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Cressington Introduction

DC100 DC Magnetron Power Supply,
Sputter Sources and Glow Discharge Cleaning

for use with the 308R

The 308 and 328 systems are currently on a temporary manufacturing hold
until further notice. Supplies and some accessories are still available.

DC100 DC Magnetron Power Supply

The DC100 DC magnetron power supply has a dual output on a single KF40 feedthrough with a safety vacuum interlock integrated in the feedthrough. Up to two compact sputter sources or a combination of sputter head and glow discharge can be connected to one DC100 power supply. Sputter sources have a separate feedthrough, and can be positioned anywhere in the chamber.

The DC100 power supply is adjustable from 5-80 Watts. Operation is either manual, preset current or thickness controlled (needs the high resolution MTM-20 thickness controller). The sputter sources for the 308 use compact 38mm diameter targets. This allows for mounting up to 4 sputter heads in the vacuum chamber to accommodate either sputtering of multiple layers or co-sputtering of materials. Sputter sources can be conditioned or shielded by using shutter assemblies. The advanced vacuum system and precise leak valve setting gives excellent control over the argon sputter gas pressure resulting in a wide range of sputter rates.

The efficient glow discharge head used together with air as process gas gives excellent plasma/ion cleaning of substrates, TEM grids. With the glow discharge hydro carbons or biological material can also be etched.

For materials with a low sputter rate, such as Al, a water cooling kit for the DC Magnetron sputter head is available. The #9520-10 water cooling kit includes cooling plate (to fit on #9520 sputter head) metal flexibles and KF40 feed through. Not available for a sputter head on swingline arm.

dc magnetron head assembly for 308r coating system
DC Magnetron Head Assembly on Swinging Arm mounted on a standard KF40 feedthrough.
Water Cooling Kit for the DC Magnetron head assembly for 308r coating system
Sputter head with cooling plate and cooling lines for upwards deposition, shutter in front of sputter head

Sputter Deposition

Prod # Description Unit Price Order / Quote
9518 DC100 Dual Output Sputter Supply with single QF40 dual feedthrough and pressure switch control, 115V each P.O.R.
Qty:
9520 DC Magnetron Sputter Head Assembly, 38mm disc target size each 2825.00
Qty:
9520-10 Water Cooling Kit for #9520 sputter head, incl. cooling disc, metal flexibles and KF40 feedthrough
(not compatible with #9520-20)
each 2875.00
Qty:
9520-20 DC Magnetron Head Assembly on Swinging Arm, 38mm disc target size (swinging control on QF40 feedthrough) each P.O.R.
Qty:
9519 Glow Discharge Assembly for TEM grid cleaning each 1675.00
Qty:
9519-20 Glow Discharge Assembly on Swinging Arm (swinging control on QF-40 feedthrough) each P.O.R.
Qty:
9529 Manual Shutter Assembly on QF40 feedthrough each 1795.00
Qty:
9530 Static Shutter Kit each 245.00
Qty:
9532 Source Mounting Ring with 36 holes for 9510 each 675.00
Qty:

Note: The DC100 is the required power supply for sputtering or glow discharge application. A DC100 can be used for two accessories.



Sputter Targets for the 308R and 328UHR Sputter Systems


Solid disk targets with 38mm diameter and various thicknesses.


Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod # Description Unit Price Order / Quote
High purity 38mm diameter Targets for Cressington 308HR and 328UHR Sputter Coaters
9559 Aluminum Target, 99.999% Al (Ø38 x 0.1mm) each $200.00
Qty:
9551 Chromium Target, 99.99% Cr (Ø38 x 3.2mm) each 623.00
Qty:
9570 Cobalt Target, 99.99% Co (Ø38 x 0.1mm) each 325.00
Qty:
9558 Copper Target, 99.99% Cu (Ø38 x 3.2mm) each 720.00
Qty:
9552 Gold Target, 99.99% Au (Ø38 x 0.2mm) each 895.00
Qty:
9562 Gold Target, 99.99% Au (Ø38 x 0.4mm) each 1385.00
Qty:
9550 Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.2mm) each 795.00
Qty:
9564 Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.4mm) each 1385.00
Qty:
9574 Indium Tin Oxide Target, 99.99% ITO, In2O3/SnO2 90/10 wt % (Ø38 x 3mm), Inc. 1mm Cu Balancing Plate each 925.00
Qty:
9571 Iridium Target, 99.99% Ir, (Ø38 x 0.3mm) each 1950.00
Qty:
9569 Iron Target, 99.95% Fe, (Ø38 x 0.5mm) each 425.00
Qty:
9567 Lead Target, 99.99% Pb, (Ø38 x 0.2mm) each 495.00
Qty:
9565 Molybdenum Target, 99.98% Mo (Ø38 x 3.2mm) each 580.00
Qty:
9560 Nickel Target, 99.98% Ni, (Ø38 x 0.5mm) each 350.00
Qty:
9573 Niobium Target, 99.95% Nb, (Ø38 x 0.5mm) each 275.00
Qty:
9572 Palladium Target, 99.99% Pd, (Ø38 x 0.2mm) each 595.00
Qty:
9553 Platinum Target, 99.95% Pt, (Ø38 x 0.2mm) each 1090.00
Qty:
9566 Platinum Target, 99.95% Pt, (Ø38 x 0.4mm) each 1960.00
Qty:
9554 Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.2mm) each 1095.00
Qty:
9568 Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.4mm) each 1850.00
Qty:
9557 Silver Target, 99.95% Ag, (Ø38 x 1.0mm) each 650.00
Qty:
9555 Tantalum Target, 99.95% Ta, (Ø38 x 1.0mm) each 700.00
Qty:
9563 Tin Target, 99.95% Sn, (Ø38 x 0.5mm) each 495.00
Qty:
9561 Titanium Target, 99.998% Ti, (Ø38 x 0.5mm) each 396.00
Qty:
9556 Tungsten Target, 99.95% W, (Ø38 x 3.2mm) each 495.00
Qty:


Useful Information for Selecting Target Material for Coating Non-conductive SEM Samples
Most SEM sputter coaters allow for using a choice of sputter target material to optimize the coating material for the sample and or application. Below are some useful tips for selecting sputter target metal to coat non-conductive samples. Please be aware that each sample is different and the coating quality is also affected by the interaction of sample material and target material. The metallization of the surface creates a thin conductive layer on a non-conductive sample An additional advantage is that most coating materials have a higher secondary electron (SE) yield as the sample material. Coating material with lower atomic numbers are more suitable for backscattered electron (BE) imaging of the sample. The information below is valid when using modern DC magnetron SEM sputter coaters.

Gold Excellent and most widely used target material for standard SEM coating. Due to the low work function it is very efficient and when using an ultra-cool sputter coaters (such as the Cressington 108auto) there is virtually no heating of sensitive samples. Grain size is visible with high magnifications on modern SEMs. (SDS 121KB PDF)
Gold/Palladium Has a higher work function than pure gold and hence lower sputtering rates. Au/Pd gives smaller grain size when evaporated, but in SEM sputter coaters the difference between Au and Au/Pd is small if practically visible at all. Less suitable for heat sensitive specimens and less suitable for EDS analysis due to two sets of peaks for the coating material.
Palladium Can be used as a lower cost alternative for low to medium magnification range. Lower SE signal. Alternative to avoid overlapping peaks as with Au when using EDS. (SDS 118KB PDF)
Platinum Fine grain size; smaller than Au or Au/Pd. Higher work function than Au result in slower sputtering rates. Sensitive to "stress cracking" if oxygen is present. More expensive. High SE yield. SDS 119KB PDF)
Platinum/Palladium Similar grain size as Pt, but less sensitive to stress cracking. Good for FESEM. Best results are achieved in a high resolution coater such as the Cressington 208HR.
Silver Lower cost alternative for lower magnification range. Large grain size than Au. Suitable for table top SEMs. Lower SE yield than Au or Pt. Coating can tarnish if samples are not stored under vacuum. Alternative for special EDS work.
Chromium Very fine grain size, useful for FESEM. Required high vacuum such as the Cressington 208HR coater to eliminate oxygen. Coating oxidizes and sample can only be stored in high vacuum. Image directly after coating. Excellent alternative for BE imaging of biological samples. Low sputtering rates.
Iridium Very fine grain size. Excellent all-round coating material for FESEM samples. Requires high vacuum coater such as Cressington 208HR. Slower sputtering rates. SDS 94KB PDF
Tungsten Alternative for Cr. Very fine grain size, but oxidizes very rapidly. Low sputtering rates
Titanium SDS 113KB PDF
Tantalum SDS 121KB PDF
Nickel Alternative for special EDS application, not ideal for SE imaging. Suitable for BE imaging. Low sputtering rates. Coating oxidizes. SDS 161KB PDF
Niobium SDS 125KB PDF
Cobalt SDS 145KB PDF
Copper Alternative for EDS applications. Suitable for medium/low magnifications, special EDS applications and BE imaging.

Note 1: The sputter yield for Aluminum is very low; not practical with SEM sputter coaters. Al oxidizes very quickly.
Note 2: Carbon is best used for EDS application but it is difficult to sputter - carbon evaporation yields much better and quicker results.



go to Vacuum Evaporation Supplies

Ted Pella, Inc has been an authorized distributor for the complete range of Cressington vacuum coating systems for over 15 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating and the 328UHR and 328EB-Carbon for ultra high resolution sample coating. The 308R vacuum coating system for thin film applications is based on a compact versatile advanced pumping station which accommodates sputtering, thermal evaporation and electron beam evaporation all in a 12" light weight stainless steel chamber. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.