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Cressington Coaters Overview

Rotary-Tilting Sample Stage
for 120mm Ø Chamber

conformal coating for the Cressington 108 Sputter Coaters



Rotary-Tilting Stage on 108auto Sputter Coater

The Cressington 108 Rotary-Tilting sample stage has been designed for the 120mm chamber and is an option for the 108 Auto and 108 Manual sputter coaters (#7002, 7006, 6002 and 6006). The 108 R-T stage is supplied with a short glass cylinder (Ø120 x 44mm H). The overall height of the 108 R-T stage plus the short glass cylinder is the same as the standard Ø120 x 120mm H glass chamber it replaces. The 108 R-T Stage can be retrofitted to any Cressington 108 Auto and 108 Manual sputter coaters, either new or installed. The rotation speed is variable from 0-120 rpm in five steps and controlled by a multi-position rotary switch. The tilting angle is variable from 0-90° in both directions by rotating the external body. The tilting angle can either be locked using the locking lever or can be varied during deposition.

Note: the 108 R-T Stage is not suitable for use on the 108 Carbon/A Carbon Coater because of the short deposition distance. For carbon coating with rotary stage, see 108C/SE or 208C .




Features and benefits of the 108 R-T stage:

  • Enables highly uniform and conformal coatings
  • Enables thinner coating with better coverage
  • Compact with near eucentric tilt
  • Short coating distance
  • Rocking tilt from 0-90°
  • Fully compatible with thickness monitoring

With the 108 R-T stage, rough, entangled or highly 3-dimensional samples can be conformally coated with a thinner coating. The combination of rotation and eucentric tilt results in coating which is conformal to the sample surfaces. Sputter deposition covers at the sample surface from all possible directions. Charging is minimized, even with very thin coatings. This will improve both conductivity and image quality while reducing artifacts and coating thickness at the same time. This will also increase target efficiency. The 108R-T stage is fully compatible with the Cressington MTM-20 Thickness Controller or the Cressington MTM-10 Thickness Monitor. The design of the 108 R-T stage places the crystal head for the thickness monitoring system close to the sample surface which improves the accuracy of the thickness measurement. The R-T sample table comes standard with a sample table for 4 standard 12.7mm (1/2”) pin stubs. The power for the rotary motion is provided independently by a 9V battery which resides in the external housing. Alternatively, power can be provided by the optional 9V DC converter kit.



108C Auto Carbon Coater shown with the MTM-10 High Resolution Thickness Monitor
RT with Sample Carrier Removed
108C Auto Carbon Coater shown with the MTM-10 High Resolution Thickness Monitor
RT with Sample Carrier
108C Auto Carbon Coater shown with the MTM-10 High Resolution Thickness Monitor
RT with Sample Carrier with Stubs


The108 R-T stage is fully compatible with the Cressington 108 Auto, 108 Manual, PELCO® SC-7 and PELCO® SC-6 sputter coaters and can be easily retrofitted to new and existing systems.

Prod # Description Unit Price Order / Quote
7050 108 Rotary Tilting Stage for Cressington 108 Auto and 108 Manual Sputter Coaters each $2995.00
Qty:
9631 9V DC Converter Kit for 108 R-T Stage, Universal Voltage, 100-240VAC, 50/60Hz each 110.00
Qty:
9604 Glass Cylinder Short (ø120mm x 44mm H) for 108 R-T Stage each 199.00
Qty: