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308R Thin Film High Power Evaporation System

The Cressington 308R High Power Thin Film Evaporation system has been developed for high power evaporation processes with larger boats, baffle boats or crucibles in a compact desktop system with a light weight 12" stainless steel vacuum chamber. The LT1500 power supply is a dual source power supply with two KF40 feedthroughs having integrated vacuum safety interlock switches. The LT1500 power supply has a source selection switch and is rated for 375A@4V and 185A@8V.

The evaporation sources can accommodate 4" size boats, filaments and baskets and are water-cooled to allow for prolonged high power evaporation needed to drive baffle boats or for thicker depositions. The feedthroughs for the water cooled sources are built into a standard KF40 vacuum feedthrough.

The system is configured for upwards evaporation with the sources mounted on the source mounting ring in the feedthrough collar. The substrate holder is mounted in the top of the stainless steel light weight metal chamber.

The 308R High Power Evaporation System configuration includes:

308R pumping station with 9xKF40 feedthrough collar and light weight stainless steel chamber
LT1500 High Power Evaporation supply with two water-cooled 4" evaporation sources
Shutter assembly
Rotary tilt stage with 105mm diameter multi specimen holder
MTM-10 thickness monitor system

The 308R High Power Evaporation system can be upgraded with additional evaporation sources and shutters up to four 4" evaporation sources and two manual shutters in the 12" vacuum chamber

Prod # Description Unit Price Order / Quote

95000-60
308R Thin Film High Power Evaporation System, 115VAC, 60Hz
each
P.O.R.

Qty:

95000-60-220
308R Thin Film High Power Evaporation System, 220VAC, 50/60Hz
each
P.O.R.

Qty:

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Ted Pella, Inc has been an authorized distributor for the complete range of Cressington vacuum coating systems for over 15 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating and the 308UHR and 308R-EM for ultra high resolution sample coating. The 308R vacuum coating system for thin film applications is based on a compact versatile advanced pumping station which accommodates sputtering, thermal evaporation and electron beam evaporation all in a 12" light weight stainless steel chamber. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.