Specifications for the
108 Auto/SE Sputter Coater

go to the 108 Auto/SE Sputter Coater


Chamber Size: 150mm OD x 165mm height (5.9" x 6.5")
Variable height, 165mm to 250mm (6.5" to 9.8")
Target: Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick
Sample Table: Holds 12 SEM pin mounts; Height adjustable through 60mm
Sputter Supply: Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30, or 40mA)
Sputter Head: High field low voltage planar magnetron
Quick target change
Wrap-around dark-space shield
Target shutter
Analog Metering: Vacuum Atm - 0.001mb
Current, 0 - 50mA
Thickness Monitoring: Optional, MTM-10
Thickness Controller: Optional, MTM-20 with termination facility
Control Method: Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer (5-300 sec) with pause
Automatic vent
Desktop system: Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system


Electrical: 100-120 or 200-240 VAC, 50/60Hz
(specify on order)
Power: 500VA (coater and pumping system #7010 together)
Argon gas: Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4")


(Height: 325mm)


Dimensions (mm)
1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base