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Disk or Foil Sputter Targets

High purity disk type sputter targets for a wide variety of sputter or ion coater brands: PELCO^®, Cressington, Agar, Anatech, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron, Quorum, and SPI. The disc or foil type sputter targets are available in 60, 57, 54, 50 and 19mm diameter. Most of the disk type targets are clamped to the target holder by a target clamping ring; simply unscrew the clamping ring and change the target. Useful Information For Selecting SEM Sputter Target Material

We now offer a 16% discount on new precious metal / noble SEM Sputter Targets in exchange for your old used target of same composition and dimensions. This exchange program simplifies your recycling or reclamation procedures and is available for Au, Au/Pd, Pt, Pt/Pd, Pd, Ag and Ir targets. Please select your desired replacement from the list of 60 - 38mm targets below and contact customer service for the exchange program details. Your new target will be shipped once we have received and checked your used target. This offer is not available for targets that have been bonded.

Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as silver paint. In this case the target has to be removed from the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use indium (#29-49) bonded targets; see Technical Note - Bonding of Sputter Targets on Fullam Sputter Coaters (626KB PDF).

The target diameter can be selected for sputter coater models listed below.

Ø60mm Sputter Targets
Ø57mm Sputter Targets
Ø54mm Sputter Targets
Ø50mm Sputter Targets
Ø38mm Sputter Targets
Ø19mm Sputter Targets

Disk Type Sputter Targets Selection Table

Manufacturer	Model	60mm	57mm	54mm	50mm	38mm	19mm
AGAR	Manual type sputter coater		X
AGAR	Automatic sputter coater		X
Anatech/Technics	Hummer I				X
Anatech/Technics	Hummer II				X
Anatech/Technics	Hummer III				X
Anatech/Technics	Hummer Jr.				X
Bal-Tec	SCD 005			X
Bal-Tec	SCD 040			X
Bal-Tec	SCD 050			X
Bal-Tec	SCD 500			X
Bal-Tec	MED 10			X
Bal-Tec	MED 20			X
Bio-Rad	SC 5200		X
Bio-Rad	SC 502		X
Cressington	108 manual		X
Cressington	108 auto		X
Cressington	108/auto/SE		X
Cressington	208HR		X
Cressington	308HR					X
Denton	DESK II	X
Denton	DESK III	X
Denton	DESK IV	X
Denton	DESK V	X
Edwards	150 B	X
Edwards	Scancoat	X
Emitech	SC7620/SC7610		X
Emitech	K500X/K550X/K650X	X
Emitech	K575/K575XD/Q150		X
Emscope/Polaron	SC 502		X
Fullam	EffaCoater				X
Fullam	EMS-76				X
Gatan	681 Ion Beam Coater						X
Gatan	682 PECS Ion Beam Coater						X
ISI	ISI 5400		X
JEOL	JFC-1200		X
JEOL	JFC-1300		X
JEOL	JFC-1400		X
JEOL	JFC-1600		X
JEOL	JFC-2300HR		X
LEICA	EM MED 020			X
LEICA	EM SCD 005			X
LEICA	EM SCD 050			X
LEICA	EM SCD 500			X
PELCO^®	Model 3		X
PELCO^®	SC4		X
PELCO^®	SC5		X
PELCO^®	SC6		X
PELCO^®	SC7		X
Polaron*	E5000		X
Polaron*	E5200		X
Polaron*	E5400		X
Polaron*	SC7610/SC7620		X
Quorum	Q150		X
SPI	SPI-Module™		X
SPI	SPI Super™		X
*Note: Polaron systems are also known under: Bio-Rad, VG Microtech, Fisons, Emscope, Quorum

Sputter Target Ordering Information

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

Prod #

Description

Unit

Price

Order / Quote

High purity 60mm (2.375") diameter Targets for Denton DESK II / DESK III / DESK IV/ DESK V, Edwards 150 B / SCANCOAT, Emitech K500/K550/K650 and Emscope SC500 sputter coaters

91217

Copper Target, 99.99% Cu (Ø60mm x 0.076mm)

each

$195.00

Qty:

91210

Gold Target, 99.99% Au (Ø60mm x 0.1mm)

each

835.00

Qty:

91212

Gold/Palladium Target, 99.99% Au:Pd 60/40 ratio (Ø60mm x 0.1mm)

each

825.00

Qty:

91216

Nickel Target, 99.98% Ni (Ø60mm x 0.1mm)

each

215.00

Qty:

91214

Platinum Target, 99.95% Pt (Ø60mm x 0.1mm)

each

1035.00

Qty:

91219

Palladium Target, 99.95% Pd (Ø60mm x 0.1mm)

each

615.00

Qty:

91229

Silver Target, 99.99% Ag (Ø60mm x 0.1mm)

each

330.00

Qty:

High purity 57mm (2¼") diameter Targets for Agar, Cressington 108/208, Emitech SC7620/SC7610/K575X/K575XD, ISI 5400, JEOL JFC 1200/1300/1400/1600/2300HR, PELCO^® Model 3, SC4/SC5/SC6/SC7, Polaron 5000/5400/SC7610/SC7620, Quorum Q150, and SPI Module/Super Sputter Coaters

8074

Useful Information for Selecting Target Material for Coating Non-conductive SEM Samples Most SEM sputter coaters allow for using a choice of sputter target material to optimize the coating material for the sample and or application. Below are some useful tips for selecting sputter target metal to coat non-conductive samples. Please be aware that each sample is different and the coating quality is also affected by the interaction of sample material and target material. The metallization of the surface creates a thin conductive layer on a non-conductive sample An additional advantage is that most coating materials have a higher secondary electron (SE) yield as the sample material. Coating material with lower atomic numbers are more suitable for backscattered electron (BE) imaging of the sample. The information below is valid when using modern DC magnetron SEM sputter coaters.
Gold	Excellent and most widely used target material for standard SEM coating. Due to the low work function it is very efficient and when using an ultra-cool sputter coaters (such as the Cressington 108auto) there is virtually no heating of sensitive samples. Grain size is visible with high magnifications on modern SEMs. (MSDS 97KB PDF)
Gold/Palladium	Has a higher work function than pure gold and hence lower sputtering rates. Au/Pd gives smaller grain size when evaporated, but in SEM sputter coaters the difference between Au and Au/Pd is small if practically visible at all. Less suitable for heat sensitive specimens and less suitable for EDS analysis due to two sets of peaks for the coating material.
Palladium	Can be used as a lower cost alternative for low to medium magnification range. Lower SE signal. Alternative to avoid overlapping peaks as with Au when using EDS. (MSDS 95KB PDF)
Platinum	Fine grain size; smaller than Au or Au/Pd. Higher work function than Au result in slower sputtering rates. Sensitive to "stress cracking" if oxygen is present. More expensive. High SE yield. (MSDS 97KB PDF)
Platinum/Palladium	Similar grain size as Pt, but less sensitive to stress cracking. Good for FESEM. Best results are achieved in a high resolution coater such as the Cressington 208HR.
Silver	Lower cost alternative for lower magnification range. Large grain size than Au. Suitable for table top SEMs. Lower SE yield than Au or Pt. Coating can tarnish if samples are not stored under vacuum. Alternative for special EDS work.
Chromium	Very fine grain size, useful for FESEM. Required high vacuum such as the Cressington 208HR coater to eliminate oxygen. Coating oxidizes and sample can only be stored in high vacuum. Image directly after coating. Excellent alternative for BE imaging of biological samples. Low sputtering rates.
Iridium	Very fine grain size. Excellent all-round coating material for FESEM samples. Requires high vacuum coater such as Cressington 208HR. Slower sputtering rates. MSDS 94KB PDF
Tungsten	Alternative for Cr. Very fine grain size, but oxidizes very rapidly. Low sputtering rates
Nickel	Alternative for special EDS application, not ideal for SE imaging. Suitable for BE imaging. Low sputtering rates. Coating oxidizes.
Copper	Alternative for EDS applications. Suitable for medium/low magnifications, special EDS applications and BE imaging.
Note 1: The sputter yield for Aluminum is very low; not practical with SEM sputter coaters. Al oxidizes very quickly. Note 2: Carbon is best used for EDS application but it is difficult to sputter - carbon evaporation yields much better and quicker results.