Specifications
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| Sputter head |
Low voltage planar magnetron
Quick target change
Wrap-around dark-space shield
Shutter for target conditioning
|
| Targets |
Cr, Pt/Pd (standard) or Ir (Iridium coater)
optional: Au, Au/Pd, Cu, Ni, Pd, Pt, Ta, Ti and W |
| Sputter supply |
Microprocessor based
Safety interlock
Constant current control independent of vacuum
Digitally selectable current (20, 40, 60 or 80mA) |
| Chamber size |
150mm OD (6")
Includes short 65mm chamber. Vertical deposition distances to RPT can be varied by the addition of 15mm height metal spacer rings (2 included). Optional stationary stage with tall 150mm chamber and additional spacer ring available (#7021-208HR). |
| Sample stage |
Non-repetitive rotary, planetary motion with manual tilt 0-90°
Variable speed rotation
Crystal head
4 sample holders (specify when ordering, see Sample Holders)
|
| Analog metering |
Vacuum Atm - .001mb
Current 0-100mA
|
| Control method |
Automatic operation of gas purge and leak functions
Automatic process sequencing
Digital timer (5-300 sec) with pause
Automatic venting
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| Thickness control |
MTM-20 controller with terminating facility
|
Pumping System
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| Configuration |
208HR-57: Turbo drag / rotary-vane backing pump combination
Optional Dry Scroll Pump instead of rotary pump
208HR-28: Turbo drag /diaphragm backing pump combination |
| Pumping speed |
300 l/min at 0.1mb
|
| Pumpdown Time |
1 min to 1 x 10-3mb
|
| Ultimate pressure |
1 x 10-5mb
|
| Desktop system |
Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system
|
Thickness Controller
|
| MTM-20 |
Microprocessor based
4 digit display, push button zero
6MHz crystal with lifetime check
5 times/sec update rate (more information) |
| Thickness range |
0.0 - 999.9nm
|
| Resolution |
Better than 0.1nm
|
| Density range |
0.50 - 30.00gm/cm3 |
| Tooling factor range |
0.25 - 8.00
|
| Termination range |
0 - 999.9nm
|
Services Required
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| Electrical |
100-120 or 200-240VAC, 50/60Hz, (please specify)
|
| Power |
550VA max.
|
| Argon gas |
Purity, min. 99.995%
Pressure regulated 5 - 6 psi (0.4 bar)
Hose connection, 6.0mm (1/4") ID hose
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System Dimensions
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| Size |
Width 600mm (23.6"), Depth 600mm (23.6"), Height 450mm (17.7") (with rotary pump)
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| Weight |
40kg (88.5 lbs) (with rotary pump)
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