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Disk or Foil Sputter Targets

High purity disk type sputter targets for a wide variety of sputter or ion coater brands: PELCO^®, Cressington, Agar, Anatech, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron and SPI. The disc or foil type sputter targets are available in 60, 57, 54, 50 and 19mm diameter. Most of the disk type targets are clamped to the target holder by a target clamping ring; simply unscrew the clamping ring and change the target. Useful Information For Selecting SEM Sputter Target Material

We now offer a 16% discount on new precious metal / noble SEM Sputter Targets in exchange for your old used target of same composition and dimensions. This exchange program simplifies your recycling or reclamation procedures and is available for Au, Au/Pd, Pt, Pt/Pd, Pd, Ag and Ir targets. Please select your desired replacement from the list of 60 - 38mm targets below and contact customer service for the exchange program details. Your new target will be shipped once we have received and checked your used target. This offer is not available for targets that have been bonded.

Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as silver paint. In this case the target has to be removed form the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use indium bonded targets. The target diameter can be selected for sputter coater models listed below.

Ø60mm Sputter Targets
Ø57mm Sputter Targets
Ø54mm Sputter Targets
Ø50mm Sputter Targets
Ø38mm Sputter Targets
Ø19mm Sputter Targets

Disk Type Sputter Targets Selection Table

Manufacturer	Model	60mm	57mm	54mm	50mm	38mm	19mm
AGAR	Manual type sputter coater		X
AGAR	Automatic sputter coater		X
Anatech/Technics	Hummer I				X
Anatech/Technics	Hummer II				X
Anatech/Technics	Hummer III				X
Anatech/Technics	Hummer Jr.				X
Bal-Tec	SCD 005			X
Bal-Tec	SCD 040			X
Bal-Tec	SCD 050			X
Bal-Tec	SCD 500			X
Bal-Tec	MED 10			X
Bal-Tec	MED 20			X
Bio-Rad	SC 5200		X
Bio-Rad	SC 502		X
Cressington	108 manual		X
Cressington	108 auto		X
Cressington	108/auto/SE		X
Cressington	208HR		X
Cressington	308HR					X
Denton	DESK II	X
Denton	DESK III	X
Denton	DESK IV	X
Denton	DESK V	X
Edwards	150 B	X
Edwards	Scancoat	X
Emitech	SC7620/SC7610		X
Emitech	K500X/K550X/K650X	X
Emitech	K575/K575XD/Q150		X
Emscope/Polaron	SC 502		X
Fullam	EffaCoater (modification offered)				X
Fullam	EMS-76 (modification offered)				X
Gatan	681 Ion Beam Coater						X
Gatan	682 PECS Ion Beam Coater						X
ISI	ISI 5400		X
JEOL	JFC 1200		X
JEOL	JFC 1300		X
JEOL	JFC 1400		X
LEICA	EM MED 020			X
LEICA	EM SCD 005			X
LEICA	EM SCD 050			X
LEICA	EM SCD 500			X
PELCO^®	Model 3		X
PELCO^®	SC4		X
PELCO^®	SC5		X
PELCO^®	SC6		X
PELCO^®	SC7		X
Polaron*	E5000		X
Polaron*	E5200		X
Polaron*	E5400		X
Polaron*	SC7610/SC7620		X
SPI	SPI-Module™		X
SPI	SPI Super™		X
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum

Sputter Target Ordering Information

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod # Description Unit Price Order / Quote

High purity 60mm (2.375") diameter Targets for Denton DESK II / DESK III / DESK IV/ DESK V, Edwards 150 B / SCANCOAT, Emitech K500/K550/K650 and Emscope SC500 sputter coaters

91217
Copper Target, 99.99% Cu (Ø60mm x 0.076mm)
each
$195.00

Qty:

91210
Gold Target, 99.99% Au (Ø60mm x 0.1mm)
each
825.00

Qty:

91212
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø60mm x 0.1mm)
each
805.00

Qty:

91216
Nickel Target, 99.98% Ni (Ø60mm x 0.1mm)
each
215.00

Qty:

91214
Platinum Target, 99.95% Pt (Ø60mm x 0.1mm)
each
1,035.00

Qty:

91219
Palladium Target, 99.95% Pd (Ø60mm x 0.1mm)
each
615.00

Qty:

91229
Silver Target, 99.99% Ag (Ø60mm x 0.1mm)
each
330.00

Qty:

Prod # Description Unit Price Order / Quote

High purity 54mm diameter Targets for Bal-Tec SCD005/040/050/500, MED10/20 and LEICA EM SCD 005/050/500, MED 020 Sputter Coaters

91537
Copper Target, 99.99% Cu (Ø54mm x 0.3mm)
each
$225.00

Qty:

91530
Gold Target, 99.99% Au (Ø54mm x 0.1mm)
each
775.00

Qty:

91531
Gold Target, 99.99% Au (Ø54mm x 0.2mm)
each
1,325.00

Qty:

91532
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø54mm x 0.1mm)
each
715.00

Qty:

91534
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø54mm x 0.2mm)
each
1,205.00

Qty:

91535
Palladium Target, 99.95% Pd (Ø54mm x 0.1mm)
each
540.00

Qty:

91533
Platinum Target, 99.95% Pt (Ø54mm x 0.1mm)
each
970.00

Qty:

91536
Silver Target, 99.99% Ag (Ø54mm x 0.1mm)
each
295.00

Qty:

91538
Silver Target, 99.99% Ag (Ø54mm x 0.3mm)
each
470.00

Qty:

Prod # Description Unit Price Order / Quote

High purity 50mm diameter Targets for Anatech/Technics Hummer I, II, III and Fullam EffaCoater Sputter Coaters

91527
Copper Target, 99.99% Cu (Ø50mm x 0.3mm)
each
$225.00

Qty:

91520
Gold Target, 99.99% Au (Ø50mm x 0.1mm)
each
765.00

Qty:

91521
Gold Target, 99.99% Au (Ø50mm x 0.2mm)
each
1,315.00

Qty:

91522
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø50mm x 0.1mm)
each
705.00

Qty:

91524
Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø50mm x 0.2mm)
each
1,195.00

Qty:

91525
Palladium Target, 99.95% Pd (Ø50mm x 0.1mm)
each
530.00

Qty:

91523
Platinum Target, 99.95% Pt (Ø50mm x 0.1mm)
each
960.00

Qty:

91526
Silver Target, 99.99% Ag (Ø50mm x 0.1mm)
each
295.00

Qty:

Prod # Description Unit Price Order / Quote

High purity 38mm diameter Targets for Cressington 308HR Sputter Coaters

9559
Aluminum Target, 99.999% Al (Ø38 x 0.1mm)
each
$200.00

Qty:

9551
Chromium Target, 99.99% Cr (Ø38 x 3.2mm)
each
623.00

Qty:

9570
Cobalt Target, 99.99% Co (Ø38 x 0.1mm)
each
325.00

Qty:

9558
Copper Target, 99.99% Cu (Ø38 x 3.2mm)
each
720.00

Qty:

9552
Gold Target, 99.99% Au (Ø38 x 0.2mm)
each
695.00

Qty:

9562
Gold Target, 99.99% Au (Ø38 x 0.4mm)
each
1,475.00

Qty:

9550
Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.2mm)
each
795.00

Qty:

9564
Gold/Palladium Target, 99.99% Au:Pd, 60:40 ratio, (Ø38 x 0.4mm)
each
1,445.00

Qty:

9574
Indium Tin Oxide Target, 99.99% ITO, In2O3/SnO2 90/10 wt % (Ø38 x 3mm)
each
595.00

Qty:

9571
Iridium Target, 99.99% Ir, (Ø38 x 0.3mm)
each
1,950.00

Qty:

9569
Iron Target, 99.95% Fe, (Ø38 x 0.5mm)
each
425.00

Qty:

9567
Lead Target, 99.99% Pb, (Ø38 x 0.2mm)
each
495.00

Qty:

9565
Molybdenum Target, 99.98% Mo (Ø38 x 3.2mm)
each
580.00

Qty:

9560
Nickel Target, 99.98% Ni, (Ø38 x 0.5mm)
each
350.00

Qty:

9573
Niobium Target, 99.95% Nb, (Ø38 x 0.5mm)
each
275.00

Qty:

9572
Palladium Target, 99.99% Pd, (Ø38 x 0.2mm)
each
595.00

Qty:

9553
Platinum Target, 99.95% Pt, (Ø38 x 0.2mm)
each
1,090.00

Qty:

9566
Platinum Target, 99.95% Pt, (Ø38 x 0.4mm)
each
1,960.00

Qty:

9554
Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.2mm)
each
1,095.00

Qty:

9568
Platinum/Palladium Target, 99.99% Pt:Pd 80:20 ratio, (Ø38 x 0.4mm)
each
1,850.00

Qty:

9557
Silver Target, 99.95% Ag, (Ø38 x 1.0mm)
each
650.00

Qty:

9555
Tantalum Target, 99.95% Ta, (Ø38 x 1.0mm)
each
495.00

Qty:

9563
Tin Target, 99.95% Sn, (Ø38 x 0.5mm)
each
495.00

Qty:

9561
Titanium Target, 99.998% Ti, (Ø38 x 0.5mm)
each
396.00

Qty:

9556
Tungsten Target, 99.95% W, (Ø38 x 3.2mm)
each
495.00

Qty:

Useful Information For Selecting SEM Target Material Most SEM sputter coaters allow for using a choice of sputter target material to optimize the coating material for the sample and or application. Below are some useful tips for selecting sputter target metal to coat non-conductive samples. Please be aware that each sample is different and the coating quality is also affected by the interaction of sample material and target material. The metallization of the surface creates a thin conductive layer on a non-conductive sample An additional advantage is that most coating materials have a higher secondary electron (SE) yield as the sample material. Coating material with lower atomic numbers are more suitable for backscattered electron (BE) imaging of the sample. The information below is valid when using modern DC magnetron SEM sputter coaters.
Gold	Excellent and most widely used target material for standard SEM coating. Due to the low work function it is very efficient and when using an ultra-cool sputter coaters (such as the Cressington 108auto) there is virtually no heating of sensitive samples. Grain size is visible with high magnifications on modern SEMs.
Gold/Palladium	Has a higher work function than pure gold and hence lower sputtering rates. Au/Pd gives smaller grain size when evaporated, but in SEM sputter coaters the difference between Au and Au/Pd is small if practically visible at all. Less suitable for heat sensitive specimens and less suitable for EDS analysis due to two sets of peaks for the coating material.
Palladium	Can be used as a lower cost alternative for low to medium magnification range. Lower SE signal. Alternative to avoid overlapping peaks as with Au when using EDS.
Platinum	Fine grain size; smaller than Au or Au/Pd. Higher work function than Au result in slower sputtering rates. Sensitive to "stress cracking" if oxygen is present. More expensive. High SE yield.
Platinum/Palladium	Similar grain size as Pt, but less sensitive to stress cracking. Good for FESEM. Best results are achieved in a high resolution coater such as the Cressington 208HR.
Silver	Lower cost alternative for lower magnification range. Large grain size than Au. Suitable for table top SEMs. Lower SE yield than Au or Pt. Coating can tarnish if samples are not stored under vacuum. Alternative for special EDS work.
Chromium	Very fine grain size, useful for FESEM. Required high vacuum such as the Cressington 208HR coater to eliminate oxygen. Coating oxidizes and sample can only be stored in high vacuum. Image directly after coating. Excellent alternative for BE imaging of biological samples. Low sputtering rates.
Iridium	Very fine grain size. Excellent all-round coating material for FESEM samples. Requires high vacuum coater such as Cressington 208HR. Slower sputtering rates.
Tungsten	Alternative for Cr. Very fine grain size, but oxidizes very rapidly. Low sputtering rates
Nickel	Alternative for special EDS application, not ideal for SE imaging. Suitable for BE imaging. Low sputtering rates. Coating oxidizes.
Copper	Alternative for EDS applications. Suitable for medium/low magnifications, special EDS applications and BE imaging.
Note 1: The sputter yield for Aluminum is very low; not practical with SEM sputter coaters. Al oxidizes very quickly. Note 2: Carbon is best used for EDS application but it is difficult to sputter - carbon evaporation yields much better and quicker results.

Target Holder Modification for sputter coater models: Fullam EffaCoater and Fullam EMS-76

The targets for these sputter coaters are bonded to the target holder block with Indium. We offer a modification where we take the existing target holder block and bond a thin, flat aluminum disk to it. The customer needs to send the target holder block to us - contact our customer service. This provides a flat surface to which any of the available 50mm diameter targets can be bonded with silver paint. This modification has a number of advantages:

Lower target costs
Readily available 50mm diameter targets with a wide choice of materials
Targets can be recycled (not contaminated with Indium)
No need to send in or purchase additional target holder block
Quick target bonding can be easily done by the user

Prod # Description Unit Price Order / Quote

99-EMS76
Modification of EffaCoater and EMS-76 Sputter Coater Target Holder
each
$245.00

Qty:

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