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Specifications |
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| Chamber size: | 120mm OD x 120mm height (4.75 x 4.75") |
| Target: | Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick |
| Sample table: | Holds 12 SEM pin mounts; Height adjustable through 60mm |
| Sputter supply: | Microprocessor based, safety interlock, variable, 40mA maximum Programmable digital control |
| Sputter head: | Planar magnetron; Quick target change Wrap-around dark-space shield |
| Analog metering: | Vacuum Atm - 0.001mb |
| Thickness monitoring: (optional) |
Use automatic terminating MTM-20 High Resolution Thickness Controller or MTM-10 High Resolution Thickness Monitor (manual terminating) |
| Control method: | Automatic operation of gas purge and leak functions Automatic process sequencing Full manual override Digital timer (0-300 sec) with pause Automatic vent |
| Desktop system: | Vacuum pump is mounted on desktop compatible anti-vibration table All metal integrated coupling system |
Requirements |
|
| Electrical: | 100-120 or 200-240 VAC, 50/60Hz (specify on order) |
| Power: | 300VA (coater and pumping system #7010 together) |
| Argon gas: | Purity, min. 99.99% Working pressure 5-6 psi (0.4 bar) Hose connection, 6.0mm (1/4") |
| 1. Control unit 2. Vacuum chamber 3. Thickness monitor |
4. Rotary pump 5. Anti-vibration base |