Specifications
|
| Chamber Size: |
150mm OD x 165mm height (5.9" x 6.5")
Variable height, 165mm to 250mm (6.5" to 9.8") |
| Target: |
Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick |
| Sample Table: |
Holds 12 SEM pin mounts; Height adjustable through 60mm |
| Sputter Supply: |
Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30, or 40mA) |
| Sputter Head: |
High field low voltage planar magnetron
Quick target change
Wrap-around dark-space shield
Target shutter |
| Analog Metering: |
Vacuum Atm - 0.001mb
Current, 0 - 50mA
|
| Thickness Monitoring: |
Optional, MTM-10 |
| Thickness Controller: |
Optional, MTM-20 with termination facility |
| Control Method: |
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer (5-300 sec) with pause
Automatic vent |
| Desktop system: |
Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system |
Requirements
|
| Electrical: |
100-120 or 200-240 VAC, 50/60Hz
(specify on order) |
| Power: |
500VA (coater and pumping system #7010 together) |
| Argon gas: |
Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4") |