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Kimball Lanthanum Hexaboride (LaB6) Cathodes
for Electron Microscopes
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The Kimball Physics ES-423E (Extended Life) Lanthanum Hexaboride Cathode
is a high performance, resistively heated, thermionic electron source.
It is currently used in many electron optical systems: SEM's, TEM's, microprobes,
electron lithography systems, etc. This superior LaB6
source gives a greater brightness (higher current density), lower energy spread (better resolution) and a longer lifetime
than standard tungsten filaments. Lifetimes in excess of 6 months of
continuous operation are regularly achieved in commercial SEM's and TEM's with
suitable gun vacuum (10-7 torr or better). The standard emitter is a
15µm diameter <100> oriented single crystal surface mounted on the end
of a single piece, stress-free, carbon heater rod, held in place
by a carbon ferrule. The single piece carbon heater rod has a precision
machined 100µm slot along the axis to direct the heating current;
the result is no high temperature carrying high temperature joints. The design
together with a high degree of symmetry keeps mechanical movements
small which results in increased stability. The small physical size fits most
Wehnelt cylinders with ease. Another advantage of the Kimball Physics
LaB6 cathode is the reduced material
loss which means less Wehnelt contamination; again this results in greater stability
compared to other types of LaB6 cathodes.
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For use in:
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Featuring: Extended lifetime
Designed with built-in stability
High brightness/low energy spread
Accurate microflats
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| AEI/Leica/Zeiss EVO | AMRAY | FEI/Philips | ZEISS/Tescan |
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| Hitachi S | Jeol K | ISI/ABT/Topcon | ETEC |
