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Go to Cressington Vacuum Coaters
MTM-10 High Resolution Film Thickness Monitor
and MTM-20 High Resolution Film Thickness Controller
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The High Resolution Thickness Monitor / Thickness Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.5nm on a four digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to the FTM Power Supply via the supplied vacuum feedthrough. |
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System Consists of:
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The MTM-10 High Resolution Thickness Monitor will fit any of the Cressington sputter and carbon
coating systems as well as other thin film vacuum coating systems which allow for a vacuum feedthrough
of 10 mm diameter a on a plate thickness of 9 mm. |
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MTM-10 High Resolution Thickness Monitorthe economical way to assure thickness control Accurate manual control of film thicknesses during deposition is difficult if not impossible. A white tile with a drop of oil is sometimes used for rough estimates of coating thicknesses of carbon but cannot be used when repetitious, reproducible coatings are required. Using instrumental settings is also not an accurate method because vacuum level (for sputtering) and time (for evaporation) are very critical parameters. The High Resolution Thickness Monitor offers repeatability of coating thicknesses, removes guesswork and is convenient. The use of a tooling factor allows for exact measurement of the thin films. The MTM-10 High Resolution Thickness Monitor works with many types of vacuum thin film coating equipment. |
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MTM-20 High Resolution Thickness Controller
The MTM-20 High Resolution Thickness Controller is specifically designed for the Cressington
sputter coater systems and is fully compatible with the 108auto, 108auto/SE, 208HR sputter coater
systems and with the DC-100 sputter supply for the 308R thin film coating system |
MTM-10 High Resolution Thickness Monitor and
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| General Specifications: | Microprocessor based, 4-digit display, push-button zero 6MHz crystal with lifetime check 5 times per second update rate |
| Thickness Range: | 0.0 - 999.9nm (pos/neg) |
| Resolution: | 0.1nm for carbon |
| Density Range: | 0.50 - 30.00g/cm³ |
| Tooling Factor Range: | 0.25 - 8.0 |
| Processor Function: | Four sets of values can be stored in memory under Density and four under Tooling for both the MTM-10 and MTM20 |
| MTM-20 Controller: |
MTM-20 only: Programmable thickness termination function with termination interface cable on 108 auto, 208HR and DC-100 Termination facility range 0-999.9nm |
| Prod # | Description | Unit | Price | Order / Quote |
|---|---|---|---|---|
93004 | MTM-10 High Resolution Thickness Monitor System* 110VAC, 50/60Hz | each | $2,030.00 | |
| 93004-220 | MTM-10 High Resolution Thickness Monitor System* 220VAC, 50/60Hz | each | 2,030.00 | |
| 93006 | MTM-20 High Resolution Thickness Controller System* 115VAC, 50/60Hz | each | 2,745.00 | |
| 93006-220 | MTM-20 High Resolution Thickness Controller System* 220VAC, 50/60Hz | each | 2,745.00 | |
| 93005 | MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 110VAC, 50/60Hz | each | 2,130.00 | |
| 93005-220 | MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 220VAC, 50/60Hz | each | 2,130.00 | |
| 93007 | MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 115VAC, 50/60Hz | each | 2,845.00 | |
| 93007-220 | MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 220VAC, 50/60Hz | each | 2,845.00 | |
| 93004-30 | Oscillator for MTM-10/20 | each | 294.00 | |
| 93004-31 | Ext BNC Cable for MTM-10/20, 3 ft. length | each | 19.30 | |
| 93004-32 | CS-108 Vacuum Feedthrough for MTM-10/20 | each | 275.00 | |
| 93004-35 | Crystal Holder for MTM-10/20 | each | 305.00 | |
| 93004-36 | Crystal Holder Cable for MTM-10/20, 6 in. length (for 108) | each | 29.80 | |
| 93004-37 | Crystal Holder Cable for MTM-10/20, 12 in. length (for 108, 108SE, 208, 308)) | each | 42.00 | |
| 93008 | Replacement Crystals for MTM-10/20 | pkg/3 | 42.00 | |
| 93009 | Replacement Crystals for MTM-10/20 | pkg/10 | 93.30 | |
| 93004-10 | Film Thickness Hardware Kit w/o MTM-10 | each | 860.00 | |
| 93004-12 | Film Thickness Hardware Kit for RPT Stage w/o MTM-10 | each | 925.00 | |
| *The MTM-10 High Resolution Thickness Monitor System and MTM-20 High Resolution Thickness Controller System include: MTM Controller Box, BNC Cable, Oscillator, Vacuum feedthrough; Cables; Crystal holder, test crystal; Instructions | ||||
| *RPT: Rotary-Planetary-Tilting Stage | ||||
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Page Last Updated: March 24, 2009