Scanning Electron Microscopy Calibration

Magnification | EDS/WDS/EPMA/XPS | Resolution | Performance Testing

Magnification and FIB Standards
MetroChip Microscope Calibration Target for SEM/AFM/SPM	Pelcotec™ CDMS Critical Dimension Magnification Standards	Pelcotec™ G-1 Silicon Calibration Specimen 1µm Pitch	Pelcotec™ LMS-20 Low Magnification Calibration Standard
MRS-6 Magnification Reference Standard 1,500X to 1,000,000X	Critical Dimension (CD) Calibration Test Specimen for SEM/FIB/AFM	2D Holographic Array Very High Resolution Calibration Standards for SEM, FIB, AFM and Auger	Low Magnification Calibration Ruler
MRS-4 Magnification Reference Standard 10X to 200,000X	Planotec 10µm Pitch Silicon Calibration Specimen	292nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger	500nm Cross Line Grating Replica
MRS-3 Magnification Reference Standard 10X to 50,000X	Planotec 10µm Pitch Silicon Calibration Specimen	145nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger	Fine Copper Mesh Grid Low Magnification Standard

X-Ray Microanalysis Standards (EDS/WDS/EPMA/XPS)
UHV-EL Reference Standards for EDS/WDS	PELCO® XCS EDS Calibration Standards	X-CHECKER™ X-Ray Reference Calibration for SEM	PELCO® Faraday Cup
PELCO® NiOx Test Specimen for Analytical Electron Microscopy (AEM)	Planotec GSR & Particle Analysis Calibration Kit

Resolution Standards
AuSome™ Resolution Standard for SEM, FIB and FESEM	Gold on Carbon High Resolution Test Specimens	Tin on Carbon Resolution Test Specimens	Low Magnifcation Resolution Test Specimens

Performance Testing
Back Scattered Electron Test Specimens	JN-1 SEM Demonstration Specimens	PELCO® Astigmatism Corrector

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International: Telephone: 530-243-2200; Fax 530-243-3761; Email: [email protected]
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