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High Magnification, High resolution Reference
and Calibration Standards for AFM, SEM, Auger and FIB

Holographic Grating for Scanning Electron Microscopy,
Atomic Force Microscopy, Auger and Focused Ion Beam

Precision, holographic patterns, provide accurate calibration and feature high stability and usability. Moderate ridge heights are convenient for AFM. Specimens provide good contrast for secondary and backscatter imaging with SEM. They enable accurate calibration for high resolution, nanometer-scale measurements. Available with 70, 145 and 292nm pitch.

High Magnification, High Resolution Calibration Reference and Traceable Standard for AFM, SEM, Auger, and FIB High Magnification, High Resolution Calibration Reference and Traceable Standard for AFM, SEM, Auger, and FIB High Magnification, High Resolution Calibration Reference and Traceable Standard for AFM, SEM, Auger, and FIB
70nm pitch 145nm pitch 292nm pitch

70nm Pitch Reference Standard for Very High Resolution
Calibration for AFM, SEM, Auger and FIB.

Period: 70nm pitch nominal, one dimensional array. Accuracy is +/- 0.25nm. Calibration certificate will give the actual pitch of the standard.
Surface structure: Silicon Dioxide ridges on Silicon, 4x3mm dimensions. Ridge height and width are both about 35nm (not calibrated).
Usability: The calibrated pattern covers a 1.2 x 0.5mm area. There is sufficient usable area to make thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 100nm to 3um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (1kV-20kV) and calibrates images from 25kX to 1000kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements.
There is also the traceable, certified version measured in comparison with a standard calibrated at PTB (Physiklisch-Technischen Bundesanstalt in Braunschweig, Germany, is the German counterpart of NIST). The standard is NIST traceable by virtue of the mutual recognition agreement by NIST and PTB.
See Mount Selections A-P

Prod #DescriptionUnitPriceOrder / Quote
70nm AFM Reference Standard, Certified, Non-traceable, Mounted on disk:
641-1AFM
70nm Very High Resolution AFM Reference Standard on 12mm steel disk
each
$1,000.00
Qty:
70nm SEM, Auger and FIB Reference Standard, Certified, Non-traceable
641-1
70nm Very High Resolution AFM Reference Standard, Unmounted
each
1,197.00
Qty:
641-1A
70nm Very High Resolution AFM Reference Standard, Mount A
each
1,112.00
Qty:
641-1B
70nm Very High Resolution AFM Reference Standard, Mount B
each
1,112.00
Qty:
641-1C
70nm Very High Resolution AFM Reference Standard, Mount C
each
1,112.00
Qty:
641-1D
70nm Very High Resolution AFM Reference Standard, Mount D
each
1,112.00
Qty:
641-1E
70nm Very High Resolution AFM Reference Standard, Mount E
each
1,112.00
Qty:
641-1F
70nm Very High Resolution AFM Reference Standard, Mount F
each
1,112.00
Qty:
641-1G
70nm Very High Resolution AFM Reference Standard, Mount G, you supply mount
each
1,112.00
Qty:
641-1K
70nm Very High Resolution AFM Reference Standard, Mount K
each
1,112.00
Qty:
641-1L
70nm Very High Resolution AFM Reference Standard, Mount L
each
1,112.00
Qty:
641-1M
70nm Very High Resolution AFM Reference Standard, Mount M
each
1,112.00
Qty:
641-1O
70nm Very High Resolution AFM Reference Standard, Mount O
each
1,112.00
Qty:
641-1P
70nm Very High Resolution AFM Reference Standard, Mount P
each
1,112.00
Qty:
70nm AFM Reference Standard, Certified, Traceable, Mounted on disk:
641-11AFM
70nm Very High Resolution AFM Reference Standard on 12mm steel disk
each
P.O.R.
Qty:
70nm SEM, Auger and FIB Reference Standard, Certified, Traceable
641-11
70nm Very High Resolution AFM Reference Standard, Traceable, Unmounted
each
P.O.R.
Qty:
641-11A
70nm Very High Resolution AFM Reference Standard, Traceable, Mount A
each
P.O.R.
Qty:
641-11B
70nm Very High Resolution AFM Reference Standard, Traceable, Mount B
each
P.O.R.
Qty:
641-11C
70nm Very High Resolution AFM Reference Standard, Traceable, Mount C
each
P.O.R.
Qty:
641-11D
70nm Very High Resolution AFM Reference Standard, Traceable, Mount D
each
P.O.R.
Qty:
641-11E
70nm Very High Resolution AFM Reference Standard, Traceable, Mount E
each
P.O.R.
Qty:
641-11F
70nm Very High Resolution AFM Reference Standard, Traceable, Mount F
each
P.O.R.
Qty:
641-11G
70nm Very High Resolution AFM Reference Standard, Traceable, Mount G, you supply mount
each
P.O.R.
Qty:
641-11K
70nm Very High Resolution AFM Reference Standard, Traceable, Mount K
each
P.O.R.
Qty:
641-11L
70nm Very High Resolution AFM Reference Standard, Traceable, Mount L
each
P.O.R.
Qty:
641-11M
70nm Very High Resolution AFM Reference Standard, Traceable, Mount M
each
P.O.R.
Qty:
641-11O
70nm Very High Resolution AFM Reference Standard, Traceable, Mount O
each
P.O.R.
Qty:
641-11P
70nm Very High Resolution AFM Reference Standard, Traceable, Mount P
each
P.O.R.
Qty:




145nm Pitch Calibration Standard for AFM

Precision holographic pattern for accurate calibration for high resolution, nanometer scale measurements.

Period: 145nm pitch nominal, one dimensional array. Accuracy is +/- 1nm. Calibration certificate will give the actual pitch of the standard.
Surface structure: Aluminum lines on glass, 4x6mm dimensions. Line height (about 100nm) and line width (about 75nm) are not calibrated.
Usability: The calibrated pattern covers the entire standard. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 250nm to 10um. Available unmounted or mounted on a 12mm steel AFM disk.
Certification: Comes with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements.
See Mount Selections A-P

Prod #DescriptionUnitPriceOrder / Quote
145nm AFM Reference Standard, Certified, Non-traceable, Mounted on disk:
642-1AFM
145nm Very High Resolution AFM Reference Standard on 12mm steel disk
each
$810.00
Qty:
145nm AFM Reference Standard, Certified, Non-traceable, Unmounted:
642-1
145nm Very High Resolution AFM Reference Standard, Unmounted
each
686.00
Qty:




292nm Pitch High Magnification, High Resolution
Calibration Standard for AFM, SEM, Auger and FIB.

Precision holographic grating standard with high contrast and excellent edge definition.

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements.
There is also the traceable, certified version measured in comparison with a standard calibrated at PTB (Physiklisch-Technischen Bundesanstalt in Braunschweig, Germany, is the German counterpart of NIST). The standard is NIST traceable by virtue of the mutual recognition agreement by NIST and PTB.
See Mount Selections A-P

Prod #DescriptionUnitPriceOrder / Quote
292nm AFM Reference Standard, Certified, Non-traceable, Mounted on disk:
643-1AFM
292nm High Resolution AFM Reference Standard on 12mm steel disk
each
$1,124.00
Qty:
292nm SEM, Auger and FIB Reference Standard, Certified, Non-traceable
643-1
292nm High Resolution AFM Reference Standard, Unmounted
each
1,247.00
Qty:
643-1A
292nm High Resolution AFM Reference Standard, Mount A
each
1,236.00
Qty:
643-1B
292nm High Resolution AFM Reference Standard, Mount B
each
1,371.00
Qty:
643-1C
292nm High Resolution AFM Reference Standard, Mount C
each
1,371.00
Qty:
643-1D
292nm High Resolution AFM Reference Standard, Mount D
each
1,371.00
Qty:
643-1E
292nm High Resolution AFM Reference Standard, Mount E
each
1,371.00
Qty:
643-1F
292nm High Resolution AFM Reference Standard, Mount F
each
1,371.00
Qty:
643-1G
292nm High Resolution AFM Reference Standard, Mount G, you supply mount
each
1,371.00
Qty:
643-1K
292nm High Resolution AFM Reference Standard, Mount K
each
1,371.00
Qty:
643-1L
292nm High Resolution AFM Reference Standard, Mount L
each
1,371.00
Qty:
643-1M
292nm High Resolution AFM Reference Standard, Mount M
each
1,371.00
Qty:
643-1O
292nm High Resolution AFM Reference Standard, Mount O
each
1,236.00
Qty:
643-1P
292nm High Resolution AFM Reference Standard, Mount P
each
1,236.00
Qty:
292nm AFM Reference Standard, Certified, Traceable, Mounted on disk:
643-11AFM
292nm High Resolution AFM Reference Standard on 12mm steel disk
each
P.O.R.
Qty:
292nm SEM, Auger and FIB Reference Standard, Certified, Traceable
643-11A
292nm High Resolution AFM Reference Standard, Traceable, Mount A
each
P.O.R.
Qty:
643-11B
292nm High Resolution AFM Reference Standard, Traceable, Mount B
each
P.O.R.
Qty:
643-11C
292nm High Resolution AFM Reference Standard, Traceable, Mount C
each
P.O.R.
Qty:
643-11D
292nm High Resolution AFM Reference Standard, Traceable, Mount D
each
P.O.R.
Qty:
643-11E
292nm High Resolution AFM Reference Standard, Traceable, Mount E
each
P.O.R.
Qty:
643-11F
292nm High Resolution AFM Reference Standard, Traceable, Mount F
each
P.O.R.
Qty:
643-11G
292nm High Resolution AFM Reference Standard, Traceable, Mount G, you supply mount
each
P.O.R.
Qty:
643-11K
292nm High Resolution AFM Reference Standard, Traceable, Mount K
each
P.O.R.
Qty:
643-11L
292nm High Resolution AFM Reference Standard, Traceable, Mount L
each
P.O.R.
Qty:
643-11M
292nm High Resolution AFM Reference Standard, Traceable, Mount M
each
P.O.R.
Qty:
643-11O
292nm High Resolution AFM Reference Standard, Traceable, Mount O
each
P.O.R.
Qty:
643-11P
292nm High Resolution AFM Reference Standard, Traceable, Mount P
each
P.O.R.
Qty:


see mounts for detailed description

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Page Last Updated: December 2, 2011