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Cressington Introduction
Cressington 308R Coating Systems
Components for 308R Systems
Consumables and Accessories for 308R Systems
Sputter Targets for 308R Systems

DC100 DC Magnetron Power Supply,
Sputter Sources and Glow Discharge Cleaning

for use with the 308R

The DC100 DC magnetron power supply has a dual output on a single KF40 feedthrough with a safety vacuum interlock integrated in the feedthrough. Up to two compact sputter sources or a combination of sputter head and glow discharge can be connected to one DC100 power supply. Sputter sources have a separate feedthrough, and can be positioned anywhere in the chamber.

The DC100 power supply is adjustable from 5-80 Watts. Operation is either manual, preset current or thickness controlled (needs the high resolution MTM-20 thickness controller). The sputter sources for the 308 use compact 38mm diameter targets. This allows for mounting up to 4 sputter heads in the vacuum chamber to accommodate either sputtering of multiple layers or co-sputtering of materials. Sputter sources can be conditioned or shielded by using shutter assemblies. The advanced vacuum system and precise leak valve setting gives excellent control over the argon sputter gas pressure resulting in a wide range of sputter rates.

The efficient glow discharge head used together with air as process gas gives excellent plasma/ion cleaning of substrates, TEM grids. With the glow discharge hydro carbons or biological material can also be etched.

For materials with a low sputter rate, such as Al, a water cooling kit for the DC Magnetron sputter head is available. The #9520-10 water cooling kit includes cooling plate (to fit on #9520 sputter head) metal flexibles and KF40 feed through. Not available for a sputter head on swingline arm.

dc magnetron head assembly for 308r coating system

DC Magnetron Head Assembly on Swinging Arm mounted on a standard KF40 feedthrough.

Water Cooling Kit for the DC Magnetron head assembly for 308r coating system

Sputter head with cooling plate and cooling lines for upwards deposition, shutter in front of sputter head

Sputter Deposition

Prod #

Description

Unit

Price

Order / Quote

9518

DC100 Dual Output Sputter Supply with single QF40 dual feedthrough and pressure switch control, 115V

each

P.O.R.

Qty:

9518-220

DC100 Dual Output Sputter Supply with single QF40 dual feedthrough and pressure switch control, 220V

each

P.O.R.

Qty:

9520

DC Magnetron Sputter Head Assembly, 38mm disc target size

each

2,825.00

Qty:

9520-10

Water Cooling Kit for #9520 sputter head, incl. cooling disc, metal flexibles and KF40 feedthrough
(not compatible with #9520-20)

each

2,875.00

Qty:

9520-20

DC Magnetron Head Assembly on Swinging Arm, 38mm disc target size (swinging control on QF40 feedthrough)

each

P.O.R.

Qty:

9519

Glow Discharge Assembly for TEM grid cleaning

each

1,675.00

Qty:

9519-20

Glow Discharge Assembly on Swinging Arm (swinging control on QF-40 feedthrough)

each

P.O.R.

Qty:

9529

Manual Shutter Assembly on QF40 feedthrough

each

1,795.00

Qty:

9530

Static Shutter Kit

each

245.00

Qty:

9532

Source Mounting Ring with 36 holes for 9510

each

675.00

Qty:

Note: The DC100 is the required power supply for sputtering or glow discharge application. A DC100 can be used for two accessories.

Sputter Targets for the 308R Sputter Systems

Solid disk targets with 38mm diameter and various thicknesses.

Note: Please call or email for pricing on Targets, actual prices can vary due to changes of prices for precious metals.

High purity 38mm diameter Targets for Cressington 308HR Sputter Coaters

9559

DC100 DC Magnetron Power Supply,Sputter Sources and Glow Discharge Cleaning

for use with the 308R

Sputter Deposition

Sputter Targets for the 308R Sputter Systems

DC100 DC Magnetron Power Supply,
Sputter Sources and Glow Discharge Cleaning