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Specifications for the
108 Manual Sputter Coater

go to the 108 Manual Sputter Coater

Specifications

Chamber size: 120mm OD x 120mm high (4.75 x 4.75")
Target: Au fitted as standard, Au:Pd, Pt, Pt:Pd optional. 57mm dia. x 0.1mm thick
Sample table: Holds 12 SEM pin mounts
Height adjustable through 60mm
Sputter supply: Microprocessor based, safety interlock, variable, 40mA maximum
Sputter head: Low voltage "ultra-cool" planar magnetron
Quick target change
Wrap-around dark-space shield
Analog metering: Vacuum Atm - 0.001mb
Thickness monitoring: Model MTM-10 (optional)
Control method: Manual gas and current control
Precision needle valve
Digital timer (0-300 seconds) with pause
Manual vent
Desktop system: Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system

Requirements

Electrical: 100-120 or 200-240 VAC, 50/60Hz
(specify on order)
Power: 500VA (coater and pumping system #7010 together)
Argon gas: Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4")

Footprint

(Height: 280mm)

 


Dimensions (mm)
1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base