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Critical Dimension (CD)
Calibration Test Specimen

for SEM, Scanning Electron Microscopy

critical dimension specimen

see mount selections, types A-M

"Critical Dimension (CD) structure 1-2-5-10µm", is particularly useful for SEM / FIB magnification calibration and may be used for AFM

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480µm around its edges, helpful for orientation.

The central area comprises four line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch: 1.0µm, 2.0µm, 5.0µm and 10.0µm. The central line structure area may be used for AFM measurements. The patterns are etched into Si, approximately 200nm deep. The patterns are therefore slightly lower than the Si surface. There is no coating on the Si surface.

Each standard is identified by a serial number.

Two 618 types are offered:

-1: Non-certified (batch measurement protocol)
-3: Certified by the German Physikalisch-Technische Bundesanstalt ("PTB")

Ordering Information:

Prod # Description Unit Price Order / Quote

Unmounted

618-1
CD Structure 1-2-5-10µm Specimen, non-certified, unmounted
each
$67.50

Qty:

618-3
CD Structure 1-2-5-10µm Specimen, certified traceable by German Physikalische Technical Bundesanstalt, unmounted
each
864.50

Qty:

Mounted, Non-certified: (see mount selections, types A-M )

618-1A
CD Structure 1-2-5-10µm Specimen, non-certified, Mount A
each
74.60

Qty:

618-1B
CD Structure 1-2-5-10µm Specimen, non-certified, Mount B
each
74.60

Qty:

618-1C
CD Structure 1-2-5-10µm Specimen, non-certified, Mount C
each
74.60

Qty:

618-1D
CD Structure 1-2-5-10µm Specimen, non-certified, Mount D
each
74.60

Qty:

618-1E
CD Structure 1-2-5-10µm Specimen, non-certified, Mount E
each
74.60

Qty:

618-1G
CD Structure 1-2-5-10µm Specimen, non-certified, Mount G, You Supply Mount
each
174.60

Qty:

618-1K
CD Structure 1-2-5-10µm Specimen, non-certified, Mount K
each
74.60

Qty:

618-1L
CD Structure 1-2-5-10µm Specimen, non-certified, Mount L
each
74.60

Qty:

618-1M
CD Structure 1-2-5-10µm Specimen, non-certified, Mount M
each
74.60

Qty:

Mounted, Certified by the German Physikalische Technische Bundesanstalt (see mount selections, types A-M )

618-3A
CD Structure 1-2-5-10µm Spec., Certified, Mount A
each
884.50

Qty:

618-3B
CD Structure 1-2-5-10µm Spec., Certified, Mount B
each
884.50

Qty:

618-3C
CD Structure 1-2-5-10µm Spec., Certified, Mount C
each
884.50

Qty:

618-3D
CD Structure 1-2-5-10µm Spec., Certified, Mount D
each
884.50

Qty:

618-3E
CD Structure 1-2-5-10µm Spec., Certified, Mount E
each
884.50

Qty:

618-3G
CD Structure 1-2-5-10µm Spec., Certified, Mount G, You Supply Mount
each
982.50

Qty:

618-3K
CD Structure 1-2-5-10µm Spec., Certified, Mount K
each
884.50

Qty:

618-3L
CD Structure 1-2-5-10µm Spec., Certified, Mount L
each
884.50

Qty:

618-3M
CD Structure 1-2-5-10µm Spec., Certified, Mount M
each
884.50

Qty:

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Critical Dimension (CD) Calibration Test Specimen

Critical Dimension (CD)
Calibration Test Specimen