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Calibration Overview
TEM Calibration

Scanning Electron Microscopy Calibration

Magnification | EDS/WDS/EPMA/XPS | Resolution | Performance Testing

Magnification and FIB Standards
metrochip
MetroChip Microscope Calibration Target for SEM/AFM/SPM
silicon test specimen
Pelcotec™ CDMS Critical Dimension Magnification Standards
silicon test specimen Pelcotec™ G-1 Silicon
Calibration Specimen
1µm Pitch
LMS-20
Pelcotec™ LMS-20
Low Magnification
Calibration Standard
metrochip
MRS-6 Magnification Reference Standard
1,500X to 1,000,000X
metrochip
Critical Dimension (CD) Calibration Test Specimen for SEM/FIB/AFM
silicon test specimen
2D Holographic Array Very High Resolution Calibration Standards for SEM, FIB, AFM and Auger

Low-Mag Calibration Ruler
Low Magnification
Calibration Ruler

metrochip
MRS-4 Magnification Reference Standard
10X to 200,000X
silicon test specimen
Planotec 10µm Pitch Silicon
Calibration Specimen
silicon test specimen
292nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger
waffle grating replica
500nm Cross Line
Grating Replica
metrochip
MRS-3 Magnification Reference Standard
10X to 50,000X
metrochip
Planotec 10µm Pitch Silicon
Calibration Specimen
silicon test specimen
145nm Pitch High Magnification Calibration Standard for SEM, FIB, AFM, Auger
agar copper mesh grids
Fine Copper Mesh Grid Low Magnification Standard

X-Ray Microanalysis Standards (EDS/WDS/EPMA/XPS)
UHV
UHV-EL Reference
Standards for EDS/WDS
metrochip
PELCO® XCS EDS Calibration Standards
silicon test specimen
X-CHECKER™ X-Ray Reference Calibration for SEM
agar copper mesh grids
PELCO® Faraday Cup
NiOx test specimen for AEMPELCO® NiOx Test Specimen for Analytical Electron Microscopy (AEM) Planotec GSR
Planotec GSR & Particle Analysis Calibration Kit
   

Resolution Standards
ausome
AuSome™ Resolution Standard for SEM, FIB and FESEM
gold on carbon test specimen
Gold on Carbon
High Resolution Test Specimens
tin on carbon test specimen
Tin on Carbon Resolution Test Specimens
low magnification test specimen
Low Magnifcation Resolution Test Specimens

Performance Testing
back scattered test specimens
Back Scattered Electron Test Specimens
demonstration specimens
JN-1 SEM Demonstration Specimens
astigmatism corrector
PELCO® Astigmatism Corrector