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Grids Overview
PELCO® Silicon Nitride Support Films for TEM
Hydrophilic/Hydrophobic SiN Support Films
PELCO® Holey Silicon Nitride Support Films for TEM
PELCO® Silicon Dioxide Support Films for TEM
Silicon Nitride Coated 3mm Discs (blanks)

PELCO® Silicon Aperture Frames (without support film)

Silicon Aperture Frame 0.5 x 0.5mm
0.5 x 0.5mm
Silicon Aperture Frame 1.0 x 1.0mm
1.0 x 1.0mm
Silicon Aperture Frame 1.5 x 0.5mm
1.5 x 0.5mm

2 ea. 0.1 x 1.5mm
EasyGrip multiple windows
9 ea. 0.1 x 0.1mm
Single Aperture Opening Multiple Aperture Opening

The PELCO® Silicon Aperture Frames are 3mm disc-type frames with a thickness of 200µm and square or rectangular apertures. They are useful for a variety of applications:

  • Support frame to attach TEM lamellae made with FIB
  • Support frame for thin films, foils, wires and fibers
  • Mask for thin film research (deposition mask)

Detailed Measurements of Apertures

Product Specifications
  • Single Aperture Opening Sizes: 0.25 x 0.25mm, 0.5 x 0.5mm, 0.75 x 0.75mm, 1 x 1mm, and 0.5 x 1.5mm
  • Multiple Aperture Opening Sizes: 9 windows of 0.1 x 0.1mm in a 3 x 3 array or 2 windows of 0.1 x 1.5mm
  • Window Side Angle: 35.26°
  • Aperture Frame Thickness: 200µm
  • Aperture Frame Diameter: 3mm
  • Aperture Material: Si
  • Surface: Top side Si, back side (larger opening) has 50nm layer of Si3N4 for single aperture and 15nm Si3N4 for multiple apertures.
  • Packaging: The PELCO® Silicon Aperture Frames are packaged under cleanroom conditions in a small vial holding 10 discs.

MSDS (PDF - 367KB)

Made in USA

Prod # Description Unit Price Order / Quote
21545-10 PELCO® Silicon Aperture Frame (no support film), 0.25x0.25mm vial/10 $125.00
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21540-10 PELCO® Silicon Aperture Frame (no support film), 0.5x0.5mm vial/10 125.00
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21543-10 PELCO® Silicon Aperture Frame (no support film), 0.75x0.75mm vial/10 125.00
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21541-10 PELCO® Silicon Aperture Frame (no support film), 1.0x1.0mm vial/10 125.00
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21542-10 PELCO® Silicon Aperture Frame (no support film), 0.5x1.5mm vial/10 125.00
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21548-10 PELCO® Silicon Aperture Frame (no support film), with 2 each 0.1x1.5mm apertures vial/10 125.00
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21549-10 PELCO® Silicon Aperture Frame (no support film), with 9 each 0.1x0.1mm apertures vial/10 125.00
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PELCO® Silicon Nitride Coated and Silicon Ø3mm Discs (blanks)

Silicon Nitride Disks for SEM, FESEM, AFM
Silicon Nitride Blank
These 3mm Silicon discs have an ultra-flat (Ra 0.45 ± 0.2nm) 50nm ultra-low-stress Silicon Nitride layer on both sides. Also available with a hydrophilic or hydrophobic surface coating or just as a silicon disk. The disks are made with the same state-of-the-art manufacturing techniques as the PELCO® Silicon Nitride Support Films. The disk are perfectly round and have the Easygrip™ edge for easy handling. Clean surface, no broken edges and free of debris often associated with other manufacturing processes. The ultra-low-stress film is nonstoichiometric and closer to SiN than Si3N4. They can be used for a number of applications:
  • Specimen mounts for SEM and FESEM applications
  • Specimen discs for AFM applications
  • Blanks to build the PELCO® Liquid Cell™ together with the PELCO® Silicon Nitride Membrane
Product Specifications
  • Film Thickness: 50nm ultra-low-stress Silicon Nitride on both sides
  • Hydrophilic: 5nm atomic layer-deposited hydroxylated alumina on 50nm ultra-low-stress silicon nitride More Details
  • Hydrophobic: 5nm atomic layer-deposited alumina and fluoro-methylsilane on ultra-low-stress silicon nitride. More Details
  • Disk Thickness: 200µm silicon support
  • Disk Diameter: 3mm
  • Surface Roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
  • Packaging: The PELCO® Silicon Nitride Discs with hydrophilic or hydrophobic coating are packaged under cleanroom conditions in the PELCO® #160 TEM Grid Storage box. Each box holds 10 discs. The other discs are packed in a vial holding 10 discs.
MSDS (PDF - 367KB)
Made in USA

Prod # Description Unit Price Order / Quote
21555-10 PELCO® Silicon Nitride Coated Discs, Ø3mm vial/10 $95.00
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21556-10 PELCO® Silicon Nitride Coated Discs with hydrophilic coating, Ø3mm pkg/10 175.00
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21557-10 PELCO® Silicon Nitride Coated Discs with hydrophobic coating, Ø3mm pkg/10 175.00
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21558-10 PELCO® Silicon Discs, Ø3mm, No Coating vial/10 115.00
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PELCO® Liquid Cell™ Application

silicon nitride coated disk silicon nitride coated disk

Liquid cells have been in use for special microscopy and X-ray analysis techniques and can be used for SEM imaging of liquids, pastes, greases and cells grown on silicon nitride membranes. The material can be applied in the "well" of a Silicon Nitride Membrane Disk or cells can be grown in the well (inside of SiN window). To visualize the specimen in the SEM through the membrane the back has to be completely vacuum compatible sealed using the 3mm disk. A second SiN membrane can also be used, but the 3mm disk is a more cost effective, sturdier and will keep the liquid better positioned in the "well". Sealing can be done with either a fast curing epoxy glue (# 14420) or M-Bond® 610 (#16039). Make sure the complete Liquid Cell is sealed. To achieve optimum conductivity it is advisable to apply carbon paint on the sides to make a conductive bridge from the Silicon Nitride Membrane disk to the blank. The thin membrane of only 50nm has a low absorbance when using backscatter imaging or EDS in the SEM. The achievable results are similar or better compared to using a polymer type of membrane.