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Specifications for the
108 Auto Sputter Coater

go to the 108 Auto Sputter Coater


Specifications

Chamber size:
120mm OD x 120mm height (4.75 x 4.75")
Target:
Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick
Sample table:
Holds 12 SEM pin mounts; Height adjustable through 60mm
Sputter supply:
Microprocessor based, safety interlock, variable, 40mA maximum
Programmable digital control
Sputter head:
Low voltage "ultra-cool" planar magnetron
Quick target change
Wrap-around dark-space shield
Analog metering:
Vacuum Atm - 0.001mb
Thickness monitoring:
(optional)
Use automatic terminating MTM-20 High Resolution Thickness Controller
or MTM-10 High Resolution Thickness Monitor (manual terminating)
Control method:
Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Precision needle valve
Digital timer (0-300 sec) with pause
Automatic vent
Desktop system:
Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system

Requirements

Electrical: 100-120 or 200-240 VAC, 50/60Hz
(specify on order)
Power: 500VA (coater and pumping system #7010 together)
Argon gas: Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4")

Footprint

(Height: 280mm)

 

coater for scanning electron microscopy
Dimensions (mm)
1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base