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Specifications |
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| Chamber Size: | 150mm OD x 165mm height (5.9" x 6.5") Variable height, 165mm to 250mm (6.5" to 9.8") |
| Target: | Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick |
| Sample Table: | Holds 12 SEM pin mounts; Height adjustable through 60mm |
| Sputter Supply: | Microprocessor based Safety interlocked Current control independent of vacuum Digitally selectable current (10, 20, 30, or 40mA) |
| Sputter Head: | High field low voltage planar magnetron Quick target change Wrap-around dark-space shield Target shutter |
| Analog Metering: | Vacuum Atm - 0.001mb Current, 0 - 50mA |
| Thickness Monitoring: | Optional, MTM-10 |
| Thickness Controller: | Optional, MTM-20 with termination facility |
| Control Method: | Automatic operation of gas purge and leak functions Automatic process sequencing Full manual override Digital timer (5-300 sec) with pause Automatic vent |
| Desktop system: | Vacuum pump is mounted on desktop compatible anti-vibration table All metal integrated coupling system |
Requirements |
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| Electrical: | 100-120 or 200-240 VAC, 50/60Hz (specify on order) |
| Power: | 300VA (coater and pumping system #7010 together) |
| Argon gas: | Purity, min. 99.99% Working pressure 5-6 psi (0.4 bar) Hose connection, 6.0mm (1/4") |
| 1. Control unit 2. Vacuum chamber 3. Thickness monitor |
4. Rotary pump 5. Anti-vibration base |