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Cressington Coaters Overview
Vacuum Evaporation Supplies

Disk or Annular Sputter Targets
for Sputter Coaters

targets

Disk Targets

High purity disk type sputter targets for a wide variety of sputter or ion coater brands: PELCO®, Cressington, Agar, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron, Quorum, and SPI. The disc or foil type sputter targets are available in 60, 57, 54, 50 and 19mm diameter. Most of the disk type targets are clamped to the target holder by a target clamping ring; simply unscrew the clamping ring and change the target.

Useful Information For Selecting SEM Sputter Target Material

The target diameter can be selected for sputter coater models listed below.

Ø60mm (2 3/8") Sputter Targets
Ø57mm (2 1/4") Sputter Targets
Ø54mm (2 1/8") Sputter Targets
Ø50mm (2") Sputter Targets
Ø38mm (1 1/2") Sputter Targets
Ø19mm (3/4") Sputter Targets

Annular Targets

High purity annular targets (with a hole in the center) for Polaron sputter coaters. The annular targets are fabricated on an aluminum target ring and are supplied as complete assemblies with sputter material and aluminum support ring.  Available with either pure gold or gold/palladium (60/40% alloy) with a thickness of 0.1mm (0.004”) on an aluminum support ring: 82mm O.D. with 60mm I.D for Polaron sputter coaters. See Annular Sputter Targets Selection Table for compatibility.

Used Target Recycling Program

We offer a 16% discount on new precious metal / noble SEM Sputter Targets in exchange for your old used target of same composition and dimensions. This exchange program simplifies your recycling or reclamation procedures and is available for Au, Au/Pd, Pt, Pt/Pd, Pd, Ag and Ir targets. Please select your desired replacement from the list of 60 - 38mm targets below and contact customer service for the exchange program details. Your new target will be shipped once we have received and checked your used target. This offer is not available for targets that have been bonded.

Bonded Target Information

Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as silver paint. In this case the target has to be removed from the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use indium (#29-49) bonded targets; see Technical Note - Bonding of Sputter Targets on Fullam Sputter Coaters (626KB PDF).

 

Disk Type Sputter Targets Selection Table

Manufacturer Model 60mm
2 3/8"
57mm
2 1/4"
54mm
2 1/8"
50mm
2"
38mm
1 1/2"
19mm
3/4"
AGAR Manual type sputter coater   X        
AGAR Automatic sputter coater   X        
Bal-Tec SCD 005     X      
Bal-Tec SCD 040     X      
Bal-Tec SCD 050     X      
Bal-Tec SCD 500     X      
Bal-Tec MED 10     X      
Bal-Tec MED 20     X      
Bio-Rad SC 5200   X        
Bio-Rad SC 502   X        
Cressington 108 manual   X        
Cressington 108 auto   X        
Cressington 108/auto/SE   X        
Cressington 208HR   X        
Cressington 308HR         X  
Cressington 328UHR         X  
Denton DESK II X          
Denton DESK III X          
Denton DESK IV X          
Denton DESK V X          
Edwards 150 B X          
Edwards Scancoat X          
Emitech SC7620/SC7610   X        
Emitech K500X/K550X/K650X  X          
Emitech K575/K575XD/Q150    X        
Emscope/Polaron SC 502   X        
Fullam EffaCoater       X    
Fullam EMS-76       X    
Gatan 681 Ion Beam Coater           X
Gatan 682 PECS Ion Beam Coater           X
ISI ISI 5400   X        
JEOL JFC-1200   X        
JEOL JFC-1300   X        
JEOL JFC-1400   X        
JEOL JFC-1600   X        
JEOL JFC-2300HR   X        
LEICA ACE 200     X      
LEICA ACE 600     X      
LEICA EM MED 020     X      
LEICA EM SCD 005     X      
LEICA EM SCD 050     X      
LEICA EM SCD 500     X      
PELCO® Model 3   X        
PELCO® SC4   X        
PELCO® SC5   X        
PELCO® SC6   X        
PELCO® SC7   X        
Polaron* E5000   X        
Polaron* E5200   X        
Polaron* E5400   X        
Polaron* SC7610/SC7620   X        
Quorum Q150   X        
SPI SPI-Module™   X        
SPI SPI Super™   X        
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum



Disk Sputter Target Ordering Information

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod # Description Unit Price Order / Quote
High purity 60mm (2 3/8") diameter Targets for Denton DESK II / DESK III / DESK IV/ DESK V, Edwards 150 B / SCANCOAT, Emitech K500/K550/K650 and Emscope SC500 sputter coaters
91217 Copper Target, 99.99% Cu (Ø60mm x 0.076mm) each $195.00
Qty:
91210 Gold Target, 99.99% Au (Ø60mm x 0.1mm) each 835.00
Qty:
91212 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø60mm x 0.1mm) each 825.00
Qty:
91216 Nickel Target, 99.98% Ni (Ø60mm x 0.1mm) each 215.00
Qty:
91214 Platinum Target, 99.95% Pt (Ø60mm x 0.1mm) each 1035.00
Qty:
91219 Palladium Target, 99.95% Pd (Ø60mm x 0.1mm) each 615.00
Qty:
91229 Silver Target, 99.99% Ag (Ø60mm x 0.1mm) each 330.00
Qty:



Prod # Description Unit Price Order / Quote
High purity 57mm (2 1/4") diameter Targets for Agar, Cressington 108/208, Emitech SC7620/SC7610/K575X/K575XD, ISI 5400, JEOL JFC 1200/1300/1400/1600/2300HR, PELCO® Model 3, SC4/SC5/SC6/SC7, Polaron 5000/5400/SC7610/SC7620, Quorum Q150, and SPI Module/Super Sputter Coaters
8074 Chromium Target, 99.95% Cr (Ø57mm x 3.2mm) each $696.00
Qty:
91131 NEW Cobalt Target, 99.99% Co (Ø57mm x 0.1mm)(208HR only) each 425.00
Qty:
91117 Copper Target, 99.99% Cu (Ø57mm x 0.1mm) each 185.00
Qty:
8077 Copper Target, 99.99% Cu (Ø57mm x 0.3mm) each 225.00
Qty:
91110 Gold Target, 99.99% Au (Ø57mm x 0.1mm) each 625.00
Qty:
8071 Gold Target, 99.99% Au (Ø57mm x 0.2mm) each 1200.00
Qty:
91109 NEW Gold Target, 99.999% Au (Ø57mm x 0.1mm) each 1100.00
Qty:
8070 NEW Gold Target, 99.999% Au (Ø57mm x 0.2mm) each 1550.00
Qty:
91112 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø57mm x 0.1mm) each 605.00
Qty:
91111 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø57mm x 0.2mm) each 1125.00
Qty:
91132-B Indium Tin Oxide Target, 99.99% ITO, In2O3/SnO2 90/10 wt % with 1mm copper backing plate, (Ø57mm x 3mm total height) each 1095.00
Qty:
91120 Iridium Target, 99.95% Ir (Ø57mm x 0.3mm) each 2395.00
Qty:
91124 Iron Target, 99.5% Fe (Ø57mm x 0.12mm) each 420.00
Qty:
8073 Molybdenum Target, 99.95% Mo (Ø57mm x 0.25mm) each 235.00
Qty:
91116 Nickel Target, 99.98% Ni (Ø57mm x 0.1mm) each 210.00
Qty:
8079 Niobium Target, 99.95% Nb (Ø57mm x 0.25mm) each 285.00
Qty:
91119 Palladium Target, 99.95% Pd (Ø57mm x 0.1mm) each 500.00
Qty:
91114 Platinum Target, 99.95% Pt (Ø57mm x 0.1mm) each 950.00
Qty:
8076 Platinum/Palladium Target, 99.99% Pt:Pd 80/20 ratio (Ø57mm x 0.1mm) each 900.00
Qty:
91115 Platinum/Palladium Target, 99.99% Pt:Pd 80/20 ratio (Ø57mm x 0.2mm) each 1550.00
Qty:
91118 Silver Target, 99.99% Ag (Ø57mm x 0.1mm) each 295.00
Qty:
91129 Silver Target, 99.99% Ag (Ø57mm x 0.3mm) each 480.00
Qty:
8075 Tantalum Target, 99.95% Ta (Ø57mm x 0.3mm) each 285.00
Qty:
91123 Titanium Target, 99.6% Ti (Ø57mm x 0.2mm) each 395.00
Qty:
8078 Tungsten Target, 99.95% W (Ø57mm x 0.25mm) each 290.00
Qty:



Prod # Description Unit Price Order / Quote
High purity 54mm (2 1/8") diameter Targets for Bal-Tec SCD005/040/050/500, MED10/20 and LEICA ACE 200/600 and LEICA EM SCD 005/050/500, MED 020 Sputter Coaters
91537 Copper Target, 99.99% Cu (Ø54mm x 0.3mm) each $225.00
Qty:
91530 Gold Target, 99.99% Au (Ø54mm x 0.1mm) each 615.00
Qty:
91531 Gold Target, 99.99% Au (Ø54mm x 0.2mm) each 1190.00
Qty:
91532 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø54mm x 0.1mm) each 600.00
Qty:
91534 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø54mm x 0.2mm) each 1115.00
Qty:
91535 Palladium Target, 99.95% Pd (Ø54mm x 0.1mm) each 500.00
Qty:
91533 Platinum Target, 99.95% Pt (Ø54mm x 0.1mm) each 940.00
Qty:
91545 Platinum/Palladium Target, 99.99% Pt/Pd 80/20 ratio (Ø54mm x 0.1mm) each 895.00
Qty:
91546 Platinum/Palladium Target, 99.99% Pt/Pd 80/20 ratio (Ø54mm x 0.2mm) each 1550.00
Qty:
91536 Silver Target, 99.99% Ag (Ø54mm x 0.1mm) each 295.00
Qty:
91538 Silver Target, 99.99% Ag (Ø54mm x 0.3mm) each 470.00
Qty:



Prod # Description Unit Price Order / Quote
High purity 50mm (2") diameter Targets for Fullam EffaCoater and Fullam EMS-76 Sputter Coaters
91527 Copper Target, 99.99% Cu (Ø50mm x 0.3mm) each $225.00
Qty:
91520 Gold Target, 99.99% Au (Ø50mm x 0.1mm) each 605.00
Qty:
91521 Gold Target, 99.99% Au (Ø50mm x 0.2mm) each 1180.00
Qty:
91522 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø50mm x 0.1mm) each 595.00
Qty:
91524 Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø50mm x 0.2mm) each 1105.00
Qty:
91525 Palladium Target, 99.95% Pd (Ø50mm x 0.1mm) each 500.00
Qty:
91523 Platinum Target, 99.95% Pt (Ø50mm x 0.1mm) each 930.00
Qty:
91528 Silver Target, 99.99% Ag (Ø50mm x 0.3mm) each 470.00
Qty:
91540 Platinum/Palladium Target, 99.95% Pt/Pd 80/20 ratio (Ø50mm x 0.1mm) each 890.00
Qty:
91526 Silver Target, 99.99% Ag (Ø50mm x 0.1mm) each 295.00
Qty:



Prod # Description Unit Price Order / Quote
High purity 38mm (1 1/2") diameter Targets for Cressington 308HR and 328UHR Sputter Coaters
9559 Aluminum Target, 99.999% Al (Ø38 x 0.1mm) each $200.00
Qty:
9551 Chromium Target, 99.95% Cr (Ø38 x 3.2mm) each 623.00
Qty:
9570 Cobalt Target, 99.99% Co (Ø38 x 0.1mm) each 325.00
Qty:
9558 Copper Target, 99.99% Cu (Ø38 x 3.2mm) each 720.00
Qty:
9552 Gold Target, 99.99% Au (Ø38 x 0.2mm) each 895.00
Qty:
9562 Gold Target, 99.99% Au (Ø38 x 0.4mm) each 1385.00
Qty:
9550 Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.2mm) each 795.00
Qty:
9564 Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.4mm) each 1385.00
Qty:
9574 Indium Tin Oxide Target, 99.99% ITO, In2O3/SnO2 90/10 wt % (Ø38 x 3mm), Incl. Cu Backing Plate each 925.00
Qty:
9571 Iridium Target, 99.99% Ir, (Ø38 x 0.3mm) each 1950.00
Qty:
9569 Iron Target, 99.95% Fe, (Ø38 x 0.5mm) each 425.00
Qty:
9567 Lead Target, 99.99% Pb, (Ø38 x 0.2mm) each 495.00
Qty:
9565 Molybdenum Target, 99.98% Mo (Ø38 x 3.2mm) each 580.00
Qty:
9560 Nickel Target, 99.98% Ni, (Ø38 x 0.5mm) each 350.00
Qty:
9573 Niobium Target, 99.95% Nb, (Ø38 x 0.5mm) each 275.00
Qty:
9572 Palladium Target, 99.99% Pd, (Ø38 x 0.2mm) each 595.00
Qty:
9553 Platinum Target, 99.95% Pt, (Ø38 x 0.2mm) each 1090.00
Qty:
9566 Platinum Target, 99.95% Pt, (Ø38 x 0.4mm) each 1960.00
Qty:
9554 Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.2mm) each 1095.00
Qty:
9568 Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.4mm) each 1850.00
Qty:
9557 Silver Target, 99.95% Ag, (Ø38 x 1.0mm) each 650.00
Qty:
9555 Tantalum Target, 99.95% Ta, (Ø38 x 1.0mm) each 700.00
Qty:
9563 Tin Target, 99.95% Sn, (Ø38 x 0.5mm) each 495.00
Qty:
9561 Titanium Target, 99.998% Ti, (Ø38 x 0.5mm) each 396.00
Qty:
9556 Tungsten Target, 99.95% W, (Ø38 x 3.2mm) each 495.00
Qty:



Prod # Description Unit Price Order / Quote
High purity 19mm (3/4") diameter Targets for Gatan Model 681 and 682 PECS Ion Beam Sputter Coaters
91570 Aluminum Target, 99.999% Al (Ø19mm x 1.5mm) each $225.00
Qty:
91571 Carbon Target, 99.999% C (Ø19mm x 1.5mm) each 290.00
Qty:
91572 Chromium Target, 99.95% Cr (Ø19mm x 1.5mm) each 264.00
Qty:
91573 Copper Target, 99.99% Cu (Ø19mm x 1.5mm) each 190.00
Qty:
91574 Gold Target, 99.99% Au (Ø19mm x 1.5mm) each 1375.00
Qty:
91575 Gold/Palladium Target, 99.99% Au:Pd 60/40 (Ø19mm x 1.5mm) each 1295.00
Qty:
91576 Iridium Target, 99.99% Ir (Ø19mm x 1.5mm) each 1690.00
Qty:
91578 Nickel Target, 99.99% Ni (Ø19mm x 1.5mm) each 290.00
Qty:
91580 Niobium Target, 99.99% Nb (Ø19mm x 1.5mm) each 480.00
Qty:
91581 Palladium Target, 99.95% Pd (Ø19mm x 1.5mm) each 735.00
Qty:
91583 Platinum Target, 99.99% Pt (Ø19mm x 1.5mm) each 1380.00
Qty:
91584 Platinum/Palladium Target, 99.99% Pt:Pd 80/20 (Ø19mm x 1.5mm) each 1320.00
Qty:
91585 Silver Target, 99.99% Ag (Ø19mm x 1.5mm) each 370.00
Qty:
91587 Tantalum Target, 99.99% Ta (Ø19mm x 1.5mm) each 520.00
Qty:
91588 Tungsten Target, 99.99% W (Ø19mm x 1.5mm) each 520.00
Qty:

 

Annular Sputter Targets Selection Table

Manufacturer Model 82mm O.D. x 60mm I.D.
Polaron E5100
X
Polaron SC510
X
Polaron SC515
X
Polaron SC7640
X
Polaron SC7680
X
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum

 

Annular Sputter Target Ordering Information

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod # Description Unit Price Order / Quote
High purity Annular Targets 82 x 60 x 0.01mm for Polaron E5100, SC510, SC515, SC7640, SC7680
91620 Annular Gold Target, 99.99%, 82mm O.D. x 60mm I.D. x 0.1mm each $990.00
Qty:
91622 Annular Gold/Palladium Target, 99.99%, Au:Pd 60/40 ratio, 82mm O.D. x 60mm I.D. x 0.1mm each 875.00
Qty:




Useful Information for Selecting Target Material for Coating Non-conductive SEM Samples
Most SEM sputter coaters allow for using a choice of sputter target material to optimize the coating material for the sample and or application. Below are some useful tips for selecting sputter target metal to coat non-conductive samples. Please be aware that each sample is different and the coating quality is also affected by the interaction of sample material and target material. The metallization of the surface creates a thin conductive layer on a non-conductive sample An additional advantage is that most coating materials have a higher secondary electron (SE) yield as the sample material. Coating material with lower atomic numbers are more suitable for backscattered electron (BE) imaging of the sample. The information below is valid when using modern DC magnetron SEM sputter coaters.

Gold Excellent and most widely used target material for standard SEM coating. Due to the low work function it is very efficient and when using an ultra-cool sputter coaters (such as the Cressington 108auto) there is virtually no heating of sensitive samples. Grain size is visible with high magnifications on modern SEMs. (SDS 121KB PDF)
Gold/Palladium Has a higher work function than pure gold and hence lower sputtering rates. Au/Pd gives smaller grain size when evaporated, but in SEM sputter coaters the difference between Au and Au/Pd is small if practically visible at all. Less suitable for heat sensitive specimens and less suitable for EDS analysis due to two sets of peaks for the coating material.
Palladium Can be used as a lower cost alternative for low to medium magnification range. Lower SE signal. Alternative to avoid overlapping peaks as with Au when using EDS. (SDS 118KB PDF)
Platinum Fine grain size; smaller than Au or Au/Pd. Higher work function than Au result in slower sputtering rates. Sensitive to "stress cracking" if oxygen is present. More expensive. High SE yield. SDS 119KB PDF)
Platinum/Palladium Similar grain size as Pt, but less sensitive to stress cracking. Good for FESEM. Best results are achieved in a high resolution coater such as the Cressington 208HR.
Silver Lower cost alternative for lower magnification range. Large grain size than Au. Suitable for table top SEMs. Lower SE yield than Au or Pt. Coating can tarnish if samples are not stored under vacuum. Alternative for special EDS work.
Chromium Very fine grain size, useful for FESEM. Required high vacuum such as the Cressington 208HR coater to eliminate oxygen. Coating oxidizes and sample can only be stored in high vacuum. Image directly after coating. Excellent alternative for BE imaging of biological samples. Low sputtering rates.
Iridium Very fine grain size. Excellent all-round coating material for FESEM samples. Requires high vacuum coater such as Cressington 208HR. Slower sputtering rates. SDS 94KB PDF
Tungsten Alternative for Cr. Very fine grain size, but oxidizes very rapidly. Low sputtering rates
Titanium SDS 113KB PDF
Tantalum SDS 121KB PDF
Nickel Alternative for special EDS application, not ideal for SE imaging. Suitable for BE imaging. Low sputtering rates. Coating oxidizes. SDS 161KB PDF
Niobium SDS 125KB PDF
Cobalt SDS 145KB PDF
Copper Alternative for EDS applications. Suitable for medium/low magnifications, special EDS applications and BE imaging.

Note 1: The sputter yield for Aluminum is very low; not practical with SEM sputter coaters. Al oxidizes very quickly.
Note 2: Carbon is best used for EDS application but it is difficult to sputter - carbon evaporation yields much better and quicker results.