback loop controlled with remote current/voltage sensing
Safety interlocked
Variable, 180A max. with over-current protection |
| Sample stage |
Static table holds 12 SEM 1/2" stubs
Height adjustment through 60mm
Optional rotary-planetary-tilting stage |
| Analog metering |
Vacuum, dual range Atm - 0.001mb
1 x 10-3mb to 5 x 10-6
Current, 0 - 200A |
| Control method |
Automatic evaporation control using programmed voltage and timer
Full manual override with pulsed or continuous operation
Digital timer, 1 - 9.9 seconds
Digital voltage setting, 0.1 - 5.5V
Automatic vent |
Pumping System
|
| Configuration |
Turbo/rotary pump combination
Optional Dry Scroll Pump instead of rotary pump |
| Pumping speed |
67 l/sec. |
| Pumpdown time |
1.5 min. to 1 x 10-4mb |
| Ultimate pressure |
5 x 10-6mb |
| Desktop system |
Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system |
Services required
|
| Supply |
100-120 or 200-240 VAC, 50/60Hz |
| Power |
1200 VA max. |
System Dimensions
|
| Size |
Width 600mm (23.6"), Depth 600mm (23.6"), Height 360mm (14.2") |
| Weight |
45Kg (99.5 lbs) coater and pumps |