AFM, Atomic Force Microscopy Calibration
Scanning Probe Microscopy Calibration

AFM Gold Calibration Kit	TipChecker for AFM Probes	HS-Series AFM Calibration Standards	Highly Oriented Pyrolytic Graphite (H.O.P.G.)
High Resolution Calibration Standards for AFM, SEM, Auger, and FIB 70, 144, and 292nm pitch	Very High Resolution Calibration Standard for AFM, STM, Auger, FIB, and SEM with 150nm and 300nm pitch	2,160 Waffle Grating Replica	PELCO® AFM Tip and Resolution Test Specimen

Critical Dimension (CD) Calibration Test Specimens (may be used on AFM)

Multiple Use Microscopy Calibration; AFM Profilometry MRS-3, MRS-4, and MRS-5

MetroChip Microscope Calibration Target

AFM Calibration Specimens

AFM Image of Cross Line Grating Replica	2,160 Waffle Grating Replica X-Y piezoelectric calibration with 2,160 lines/mm crossed line grating replica mounted on a 12mm disc. PELCO® Technical Notes, Calibration Specimen for Atomic Force Microscope, Product No. 607-AFM PELCO® Technical Notes, Calibration Specimen for Scanning Tunneling Microscope, Product No. 607-STM
Prod # Description Unit Price Order / Quote 607-AFM X-Y Piezoelectric Cross Line Grating Replica on 12mm Specimen Disc each $44.00 Qty: 607-STM X-Y Piezoelectric Cross Line Grating Replica, Carbon/Au/Pd Coated each 52.50 Qty:
	Highly Oriented Pyrolytic Graphite (H.O.P.G.) This is widely used as a substrate for specimens to be examined in scanning probe microscopes. It may also be used as a calibration specimen. The HOPG consists of planes of carbon atoms (002) which are highly oriented with respect to each other. This parallelness is characterized by the mosaic spread angle which is 3.5° ±1.5°. PELCO® Technical Notes, Highly Ordered Pyrolytic Graphite ZYH quality, Product No. 626
Prod # Description Unit Price Order / Quote 626 Highly Oriented Pyrolytic Graphite, 10mm x 10mm x 2mm each $264.00 Qty:

PELCO® AFM Tip and Resolution Test Specimen Colloidal cobalt provides an excellent substrate for AFM tip characterization and instrument operation. Image at top demonstrates height calibration at 1nm (red line profile) and 3nm (green line profile) on the standard. Available on 5x5mm silicon wafer chips unmounted or mounted on 12mm stainless steel metal disk. Tip characterization down to angstrom resolution is easily attained. Image at top demonstrates 1 and 3nm height resolution accurate to 0.05nm.

Prod #	Description	Unit	Price	Order / Quote
628	PELCO® AFM Tip and Resolution Test Specimen, Unmounted	each	$145.00	Qty:
628-AFM	PELCO® AFM Tip and Resolution Test Specimen, Mount AFM	each	155.00	Qty:

TipChecker for AFM probes When imaging a sample by AFM, it is imperative to know the condition of the AFM probe, since this determines the quality and correctness of the image. The TipChecker is an SPM sample for fast, convenient and efficient determination of the AFM tip condition. The clear differences between the tips becomes apparent even with a single scan line. The TipChecker offers a fast and easy way to compare and categorize different AFM tips with respect to tip apex, shape and sharpness. The TipChecker sample enables checking if the tip is still good, starts showing wear or is blunted or broken without the need for scanning an entire image or using SEM inspection. The Tipchecker sample works perfectly with Auto Tip Qualification and Tip Characterization software that is available on the market.
good tip	worn tip	blunt or broken
Figures showing a comparison between different AFM probe tips used to image the TipChecker sample. Scan is 1x1µm for all images, height is 100nm. Each image is shown with a representative cross-section scan. The BudgetSensors TipChecker sample consists of an extremely wear-resistant thin film coating deposited on a silicon chip. The thin film coating shows a granular, sharply peaked nanostructure ideal for reversely imaging an AFM probe's apex. The die size of the BudgetSensors TipChecker is 5x5mm and comes glued onto a 12mm diameter, stainless steel, magnetic disc, ready to be placed into your AFM set. Prod # Description Unit Price Order / Quote TC1 BudgetSensors TipChecker for AFM probes each $180.00 Qty:
Diagrams showing construction and patterns.	HS-Series AFM Calibration Standards Step heights of 20, 100 or 500nm. The HS-series calibration standards offers an easy and reliable way to calibrate AFM systems. Primarily designed for accurate Z-axis calibration the standards also offer X- and Y-axis calibration for bigger scanners in the 40-100um range. The structure symmetry enables calibration without the need to rotate and re-align the sample in between x- and Y-axis calibration. The HS-series feature silicondioxide structure arrays on a 5x5mm silicon chip. The fabrication process ensures excellent uniformity of the structures across the chip. There are three step heights available with nominal values of: 20nm, 100nm, and 500nm. The actual value will be supplied with the delivered calibration standard. Arrays of structures with different shape and pitch are integrated on the chip. The larger square of 1 x 1mm contains square pillars and holes with a 10um pitch. The smaller center square of 500 x 500um contains circular pillars and holes as well as lines in both X- and Y-direction with a 5um pitch. The silicon chip is mounted on a 12mm standard AFM disc using a high quality electrically conductive epoxy.
Prod # Description Unit Price Order / Quote HS-20MG AFM Calibration Standard, step height 20nm each $200.00 Qty: HS-100MG AFM Calibration Standard, step height 100nm each 200.00 Qty: HS-500MG AFM Calibration Standard, step height 500nm each 200.00 Qty: go to BudgetSensors AFM Probes