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108C Auto/SE Carbon Coater

for scanning electron microscopy sample preparation and X-ray micro-analysis

The 108C Auto Carbon Coater Special Equipment version has now become available for the 108 Carbon Coater series. The 108C Auto/SE Carbon Coater has the exact same technical specifications regarding the carbon coating capabilities as the standard 108C Auto Carbon Coater. The special feature of the Auto/SE is the larger, 150mm diameter chamber which will accommodate the optional Rotary Tilting Stage or Rotary Planetary Tilting Stage. The advantage of using the Rotary Planetary Tilting Stage is that highly topographic specimens or larger specimens can be uniformly coated to give better conductivity when performing EDX analysis on such specimens. For more demanding TEM, STEM, EBSD and microprobe applications the 208C High Vacuum Turbo Carbon Coater is the carbon coater of choice.

The table below shows the difference between the 108C Auto/SE Carbon Coater, Prod. No. 9603 and the 108C Auto Carbon Coater, Prod. No. 9602.

1. Increased chamber diameter Chamber size has been increased to permit coating of larger samples. Standard Chamber 150mm dia. x 165mm	Prod. No. 9603 108C Auto/SE 150mm dia.	Prod. No. 9602 108C Auto 120mm dia.
2. Variable chamber geometry (option) Adjustable chamber height is used to improve coating uniformity and vary the deposition rate	X	-
3. Sample stage movements (option) Separate rotary, planetary and tilting sample movements to optimize coating distribution and coverage.	X	-

The 108C Auto/SE Carbon Coater can be fitted with an optional MTM-10 High Resolution Thickness Monitor. Resolution is better than 0.1nm for carbon. Careful use of the monitor and evaporation controller gives better than 5% reproducibility of coating thickness in the useful 15nm to 25nm range.

The 108C Auto/SE Carbon Coater
with MTM-10 High Resolution Thickness Monitor

Pumping System
The modular desktop design combines carbon control unit, pumping system and thickness monitor into an area of only 42 x 60cm (16" x 24"). The desktop pumping system is fully integrated using a quick release, all-metal coupling system.

Rotary-Planetary-Tilting Stage with adjustable tilt (optional)	Rotary-Tilting Stage
The 108C Auto/SE Carbon Coater can be equipped with the optional RPT or RT stage to accommodate multiple or large samples. Rotary-Planetary-Tilting and Rotary-Tilting Stages		Head with "Bradley type" carbon rod assembly
Dual-Vacset used to connect two coaters to one pump	Desktop Dual-Vacset The 108C Auto/SE Carbon Coater can be combined with the 108 Auto Sputter Coater using one pumping system. This has the advantage of using 2 dedicated units for sputtering and carbon coating without any cross contamination. Vacuum Systems for 108 Series Coaters

108C Auto/SE Carbon Coater

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