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NW Vacuum Connection Parts, Fittings, Hoses and Filters
Vacuum Oil, Exhaust Filters, Foreline Traps

Dry Scroll Vacuum Pumps

The oil-free technology of dry scroll pumps eliminates the possibility of oil contamination in the vacuum system or in the environment around the rotary pump. No need to check oil, change oil and/or oil mist filters thus decreasing operation costs. Compared to diaphragm pumps, dry scroll pumps provide a vacuum around a magnitude providing much better compatibility with turbo pumps. Both the IDP-3 and SH-110 are affordable, compact high-performance pumps, which are relatively quiet and very suitable for laboratory type applications.

IDP-3 Dry Scroll Vacuum Pump

idp-3 dry scroll vacuum pump, oiless, varian

The IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is one of the smallest scroll pumps made for general vacuum applications and can be easily integrated in existing systems. With a pumping speed of 60 ltr/min (3.6m3/hr, 2.1 cfm), low base pressure of 250 millitor (3.3 x 10-1mbar) and a weight of only 21 lbs (9.5kg), it is a high performance pump with impressive specifications. The IDP-3 can be used to back small turbo pumps with drag stages or other vacuum lab equipment. Inlet connection is a standard NW16 KF flange. Ideal to upgrade system with a small oil-filled rotary pump to dry pumping systems (such as the Cressington 208HR). Available in 115 and 230 VAC versions.

Prod # Description Unit Price Order / Quote
92085 IDP-3 Dry Scroll Pump 60ltr/min, 3.6m3/hr, 2.1cfm, 115VAC/60Hz each $2847.50
92085-220 IDP-3 Dry Scroll Pump 50ltr/min, 3m3/hr, 1.8cfm, 230VAC/50Hz each 2847.50
92085-30 Tip Seal Kit for IDP-3 Pump each 368.35

SH-110 Dry Scroll Vacuum Pump

sh-110 dry scroll vacuum pump, oiless, varian

The SH-110 is a dry, hermetic scroll pump that combines a high pumping speed with a low ultimate vacuum in an impressive package. The SH-110 has a universal motor for 100-230 VAC for easy installation in existing systems. Pumping speed is 110 ltr/min (6.6m3/hr, 4 cfm) with an ultimate pressure of 50 millitor (6.6 x 10-2mbar) and can be used to back up turbo pumps compatible with that pumping speed. Inlet connection is standard NW25 KF flange.

Prod # Description Unit Price Order / Quote
92086 SH-110 Dry Scroll Pump 110ltr/min, 6.6 m3/hr, 4 CFM (60Hz) each P.O.R.
92086-30 Tip Seal Kit for SH-110 Pump each 308.50

IEC/IEC adapter cord to connect scroll vacuum pumps to systems with IEC power outlet.
iec/iec varian dry scroll vacuum pump adapter cord

Prod # Description Unit Price Order / Quote
92085-10 IEC/IEC Adapter Cord , 18" each $6.80

Technical Specs



Peak Pumping Speed (60Hz)

60L/m, 3.6m3/hr, 2.1 cfm

110L/m, 6.6m3/hr, 4 cfm

Peak Pumping Speed (50Hz)

50L/m, 3.0m3/hr, 1.8 cfm

90L/m, 5.4m3/hr, 3.3 cfm

Ultimate Pressure

2.5 x 10-1 torr (3.3 x 10-1 mbar)

5.0 x 10-2 torr (6.6 x 10-2 mbar)

Maximum Outlet Pressure

1.4 atmosphere (6.5 psig)

1.5 atmosphere (7.5 psig)

Inlet Connection

NW16 KF flange

NW25 KF flange

Exhaust Connection

1/4 in. female nat'l pipe thread
(10mm hose barb provided)

1/4 in. female nat'l pipe thread

Exhaust Connection Adapter

NW16 KF adapter provided

NW16 KF adapter provided

Gas Ballast Connection

1/8 in. female nat'l pipe thread

1/8 in. female nat'l pipe thread

Ambient Operation Temperature

5 to 45°C (41 to 113°F)

5 to 45°C (41 to 113°F)

Storage Temperature -20 to 60°C (-4 to 140°F) -20 to 60°C (-4 to 140°F)
Motor Rating 0.16 horsepower (0.12 kW) 0.25 horsepower (0.19 kW)
Supply Power 1 phase, 50-60 Hz,
100-115/200-240 VAC
1 phase, 50-60 Hz,
100-230 VAC
Motor Thermal Protection Automatic Automatic
Rotation Speed 3200 RPM at 60 Hz
2600 RPM at 50 Hz
1725 RPM at 60 Hz
1425 RPM at 50 Hz
Cooling Air-cooled Air-cooled
Weight 9.5 kg (21 lbs) 19.5 kg (43 lbs)
Size 384 x 140 x 181mm (LxWxH)
15.12" x 5.51 x 7.13"
384 x 258 x 258mm (LxWxH)
15.12" x 10.16 x 10.16"
Shipping Weight 10.5 kg (23 lbs) 19.5 kg (43 lbs)
Restrictions No corrosive, explosive, or particulate-forming gases
Leak Rate (exhaust sealed) <1 x 10-6 std-cc/sec helium <1 x 10-7 std-cc/sec helium
Compliances CE, CSA, CSA/CUS, Semi S2-703, and RoHS CE, CSA, and Semi S2-2000