308R Dual Source Sputter Coater

The Cressington 308R - DC Magnetron Sputtering System is a highly sophisticated compact sputter coater for research and laboratory type applications. The system utilizes compact sputter sources with 38mm diameter targets. The sputter sources are mounted on a mounting ring with a flexible power cable in the vacuum chamber (they can be positioned anywhere in the vacuum chamber).

Benefits of the unique design of the Cressington sputter sources are:

• Moveable sputter sources
• Sputter heads can be positioned virtually anywhere in the vacuum chamber
• Works with a wide range of process gas (argon) pressure
• Wide range of sputter rates
• Up to four sputter sources can be mounted in the 12" metal chamber.
• Efficient use of target materials.
• Relatively low target costs.

In the standard configuration with two sputter heads and a dual source (serial) power supply, the 308R Sputter Coater is ideally suited for applications where dual layers are needed or where an adhesion material needs to be deposited, example: Cr/Au. The high vacuum mode of the pumping system is capable of giving an excellent baseline vacuum to enable clean sputtering.

Standard configuration of the 308R Sputtering System includes:

• 308R pumping station with 9xKF40 feedthrough collar and light weight stainless steel chamber
• DC100 sputter supply and two sputter source assemblies
• Shutter assembly
• Rotary-Planetary-Tilt stage with 4 ea 43mm dia specimen holders
• MTM-20 thickness controller system

The system can be easily upgraded with additional sputter heads or with thermal evaporation capabilities. If co-sputtering of materials is needed, each sputter head needs its own power supply. The Cressington 308R pumping station can be easily optimized for sputtering or evaporation with a simple touch of button.

Prod #	Description	Unit	Price	Order / Quote
95000-30	308R Dual Source Sputtering System, 115VAC, 60Hz	each	P.O.R.	Qty:
95000-30-220	308R Dual Source Sputtering System, 220VAC, 50/60Hz	each	P.O.R.	Qty: