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Calibration Overview
AFM Calibration
SEM Magnification Calibration Overview Page

Critical Dimension (CD)
Calibration Test Specimens

for SEM, FIB, and AFM

scanning electron microscopy, focused ion beem microscopy and atomic force microscopy calibration test specimens scanning electron microscopy, focused ion beem microscopy and atomic force microscopy calibration test specimens

"Critical Dimension (CD) structures" are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480µm around its edges, helpful for orientation. There are three versions available.

critical dimension specimen with a 10-5-2-1-0.5um structure
 		Version with a 10-5-2-1-0.5um structure

This CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0µm, 2.0µm, 1.0µm and 0.5µm. The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface.
Two types are offered:
- non-certified
- certified by PTB (Physikalische Technische Bundesanstalt - German counter part of NIST)
and individually numbered.


Based on the measurement of 9 different standards, the accuracy and uniformity are:
Pattern Size 10µm 5µm 2µm 1µm 0.5µm
Accuracy 0.20% 0.22% 0.35% 0.56% 0.78%
Uniformity 0.27% 0.34% 0.53% 0.80% 1.2%

Ordering Information:
Prod # Description Unit Price Order / Quote
Unmounted
618-5 CD Structure 10-5-2-1-0.5µm Specimen, non-certified, unmounted each $113.50
Qty:
618-7 CD Structure 10-5-2-1-0.5µm Specimen, certified traceable by German Physikalische Technical Bundesanstalt, unmounted each 2161.90
Qty:
Mounted, Non-certified: (see mount selections, types A-Q)
618-5A CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount A each 114.75
Qty:
618-5B CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount B each 114.75
Qty:
618-5C CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount C each 114.75
Qty:
618-5D CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount D each 114.75
Qty:
618-5E CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount E each 114.75
Qty:
618-5F CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount F each 114.75
Qty:
618-5G CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount G, You Supply Mount each P.O.R.
Qty:
618-5K CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount K each 114.75
Qty:
618-5L CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount L each 114.75
Qty:
618-5M CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount M each 114.75
Qty:
618-5O CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount O each 114.75
Qty:
618-5P CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount P each 114.75
Qty:
618-5Q CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount Q each 114.75
Qty:
618-5R CD Structure 10-5-2-1-0.5µm Specimen, non-certified, Mount R each 114.75
Qty:
Mounted, Certified by the German Physikalische Technische Bundesanstalt (see mount selections, types A-Q)
618-7A CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount A each 1545.50
Qty:
618-7B CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount B each 1545.50
Qty:
618-7C CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount C each 1545.50
Qty:
618-7D CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount D each 1545.50
Qty:
618-7E CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount E each 1545.50
Qty:
618-7F CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount F each 1545.50
Qty:
618-7G CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount G, You Supply Mount each P.O.R.
Qty:
618-7K CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount K each 1545.50
Qty:
618-7L CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount L each 1545.50
Qty:
618-7M CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount M each 1545.50
Qty:
618-7O CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount O each 1545.50
Qty:
618-7P CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount P each 1545.50
Qty:
618-7Q CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount Q each 1545.50
Qty:
618-7R CD Structure 10-5-2-1-0.5µm Spec., Certified, Mount R each 1545.50
Qty:




500-200-100nm structure critical dimension specimen
(overview with location bars)

Version with a 500-200-100nm structure

500-200-100nm structure critical dimension specimen
(structure)

This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch. Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements. The patterns are etched into Si with a depth of approx. 45-50nm. There is no coating on the Si surface. On some CD calibration targets one of the 100nm lines can be missing. This is a normal occurrence and does not influence performance of the specimen. see mount selections, types A-Q

Pattern Size 500nm 200nm 100nm
Accuracy 0.30% 0.55% 0.50%
Uniformity 0.24% 0.60% 1.20%

Ordering Information:
Prod # Description Unit Price Order / Quote
Unmounted
618-4 CD Structure 500-200-100nm Specimen, non-certified, unmounted each $756.20
Qty:
Mounted, Non-certified: (see mount selections, types A-Q)
618-4A CD Structure 500-200-100nm Specimen, non-certified, Mount A each 735.40
Qty:
618-4B CD Structure 500-200-100nm Specimen, non-certified, Mount B each 735.40
Qty:
618-4C CD Structure 500-200-100nm Specimen, non-certified, Mount C each 735.40
Qty:
618-4D CD Structure 500-200-100nm Specimen, non-certified, Mount D each 735.40
Qty:
618-4E CD Structure 500-200-100nm Specimen, non-certified, Mount E each 735.40
Qty:
618-4F CD Structure 500-200-100nm Specimen, non-certified, Mount F each 735.40
Qty:
618-4G CD Structure 500-200-100nm Specimen, non-certified, Mount G, You Supply Mount each P.O.R.
Qty:
618-4K CD Structure 500-200-100nm Specimen, non-certified, Mount K each 735.40
Qty:
618-4L CD Structure 500-200-100nm Specimen, non-certified, Mount L each 735.40
Qty:
618-4M CD Structure 500-200-100nm Specimen, non-certified, Mount M each 735.40
Qty:
618-4O CD Structure 500-200-100nm Specimen, non-certified, Mount O each 735.40
Qty:
618-4P CD Structure 500-200-100nm Specimen, non-certified, Mount P each 735.40
Qty:
618-4Q CD Structure 500-200-100nm Specimen, non-certified, Mount Q each 735.40
Qty:
618-4R CD Structure 500-200-100nm Specimen, non-certified, Mount R each 735.40
Qty: