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Calibration Overview
PELCO® XCS EDS Calibration Standards

UHV-EL Reference Standards
for EDS/WDS

UHV-EL Round Reference Standard with 37 Elements UHV-EL Reference Standard for EDS/WDS

Ultra High Vacuum Compatible
Micro and Macro Analysis
Standard for Surface and X-ray Analysis

  • UHV (ultrahigh vacuum) compatible (10-10 torr)
  • Suitable for spectral and intensity references for EDS, WDS, EPMA, Auger, XPS, ESCA, etc.
  • Custom and standard reference material configurations
  • Rectangular or circular retainers holding from 6 to 37 reference standards
  • Retainers machined from SS304
  • Custom mounting bases available
  • Each reference standard is individually and separately prepared from bulk or powdered materials, polished with the most suitable method, and can easily be removed or reinserted into the retainer

Analysis accuracies of 1-2% (relative) are possible only when appropriate standards are used. UHV systems cannot accept commonly available standard sets because of outgassing of mount materials and degradation from electron beam heating. The use of bakelite, plastic or epoxy embedded standards under UHV conditions have prevented accurate analysis. These inaccuracies are caused by compromised vacuum levels and contaminated reference standards. Also, standardless techniques give no indication that some elements may not be accounted for or are present in an oxide phase.

Reference standards supplied with the UHV-EL, which contain only UHV compatible materials, can be used to characterize the transmission of the electron energy analyzer, determine peak shapes, resolution, energies and sensitivity factors.

Since generalized sensitivity factors cannot be used with a reasonable degree of accuracy, even for the same instrument model, it is necessary for these factors to be determined for each unique instrument, on a continuing basis. Conditions will change over time because of peak shift, amplifier settings and spectrometer tolerances.

 

Construction and Design
The retainer is precision machined from stainless steel 304. Each retainer has holes machined with a 0.13mm boss at the top. All reference standards are precisely referenced within 0.13mm of the top surface. This recess protects the reference standard surfaces from contamination and scratching and also minimizes the possibility of X-ray fluorescence from the retainer. The reference standards, which are of various thicknesses, are retained by SS304 clips which are inserted from the back of the mount. The round UHV-EL-37 is laser engraved to assist in locating the desired reference standard using electron

Reference standards are individually sized and polished according to the properties of the material. Cross contamination and smearing is avoided.

If a reference standard surface gets roughened from excessive ion beam sputtering or is too highly oxidized, it can be easily removed and replaced in your laboratory. Tools and clips are provided. If bulk materials are not available for some reference standards, powders are used. They are consolidated with silver flake and the powder grains metallographically polished. Many insulators prepared this way are sufficiently conductive for X-ray and Auger analysis without carbon coating; all minerals and glasses are coated with ~20nm of carbon. The silver can be used for reference when determining sensitivity factors.

Custom Preparation
Your materials may be inserted into one of the retainers described using careful techniques. Electron beam X-ray techniques and reference standards - which are charge sensitive - can be carbon coated. All conductive minerals and glasses are coated with ~20nm of carbon.

Shipping
UHV-EL-37 circular retainer reference standards are shipped in a VACU-STORR container. It is optional for other configurations or custom orders.

Certification
The purity or composition of each reference standard is certified by the manufacturer. The SRM classes and certified alloys are NIST traceable, please see information on Reference Standards and Alloys below.


Retainers

Round Retainer
25mm diameter
UHV-EL-37
  Rectangular Retainers
Thickness of retainers is 4.7mm • Dimension accuracy is ±0.5mm

For Configuration, designate Retainer Style and reference standard locations and numbers:
use the submit form
or, alternatively, print the submit form, fill in the corresponding numbers for elements/compounds and fax it to us at: 530-243-3761.

See below for a list of elements and compounds and their respective order numbers.

All minerals and glasses are coated with ~20nm of carbon. If you wish uncoated standards, please put this on your order.

UHV-EL-37 25mm Round UHV-EL 18 24 x 12.5mm Rectangular UHV-EL 15 19.5 x 12.5mm Rectangular UHV-EL 12 16.5 x 12.5mm Rectangular UHV-EL 9 12.5 x 12.5mm Square UHV-EL 6 8.5 x 12.5mm Rectangular
UHV-EL 37
25mm Round
UHV-EL 18
25 x 12mm Rectangular
UHV-EL 15
21 x 12mm Rectangular
UHV-EL 12
17 x 12mm Rectangular
UHV-EL 9
13 x 12mm
Square
UHV-EL 6
9 x 12mm
Rectangular

Prod # Description Unit Price Order / Quote
UHV-EL Retainers Without Standards
6065 UHV-EL 6 Rectangular Retainer, 9 x 12mm, 6 spaces each $145.00
Qty:
6066 UHV-EL 9 Square Retainer, 13 x 12mm, 9 spaces each 185.00
Qty:
6067 UHV-EL 12 Rectangular Retainer, 17 x 12mm, 12 spaces each 225.00
Qty:
6068 UHV-EL 15 Rectangular Retainer, 21 x 12mm, 15 spaces each 260.00
Qty:
6069 UHV-EL 18 Rectangular Retainer, 25 x 12mm, 18 spaces each 690.00
Qty:
6070 UHV-EL 37 Round Retainer, 25mm diameter, 37 spaces each 400.00
Qty:
UHV-EL Single Reference Standards (3mm dia.) for Retainers
6060 UHV-EL - Any Single Reference Standard other than Diamond, Cu/Au, Ag/Au or Al/Cu (specify number from list) each 115.00
Qty:
6061 Diamond UHV-EL Single Reference Standard, (No. 21 and No. 168 on list) each 220.00
Qty:
6062 Cu/Au UHV-EL Single Reference Standard, SRM482, 5 wires (No. 197 on list) each 220.00
Qty:
6063 Al/Cu UHV-EL Single Reference Standard (No. 230 on list) each 155.00
Qty:
6091 Ag/Au UHV-EL Single Reference Standard, SRM481, 6 wires (No. 197A on list) each 220.00
Qty:
6092 Phosphor Bronze UHV-EL Single Reference Standard, (No. 197B on list) each 200.00
Qty:
6064 Faraday Cup for UHV-EL to measure beam current each 115.00
Qty:
UHV-EL Retainers Complete With Reference Standards
6075 UHV-EL 6 Rectangular Retainer, 9 x 12mm, with 6 reference standards (select from list) each 685.00
Qty:
6076 UHV-EL 9 Square Retainer, 13 x 12mm, with 9 reference standards (select from list) each 995.00
Qty:
6077 UHV-EL 12 Rectangular Retainer, 17 x 12mm, with 12 reference standards (select from list) each 1305.00
Qty:
6078 UHV-EL 15 Rectangular Retainer, 21 x 12mm, with 15 reference standards (select from list) each 1610.00
Qty:
6079 UHV-EL 18 Rectangular Retainer, 25 x 12mm, with 18 reference standards (select from list) each 1910.00
Qty:
6080 UHV-EL 37 Round Retainer, 25mm diameter, with 37 reference standards (select from list) each 4100.00
Qty:
6081 UHV-EL 37 Round Retainer, 25mm diameter, Standard Configuration with 37 reference standards each 4100.00
Qty:
standard configuration
Standard Configuration for Round Retainer

Round UHV-EL Retainer can be ordered in Standard or Custom Configuration

The Standard Configuration is shown to the left. A custom configuration requires that details be given regarding the elements chosen and the configuration (a "blank" Custom Round Retainer is shown for ordering - please print out and fill in exactly as needed).

Note: For Custom Configuration designate reference standard locations and numbers: use the submit form
or print out the submit form, fill in the numbers in the actual spaces for the desired elements/compounds and fax it to us at: 530-243-3761.
See below for a list of elements and compounds, preceded by their respective order numbers.

Reference Standards for UHV-EL Retainers

Abbreviations
M Natural mineral
Opt Optical crystal
P Powder or grains: mixed with either Ag or Sn (for S containing materials) and pressed
TF Thin film on silicon wafer
VD Vapor deposit (CVD, LPCVD, etc.)
B Bulk material
C Crystalline
EM End member mineral
F Foil
HP Hot pressed
Purity "N" is the # of "9"'s. 5N stands for 99.999% pure, 2N5 is 99.5% pure
"+" Higher purity
? No analysis for purity, but at least 2N
* No certificate available. Most containers show marked purity. With EDS analysis we see no additional elements (<0.1%)

Element/Compound Symbol Form Purity
1.AluminumAlF3N*
2.Aluminum FluorideAlF3P2N5*
3.Aluminum OxideAl2O3C4N*
4.Aluminum NitrideAlNP2N+
5.AntimonySbB2N
6.Barium FluorideBaF2C2N+
7.Barium SulfateBaSO4P3N*
8.Barium TitanateBaTi4O9HP2N5*
9.Barium TitanateBaTiO3P5N
10.BerylliumBeF3N
11.BismuthBiB2N8*
12.Bismuth OxideBi2O3P2N5*
12A.Bismuth TellurideBi2Te3B2N*
13.BoronBP1N75
14.Boron CarbideB4CP5N*
15.Boron NitrideBNB4N
16.Boron PhosphideBPP3N
17.CadmiumCdFOpt
17A.Cadmium SulfideCdSP3N
18.Calcium CarbonateCaCO3C3N+*
19.Calcium FluorideCaF2C3N
20.Carbon (Pyrolytic)CCVD5N*
21.Carbon (Diamond), same as #168 (additional cost)C (cleaved ~1mm)C4N7*
22.Cerium OxideCeO2P2N5
23.Cesium IodideCsIO2N*
23A.Cesium BromideCsBrP3N
24.ChromiumCrP4N6
24A.Chromium CarbideCr3C2P2N8
25.Chromium NitrideCr2NP2N5
26.Chromium OxideCr2O3HP5N
27.CobaltCoF5N
28.Cobalt OxideCo3O4P3N
29.Cobalt SilicideCoSi2P2N
30.CopperCuF2N
31.Cupric OxideCuOP3N
32.Cuprous OxideCu2OEM3N
33.Copper SulfideCuSM3N
34.Copper SulfideCu2SM2N+*
35.DysprosiumDyF4N
36.ErbiumErF5N*
37.Europium OxideEu2O3HP3N
38.GadoliniumGdF5N*
39.Gallium ArsenideGaAsC5N*
40.Gallium NitrideGaNP3N
41.Gallium PhosphideGaPP2N5*
42.Gallium AntimonideGaSbP2N5*
43.GermaniumGeB2N
44.Germanium OxideGeOP2N5
45.GoldAuF3N
46.HafniumHfF3N*
46A.Hafnium BorideHfB2P4N7
47.Hafnium CarbideHfCB6N
47A.Hafnium NitrideHfNP2N5
47B.Hafnium OxideHfO2P3N*
48.HolmiumHoB3N
49.IndiumInF3N
50.Indium ArsenideInAsC?
50A.Indium AntimonideInSbP3N
51.Indium PhosphideInPC5N*
52.Indium Tin Oxide
10% In, Inhomogenous
ITOP3N
53.IridiumIrF3N
54.IronFeP3N
54A.Iron CarbideFe3CF3N
55.Iron FluorideFeF2F3N
56.Iron FluorideFeF3P3N
57.Iron NitrideFe3NP2N5*
58.Iron OxideFeOP3N*
59.Iron OxideFe2O3P5N
60.Iron OxideFe3O4EM5N
61.Iron PhosphideFePEM3N
62.Iron SulfideFeS2P3N*
63.LeadPbPOpt
64.Lead OxidePbOF2N8
65.Lead SulfidePbSPOpt*
66.Lanthanum HexaborideLaB6P3N5*
66A.Lanthanum FluorideLaF3POpt
67.Lutetsium FluorideLuF3P3N
68.Lithium FluorideLiFP4N
69.MagnesiumMgC3N
70.Magnesium FluorideMgF2F3N*
71.Magnesium OxideMgOC4N
72.ManganeseMnC3N
73.Manganese SulfideMnSB2N5
74.Manganese OxideMnO2P?
75.Mercury SulfideHgSP4N5*
75B.Mercury IodideHgI2P2N+
75AMercury TellurideHgTeC5N
76.MolybdenumMoC4N
 
Element/Compound Symbol Form Purity
77.Molybdenum CarbideMo2CF4N8*
78.Molybdenum SilicideMoSi2HP3N
79.Molybdenum OxideMoO3P2N5*
81.OsmiumOsP2N
81A.Neodymium FluorideNdF3F3N
81CNeodymium OxideNd2O3P2N8
82.NickelNiC2N5
82A.Nickel AluminideNiAlFOpt
83.Nickel OxideNiOF3N5*
84.Nickel PhosphideNi2PP3N
85.Nickel SilicideNiSi2P3N*
86.NiobiumNbPOpt
87.Niobium CarbideNbCP2N5*
88.Niobium OxideNb2O5HP4N*
89.PalladiumPdP3N
90.PlatinumPtF4N
91.Potassium BromideKBrF4N*
92.Potassium ChlorideKClC3N5*
93.Potassium IodideKIC3N
93A.Praeseodymium FluoridePrF3C3N8
94.RheniumReHP3N
94A.Rhenium OxideReO3F3N
96.RhodiumRhP3N
97.Rubidium ChlorideRbClF3N
97A.Rubidium IodideRbIP2N7
98.RutheniumRuP2N8
99.SamariumSmP3N5
100.ScandiumScF4N8
101.SeleniumSeC3N
102.SiliconSiC5N*
103.Silicon CarbideSiCCVDOpt*
104.Silicon DioxideSiO2EM2N5*
105.1000Å SiO2/SiSiO2TF3N5
106.Silicon NitrideSi3N4HP2N
107.468Å Si3N4/SiSi3N4TF2N5
108.SilverAgF3N5
109.Silver ChlorideAgClC5N
109A.Silver OxideAg2OP3N*
110.Silver SulfideAg2SC?
111.Sodium ChlorideNaClC2N5
112.Sodium FluorideNaFC5N
113.Strontium FluorideSrF2P3N
113A.Strontium OxideSrOP2N5
114.TantalumTaF3N
115.Tantalum CarbideTaCHP3N*
116.Tantalum NitrideTaNP4N8
117.Tantalum OxideTa2O5P1N8*
118.1000Å Ta2O5/TaTa2O5TF2N8
120.Tantalum SilicideTaSi2P2N5
121.TelluriumTeB2N
122.TerbiumTbF2N5
123.Thallium ChlorideTlClP3N8*
124.Thorium OxideThO2P2N5*
125.ThuliumTmF2N5
126.TinSnF2N5
127.Tin OxideSnO2EM2N5
128.TitaniumTiF2N7
128A.Titanium Al CarbideTi2AlCHP2N5*
129.Titanium CarbideTiCHP2N5
130.Titanium DiborideTiB2HP2N5*
131.Titanium DioxideTiO2EM2N5
132.Titanium NitrideTiNP4N5
132A.Titanium OxideTiOHP3N
133.Titanium SilicideTiSi2P3N
134.TungstenWF4N
135.Tungsten CarbideWCHP4N8
136.Tungsten NitrideWNP3N
137.Tungsten OxideWO3P2N+
138.Tungsten SilicideWSi2POpt
140.VanadiumVF2N5
141.Vanadium CarbideVCHP4N*
141A.Vanadium NitrideVNHP2N5*
142.Vanadium OxideV2O5P4N*
142A.YtterbiumYbF3N
143.YttriumYF3N
143A.YagYAlOC?
144.Yttrium OxideY2O3P4N
145.ZincZnF4N8
146.Zinc OxideZnOHP?
147.Zinc SelenideZnSeC?
148.Zinc SulfideZnSC?
149.ZirconiumZrF2N8
150.Zirconium CarbideZrCHP?
150A.Zirconium NitrideZrNP2N5
151.Zirconium OxideZrO2C2N7*

Mineral Formula (approximate)
152.AcanthiteAg2S
153.AlbiteNaAlSi3O8
154.AlmandineFe32+Al2(SiO4)3
155.AndraditeCa3Fe23+(SiO4)3
156.AnorthiteCaAl2Si2O8
156A.Augite(Ca,Na)(Mg,Fe,Al,Ti)(Si,Al)2O6
157.BaddeleyiteZRO2 (traces of Ti and Fe)
157A.BariteBaSO4
158.BenitoiteBaTiSi3O9
159.Biotite
(black mica)
K(Mg,Fe2+)3(Al,Fe3+)Si3O10(OH,F)2
160.Bytownite(Na, Ca)Al(Al,Si)Si2O8
161. Calcium CarbonateCaCO3
162.CassiteriteSnO2
163.ChalcociteCu2S
164.CinnabarHgS
165.ChrysoberylBeAl2O4
166.CovelliteCuS
167.CupriteCu2O
168. Diamond, same as #21
(additional cost)
C (cleaved ~1mm)
169.Diamond (like)C Matches Raman for Diamond
Mineral Formula (approximate)
169A.DiopsideCaMgSi2O6
170.DolomiteCaMg(CO3)2
170A.FayaliteFe22+SiO4
171.FluorapatiteCa5(PO4)3F
172.ForsteriteMg2SiO4
173.HematiteFe2O3
174.Hornblende
(Amphibole)
Ca2(Mg,Fe2+)4Al(Si7Al)O22(OH,F)2
175.KyaniteAl2O3.SiO2
176.MagnetiteFe3O4
177.OrthoclaseK2O.Al2O3.6SiO2
177A.PyropeMg3Al2(SiO4)3
178.QuartzSiO2
179.RutileTiO2
180.SodaliteNa4(AlCl)Al2(SiO4)3
180A.SpessartineMn2+3Al2(SiO4)3
181.SpinelMgAl2O4
181A.UraniteUO2
181B.TitaniteCaTiSiO5
182.Willemite
(Troosite)
Zn2SiO4
183.WollastoniteCaSiO3
Note: electron probe compositions provided upon request or with standard. Some mineral standards have minor phases of other materials.

SRM# National Institute of Standards & Technology (formerly NBS) Please see note below regarding alloys.
Glasses B2O3 Na2O MgO Al2O3 SiO2 Cl K2O CaO TiO2 V2O5 Cr2O3 MnO2 Fe2O3 ZrO2 PbO Bi2O3 BaO ZnO CoO CuO
184. 612   14.0   2.0 72.0     12.0   +50 ppm of 51 other elements              
185. 93a 12.5 3.9   2.2 80.8 .06 .01 .01 .01       .028 .04            
186. K252         40.0             5.0         35.0 10.0 5.0 5.0
187. K229         30.0                   70.0          
188. K326 30.0 2.0 30.1   29.9     8.0                        
189. K309       15.0 40.0     15.0         15.0       15.0      

Ti Alloys Fe C Mn P S Si Cu Zn Pb Sn Ni Cr V Mo Ti As W Zr Nb Ta Al Co
190. 654b .23         .045 .004     .023 .028 .025 4.31 .013 88.05     .008     6.34  
191. 1128 .134 .011               3.04   2.96 15.13   75.64           3.06  
Miscellaneous NIST Standards
192. 1104 .088     .005     61.33 35.31 2.77 .43 .07                      
193. 1108 .044   .0025       64.9 34.4 0.06 .39 .033                      
194. 1110 .033           84.5 15.2 0.03 .051 .053                      
195. 1230 Bal .044 .64 .023 .0007 .43 .14       2.42 14.8 .23 1.18 2.12           .24 .15
195A. 1243 .79 .024 .019 .003 .0018 .018 .007       58.78 19.20 .12 4.25 3.06     .053     1.23 12.46
195B. 1297 Bal .066 7.11 .038 .0033 .397 .442       5.34 16.69 .08 .33               .13
196. C2402 7.3 .01 .64 .007 .018 .85 .19       51.5 16.15 .22 17.1     4.29         1.5
196A. 2321 Solder : Sn 60% / Pb 40%
197. SRM-482 5 wires in one 3mm ø mount. Cu:Au (20:80, 40:60, 60:40, 80:20) + pure Cu (additional cost)
197A. SRM-481 6 wires in one 3mm ø mount. Ag:Au (pure Ag, pure Au, 20:80, 40:60, 60:40, 80:20) (additional cost)
197B. 871 Phosphor Bronze (CDA-521) (additional cost)
Steels Fe C Mn P S Si Cu Zn Pb Sn Ni Cr V Mo Ti As W Zr Nb Ta Al Co
198. 461 Bal .15 .36 .053 .019 .047 .34   .003 .022 1.73 .13 .024 .3 .01 .028 .01 <.005 .011 .002 .005 .26
199. 462 Bal .40 .94 .045 .019 .28 .20   .006 .066 .70 .74 .058 .08 .037 .046 .053 .063 .096 .036 .02 .10
200. 464 Bal .54 1.32 .017 .021 .48 .094   .02 .043 .13 .078 .29 .029 .004 .018 .022 .01 .037 .069 .005 .02
201. 465 Bal .037 .032 .008 .01 .029 .019   <.0005 .001 .026 .004 .002 .005 .20 .01 .001 .002 .001 .001 .19 .08
202. 466 Bal .065 .11 .012 .009 .025 .033   .001 .005 .051 .011 .007 .011 .057 .014 .006 <.005 .005 .002 .01 .04
203. 467 Bal .11 .23 .003 .009 .26 .067   .000 .1 .088 .036 .041 .021 .26 .14 .20 .094 .29 .23 .16 .07
204. 468 Bal .26 .47 .023 .02 .075 .26   <.0005 .009 1.03 .54 .17 .20 .011 .008 .077 <.005 .006 .005 .04 .16
205. 661 Bal .39 .66 .015 .015 .223 .042     .01 1.99 .69 .011 .19 .02 .017 .01 .009 .22 .02 .02 .03
206. 663 Bal .57 1.50 .02 .005 .74 .09   .0022   .32 1.31 .31 .30 .05 .01 .04 .05 .049   .24 .05
207. 664 Bal .87 .25 .01 .025 .066 .25   .024   .14 .06 .10 .49 .23 .05 .10 .069 .15 .11   .15
208. 665 Bal .008 .0057 .002 .0059 .008 .0058       .041 .007 .0006 .005 .0006 .002           .01
209. 1761 Bal 1.03 .68 .043 .033 .19                                
210. 1762 Bal .034 2.03 .036 .03 .36                                
211. 1763 Bal .20 1.59 .012 .022 .65                                
212. 1764 Bal .59 1.22 .023 .012 .06                                
213. 1765 Bal .006 .14 .007 .004 .005                                
214. 1766 Bal .015 .06 .004 .002 .01                                
215. 1767 Bal .051 .02 .005 .009 .02                                
216. 1768 Bal .001 .014 .0013 .0003   .0006       .0014                   .002 .002

Alloys- Certified by a group of laboratories, NIST traceable. Analysis provided with each alloy purchased. Nominal Compositions
Stainless Steels + High Temp
Nominal Compositions
Low Alloy + Specialty Alloys
Nominal Compositions
Nickel/Cobalt
Nominal Compositions
Copper/Brass/Bronze
Nominal Compositions
216B.AISI 302 233.C-4140 242.Inco 600 249.CDA 360
217.AISI 303 234.C-4340 243.Inco 625 250.CDA 510
218.AISI 304 235.C-8620 244.Inco 718 251.CDA 655
219.AISI 316 236.Tool Steel A-6 245.Inco 800 252.CDA 857
220.AISI 321 237.Tool Steel D-2 246.Hastelloy C-22   
221.AISI 410 238.Tool Steel H-13 247.Hastelloy C-276   
222.AISI 440C 239.Tool Steel M-2 248.Hastelloy X   
223.PH13-8MO 240.2Cr-1Mo (36a)      
224.15-5 PH 241.9Cr-1Mo (38a)      
225.17-4PH 241A50 NIL      
226.CARP 20CB3 241B52100      
227.Maraging 300 241CAISI 4820      
228.HK-40 241DAISI 9310      

Miscellaneous Standards:
229.BPSG (not an NIST standard), 4% P, 3.3% B.
230.Al-Cu: NIST traceable standard for energy dispersive x-ray detector calibration (additional cost).
231.C-Cu-Ag: Standard for electron backscattering adjustment. Used for gun shot residue calibration
232.GSR- Gun shot residue: mixture of Ba, Sb, Pb particles in epoxy and carbon coated.
Faraday Cup, for beam current measurement, is available for all of the retainers and will take one of the spaces.
PLEASE READ CAREFULLY!
The metal alloys on this list cannot be assumed to be homogenous at the micrometer scale. If you intend to use ZAF corrections electron beam excited x-ray analysis (wavelength or energy dispersive), the sample volume must be homogenous within the electron excited volume. It is a misuse to use these metal alloys for bulk quantitative analyses. Nevertheless, they are useful for comparison purposes (in a least square sense) to compare against unknown materials. Every effort is made to insure that cutting, grinding, and polishing of the materials do not alter their composition.

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