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Specifications for the
208HR High Resolution Sputter Coater

go to the 208HR High Resolution Sputter Coater

Specifications

Sputter head Low voltage planar magnetron
Quick target change
Wrap-around dark-space shield
Shutter for target conditioning
Targets Cr, Pt/Pd (standard) or IR (Iridium coater)
optional: Au, Au/Pd, Cu, Ni, Pd, Pt, Ta, Ti and W
Sputter supply Microprocessor based
Safety interlock
Constant current control independent of vacuum
Digitally selectable current (20, 40, 60 or 80mA)
Chamber size 150mm OD (6")
Variable height, 165 - 250mm (6.5" - 9.8") including glass cylinder (65mm H and 2 metal spacer rings)
Sample stage Non-repetitive rotary, planetary motion with manual tilt 0-90°
Variable speed rotation
Crystal head
4 sample holders (specify when ordering, see Sample Holders)
Analog metering Vacuum Atm - .001mb
Current 0-100mA
Control method Automatic operation of gas purge and leak functions
Automatic process sequencing
Digital timer (0-300 sec) with pause
Automatic venting
Thickness control MTM-20 controller with terminating facility

Pumping System

Configuration Turbo drag / rotary pump combination
Optional dry scroll pump instead of rotary pump
Pumping speed 300 l/min at 0.1mb
Pumpdown Time 1 min to 1 x 10-3mb
Ultimate pressure 1 x 10-5mb
Desktop system Rotary pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system

Thickness Controller

MTM-20 Microprocessor based
4 digit display, push button zero
6MHz crystal with lifetime check
5 times/sec update rate ( more information)
Thickness range 0.0 - 999.9nm
Resolution Better than 0.1nm
Density range 0.50 - 30.00gm/cm3
Tooling factor range 0.25 - 8.00
Termination range 0 - 999.9nm

Services Required

Electrical 100-120 or 200-240VAC, 50/60Hz, (please specify)
Power 550VA max.
Argon gas Purity, min. 99.995%
Pressure regulated 5 - 6 psi (0.4 bar)
Hose connection, 6.0mm (1/4") ID hose

System Dimensions

Size Width 600mm (23.6"), Depth 600mm (23.6"), Height 450mm (17.7") (with rotary pump)
Weight 40kg (88.5 lbs) (with rotary pump)

Footprint

coater for scanning electron microscopy
Dimensions (mm)
1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Turbo Molecular Pump
5. Rotary pump and
Anti-vibration base