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Cressington Introduction

208HR High Resolution Sputter Coater

for FESEM Applications


Cressington 208HR High Resolution Sputter Coater for FESEM
208HR-57 shown above with Rotary-Planetary-Tilting
RPT Stage and MTM-20 Thickness Controller


The 208HR High Resolution Sputter Coater from Cressington offers real solutions to the problems encountered when coating difficult samples for FESEM imaging. FESEM applications need extremely thin, fine-grained, uniform coatings to eliminate charging and to improve contrast on low density materials. In order to minimize the effects of grain size, the 208HR offers a full range of coating materials and gives unprecedented control over thickness and deposition conditions. The 208HR Turbo Pumped High Vacuum System offers a wide range of operating pressures allowing precise control of both uniformity and conformity of the coating, minimizing charging effects.



The 208HR High Resolution Sputter Coater is a complete coating solution, including as standard:



cressington mtm-20 high resolution thickness controller  
MTM-20 High Resolution
Thickness Controller
  Rotary-Planetary-Tilting RPT Stage demonstrating
variable speed settings and adjustable tilt.


Main Features:



208HR Target Configurations

The 208HR is available in a number of configurations to deliver the best high resolution coatings for your applications. This system is available with two different sputter head designs. The base system is the 208HR-57 #8000, which utilizes a standard 57mm diameter target (Pt/Pd & Cr targets included) and has a Pfeiffer DUO 3.0 rotary-vane backing pump for the turbo. A dry scroll backing pump is also an option on this system (#8004). The 208HR-28 #8008-28 is an upgraded version of the 208HR-57 offering a smaller 28mm diameter target with higher efficiency to better utilize more expensive materials like iridium. This version has a diaphragm backing pump for the turbo included as standard.



57mm target shown in cressington 208HR open 57mm target shown in cressington 208HR closed   28mm target in cressington 208HR open 28mm target in cressington 208HR closed
57mm Diameter Target   28mm Diameter Target


Preferred Coating Materials for FESEM Applications:

targets available

Targets available:
 Ø57mm / Ø28mm



208HR Chamber

The 208HR has a modular chamber that consists of glass chamber, metal spacer rings (2 included), and rotary-planetary-tilting stage. These components are labeled in the image below.


targets available
208HR Chamber as shown on 208HR-28  


The sputter head support pillar can be adjusted into three different positions, varying the overall chamber height. Each adjustment location corresponds to a different metal spacer/ glass chamber / rotary-planetary-tilting RPT stage configuration. The addition of a spacer ring above the RPT stage increases the deposition distances by 15mm (height of metal spacer ring). Two metal spacers are included with the 208HR, but a third (#8091-1) can be purchased separately.

 


targets available targets available
targets available
Support pillar adjustment locations

Also available is an optional stationary stage with tall 150mm chamber and additional spacer ring (#7021-208HR).



Specifications for the 208HR High Resolution Sputter Coater

Ordering Information

Prod # Description Unit Price Order / Quote
115V Systems
8000 208HR-57 High Resolution Sputter Coater for FESEM, 115VAC, 50/60Hz, Cr and Pt/Pd target each P.O.R.
Qty:
8002 208HR-57 Iridium coater for FESEM, 115VAC, 50/60Hz, Ir target each P.O.R.
Qty:
8004 208HR-57 High Resolution Sputter Coater for FESEM, Dry-Pumping System, 115VAC, 50/60Hz, Cr and Pt/Pd target each P.O.R.
Qty:
8008 208HR-57 Iridium coater for FESEM, Dry Pumping System, 115VAC, 50/60Hz, Ir target each P.O.R.
Qty:
8008-28 NEW 208HR-28 Diaphragm Pump, 115VAC, 50/60Hz, Specify target choice each P.O.R.
Qty:
220V Systems
8000-220 208HR-57 High Resolution Sputter Coater for FESEM, 220VAC, 50/60H, Cr and Pt/Pd target each P.O.R.
Qty:
8002-220 208HR-57 Iridium coater for FESEM, 220VAC, 50/60Hz, Ir target each P.O.R.
Qty:
8004-220 208HR-57 High Resolution Sputter Coater for FESEM, Dry-Pumping System, 220VAC, 50/60Hz, Cr and Pt/Pd target each P.O.R.
Qty:
8008-220 208HR-57 Iridium coater for FESEM, Dry Pumping System, 220VAC, 50/60Hz, Ir target each P.O.R.
Qty:
8008-220-28 NEW 208HR-28 Diaphragm Pump, 220VAC, 50/60Hz, Specify target choice each P.O.R.
Qty:
Accessories and Spares:
7021-208HR Second Chamber Outfit for 208HR including Glass Cylinder Tall (150mm D x 150mm H), Metal Spacer Ring, and Stationary Stage each 625.00
Qty:
7021-100 Stationary stage with threaded rod, 63mm diameter, height adjustable each 125.00
Qty:
8025 O-Ring, 150mm, for Glass Cylinder for 208C, 208HR, 108 Auto/SE and 108C Auto/SE each 17.20
Qty:
8006 Glass Cylinder Tall (150mm D x 150mm H), for light deposition, for 208HR, 208C, 108 Auto/SE and 108C Auto/SE each 465.00
Qty:
8009 Glass Cylinder Short (150mm D x 65mm H), for heavy deposition, for for 208HR, 208C, 108 Auto/SE and 108C Auto/SE each 375.00
Qty:
8091-1 Metal Spacer Ring, for 208HR, 208C, 108 Auto/SE and 108C Auto/SE each 240.00
Qty:
9611 Filter for Venting Inlet, complete with 1/4" hose for 108Auto, 108Auto/SE, 108Carbon, 108Carbon/SE, 208HR, and 208C each 14.25
Qty:
93008 Replacement Crystals for MTM-10/20 pkg/3 42.00
Qty:
93009 Replacement Crystals for MTM-10/20 pkg/10 93.30
Qty:
9609 Oil Mist Filter for Pfeiffer Duo 3.0 (#7010) each 72.75
Qty:
891-38 Pfeiffer P3 Oil for Pfeiffer Duo 3.0 (#7010) each 31.65
Qty:
896 PELCO Bell Jar Kleen™, 14 oz. each 14.36
Qty:
7032 Argon Pressure Regulator Kit, including dual stage pressure regulator, 3m gas hose and 2 hose clips for 6mm tube fittings each 610.00
Qty:





Ted Pella, Inc has been an authorized distributor, including exclusive in the Americas, for the complete range of Cressington vacuum coating systems for over 25 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, and the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.