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UHV-EL Reference Standards
for EDS/WDS

uhv-el reference standard for eds/wds

Ultra High Vacuum Compatible
Micro and Macro Analysis
Standard for Surface and X-ray Analysis

UHV (ultrahigh vacuum) compatible (10 ^-10 torr)
Suitable for spectral and intensity references for EDS, WDS, EPMA, Auger, XPS, ESCA, etc.
Custom and standard reference material configurations
Rectangular or circular retainers holding from 6 to 37 reference standards
Retainers machined from SS304
Custom mounting bases available
Each reference standard is individually and separately:
prepared from bulk or powdered materials, polished with the most suitable method, and can easily be removed or reinserted into the retainer

Analysis accuracies of 1-2% (relative) are possible only when appropriate standards are used. UHV systems cannot accept commonly available standard sets because of outgassing of mount materials and degradation from electron beam heating. The use of bakelite, plastic or epoxy embedded standards under UHV conditions have prevented accurate analysis. These inaccuracies are caused by compromised vacuum levels and contaminated reference standards. Also, standardless techniques give no indication that some elements may not be accounted for or are present in an oxide phase.

Reference standards supplied with the UHV-EL, which contain only UHV compatible materials, can be used to characterize the transmission of the electron energy analyzer, determine peak shapes, resolution, energies and sensitivity factors.

Since generalized sensitivity factors cannot be used with a reasonable degree of accuracy, even for the same instrument model, it is necessary for these factors to be determined for each unique instrument, on a continuing basis. Conditions will change over time because of peak shift, amplifier settings and spectrometer tolerances.

Design
The retainer is precision machined by numerically controlled tools from stainless steel 304. The round UHV-EL-37 is laser engraved to assist in locating the desired reference standard using electron or optical imaging. All reference standards are precisely referenced within 0.13mm of the top surface. This recess protects the reference standard surfaces from contamination and scratching and also minimizes the possibility of X-ray fluorescence from the retainer. The reference standards, which are of various thicknesses, are retained by SS304 clips which are inserted from the bottom of the mount.

Reference standards are individually sized and polished according to the properties of the material. Cross contamination and smearing is avoided.

If a reference standard surface gets roughened from excessive ion beam sputtering or is too highly oxidized, it can be easily removed and replaced in your laboratory. Tools and clips are provided. If bulk materials are not available for some reference standards, powders are used. They are consolidated with silver flake and the powder grains metallographically polished. Many insulators prepared this way are sufficiently conductive for X-ray and Auger analysis without carbon coating. The silver can be used for reference when determining sensitivity factors.

Custom Preparation
Your materials may be inserted into one of the retainers described using careful techniques. For electron beam X-ray techniques, reference standards, which are charge sensitive, can be carbon coated.

Shipping
UHV-EL-37 circular retainer reference standards are shipped in a VACU-STORR container. It is optional for other configurations or custom orders.

Retainers

For Configuration, designate Retainer Style and reference standard locations and numbers:
Use the submit form

or print out the PDF form and fill in the numbers in the actual spaces for the desired elements/compounds and fax it to us at: 530-243-3761.

See below for a list of elements and compounds and their respective order numbers.

25mm diameter
UHV-EL-37
Rectangular Retainers

Prod # Description Unit Price Order / Quote

UHV-EL Retainers Without Standards

6065
UHV-EL Rectangular Retainer, 8.5 x 12.5mm, 6 spaces
each
$130.00

Qty:

6066
UHV-EL Square Retainer, 12.5 x 12.5mm, 9 spaces
each
165.00

Qty:

6067
UHV-EL Rectangular Retainer, 16.5 x 12.5mm, 12 spaces
each
200.00

Qty:

6068
UHV-EL Rectangular Retainer, 19.5 x 12.5mm, 15 spaces
each
210.00

Qty:

6069
UHV-EL Rectangular Retainer, 24 x 12.5mm, 18 spaces
each
240.00

Qty:

6070
UHV-EL Round Retainer, 25mm diameter, 37 spaces
each
375.00

Qty:

UHV-EL Single Reference Standards (3mm dia.) for Retainers

6060
UHV-EL - Any Single Reference Standard other than Diamond, Cu/Au, Ag/Au or Al/Cu (specify number from list)
each
105.00

Qty:

6061
Diamond UHV-EL Single Reference Standard, (No. 168 on list)
each
140.00

Qty:

6062
Cu/Au UHV-EL Single Reference Standard, SRM482, 5 wires (No. 197 on list)
each
200.00

Qty:

6063
Al/Cu UHV-EL Single Reference Standard (No. 230 on list)
each
140.00

Qty:

6091
Ag/Au UHV-EL Single Reference Standard, SRM481, 6 wires (No. 197A on list)
each
200.00

Qty:

6064
Faraday Cup for UHV-EL to measure beam current
each
100.00

Qty:

UHV-EL Retainers Complete With Reference Standards

6075
UHV-EL Rectangular Retainer, 8.5 x 12.5mm, with 6 reference standards (select from list)
each
620.00

Qty:

6076
UHV-EL Square Retainer, 12.5 x 12.5mm, with 9 reference standards (select from list)
each
905.00

Qty:

6077
UHV-EL Rectangular Retainer, 16.5 x 12.5mm, with 12 reference standards (select from list)
each
1,190.00

Qty:

6078
UHV-EL Rectangular Retainer, 19.5 x 12.5mm, with 15 reference standards (select from list)
each
1,470.00

Qty:

6079
UHV-EL Rectangular Retainer, 24 x 12.5mm, with 18 reference standards (select from list)
each
1,750.00

Qty:

6080
UHV-EL Round Retainer, 25mm diameter, with 37 reference standards (select from list)
each
P.O.R.

Qty:

6081
UHV-EL Round Retainer, 25mm diameter, Standard Configuration with 37 reference standards
each
P.O.R.

Qty:

Standard Configuration for Round Retainer

Round UHV-EL Retainer can be ordered in Standard or Custom Configuration
The Standard Configuration is shown to the left. A custom configuration requires that details be given regarding the elements chosen and the configuration (a "blank" Custom Round Retainer is shown for ordering - please print out and fill in exactly as needed).

Note: For Custom Configuration designate reference standard locations and numbers: Use the submit form
or print out the PDF form and fill in the numbers in the actual spaces for the desired elements/compounds and fax it to us at: 530-243-3761.
See below for a list of elements and compounds, preceded by their respective order numbers.

Reference Standards for UHV-EL Retainers

Abbreviations

M	natural mineral
Opt	optical crystal
P	powder: mixed with either Ag or Sn (for S containing materials)
TF	thin film on silicon wafer
VD	vapor deposit (CVD, LPCVD, etc.)
B	bulk material
C	crystalline
EM	end member mineral
F	foil
HP	hot pressed
"+"	higher purity
*Purity	"N" is the # of "9"'s. 5N stands for 99.999% pure, 2N5 is 99.5% pure

Element/Compound		Symbol	Form	Purity
1.	Aluminum	Al	F	3N
1A.	Aluminum Carbide	Al4C3	P	4N
2.	Aluminum Fluoride	AlF3	P	2N5
3.	Aluminum Oxide	Al2O3	C	4N
4.	Aluminum Nitride	AlN	P	2N+
5.	Antimony	Sb	B	2N
6.	Barium Fluoride	BaF2	C	2N+
7.	Barrium Sulfate	BaSO4	P	3N
8.	Barium Titanate	BaTi4O9	HP	2N5
9.	Barium Titanate	BaTiO3	P	5N
10.	Beryllium	Be	F	3N
11.	Bismuth	Bi	B	2N8
12.	Bismuth Oxide	Bi2O3	P	2N5
12A.	Bismuth Telluride	Bi2Te3	B	2N
13.	Boron	B	P	1N75
14.	Boron Carbide	B4C	P	5N
15.	Boron Nitride	BN	B	4N
16.	Boron Phosphide	BP	P	3N
17.	Cadmium	Cd	F	Opt
17A.	Cadmium Sulfide	CdS	P	3N
18.	Calcium Carbonate	CaCO3	C	3N+
19.	Calcium Fluoride	CaF2	C	3N
20.	Carbon (Pyrolytic)	C	CVD	5N
21.	Carbon (Diamond)	C	C	4N7
22.	Cerium Oxide	CeO2	P	2N5
23.	Cesium Iodide	CsI	O	2N
23A.	Cesium Bromide	CsBr	P	3N
24.	Chromium	Cr	P	4N6
24A.	Chromium Carbide	Cr3C2	P	2N5
25.	Chromium Nitride	Cr2N	P	2N5
26.	Chromium Oxide	Cr2O3	HP	5N
27.	Cobalt	Co	F	5N
28.	Cobalt Oxide	Co3O4	P	3N
29.	Cobalt Silicide	CoSi2	P	2N
30.	Copper	Cu	F	2N
31.	Cupric Oxide	CuO	P	3N
32.	Cuprous Oxide	Cu2O	EM	3N
33.	Copper Sulfide	CuS	M	3N
34.	Copper Sulfide	Cu2S	M	2N+
35.	Dysprosium	Dy	F	4N
36.	Erbium	ER	F	5N
37.	Europium Oxide	Eu2O3	HP	3N
38.	Gadolinium	Gd	F	5N
39.	Gallium Arsenide	GaAs	C	5N
40.	Gallium Nitride	GaN	P	3N
41.	Gallium Phosphide	GaP	P	2N5
42.	Gallium Antimonide	GaSb	P	2N5
43.	Germanium	Ge	B	2N
44.	Germanium Oxide	GeO	P	2N5
45.	Gold	Au	F	3N
46.	Hafnium	Hf	F	3N
46A.	Hafnium Boride	HfB2	P	4N7
47.	Hafnium Carbide	HfC	B	6N
47A.	Hafnium Nitride	HfN	P	2N5
47B.	Hafnium Oxide	HfO2	P	3N
48.	Holmium	Ho	B	3N
49.	Indium	In	F	3N
50.	Indium Arsenide	InAs	C	?
51.	Indium Phosphide	InP	C	5N
52.	Indium Antimonide	InSb	P	3N
52A.	Indium Tin Oxide 10% In. Inhomogenous	ITO	P	3N
53.	Iridium	Ir	F	3N
54.	Iron	Fe	P	3N
54A.	Iron Carbide	Fe3C	F	3N
55.	Iron Fluoride	FeF2	F	3N
56.	Iron Fluoride	FeF3	P	3N
57.	Iron Nitride	Fe3N	P	2N5
58.	Iron Oxide	FeO	P	3N
59.	Iron Oxide	Fe2O3	P	5N
60.	Iron Oxide	Fe3O4	EM	5N
61.	Iron Phosphide	FeP	EM	3N
62.	Iron Sulfide	FeS2	P	3N
63.	Lead	Pb	P	Opt
64.	Lead Oxide	PbO	F	2N8
65.	Lead Sulfide	PbS	P	Opt
66.	Lanthanum Hexaboride	LaB6	P	3N5
67.	Lanthanum Oxide	LaB6	C	3N
68.	Lithium Fluoride	LiF	P	4N
69.	Magnesium	Mg	C	3N
70.	Magnesium Fluoride	MgF2	F	3N
71.	Magnesium Oxide	MgO	C	4N
72.	Manganese	Mn	C	3N
73.	Manganese Sulfide	MnS	B	2N5
74.	Manganese Oxide	MnO2	P	?
75.	Mercury Sulfide	HgS	P	4N5
75A.	Mercury Iodide	HgI2	P	2N+
76.	Molybdenum	Mo	C	4N

Element/Compound		Symbol	Form	Purity
77.	Molybdenum Carbide	Mo2C	F	4N8
78.	Molybdenum Silicide	MoSi2	HP	3N
79.	Molybdenum Oxide	MoO3	P	2N5
81.	Osmium	Os	P	2N
81A.	Neodymium Fluoride	NdF2	F	3N
81B.	Neodymium	Nd	P	2N8
82.	Nickel	Ni	C	2N5
82A.	Nickel Aluminide	NiAl	F	Opt
83.	Nickel Oxide	NiO	F	3N5
84.	Nickel Phosphide	Ni2P	P	3N
85.	Nickel Silicide	NiSi2	P	3N
86.	Niobium	Nb	P	Opt
87.	Niobium Carbide	NbC	P	2N5
88.	Niobium Oxide	Nb2O5	HP	4N
89.	Palladium	Pd	P	3N
90.	Platinum	Pt	F	4N
91.	Potassium Bromide	KBr	F	4N
92.	Potassium Chloride	KCl	C	3N5
93.	Potassium Iodide	KI	C	3N
93A.	Praeseodymium Fluoride	PrF3	C	3N8
94.	Rhenium	Re	HP	3N
95.	Rhenium Oxide	ReO3	F	3N
96.	Rhodium	Rh	P	3N
97.	Rubidium Chloride	RbCl	F	3N
97A.	Rubidium Iodide	RbI	P	2N7
98.	Ruthenium	Ru	P	2N8
99.	Samarium	Sm	P	3N5
100.	Scandium	Sc	F	4N8
101.	Selenium	Se	C	3N
102.	Silicon	Si	C	Opt
103.	Silicon Carbide	Si	CVD	Opt
104.	Silicon Dioxide	SiO2	EM	2N5
105.	1000Å/Silicon	SiO2	TF	3N5
106.	Silicon Nitride	Si3N4	HP	2N
107.	468Å/Silicon	Si3N4	TF	2N5
108.	Silver	Ag	F	3N5
109.	Silver Chloride	AgCl	C	5N
109A.	Silver Oxide	Ag2O	P	3N
110.	Silver Sulfide	Ag2S	C	?
111.	Sodium Chloride	NaCl	C	2N5
112.	Sodium Fluoride	NaF	C	5N
113.	Strontium Fluoride	SrF2	P	3N
113A.	Strontium Oxide	SrO	P	2N5
114.	Tantalum	Ta	F	3N
115.	Tantalum Carbide	TaC	HP	3N
116.	Tantalum Nitride	TaN	P	4N8
117.	Tantalum Oxide	Ta2O5	P	1N8
118.	Tantalum Oxide	Ta2O5	TF	2N8
119.	1000Å/Ta			2N5
120.	Tantalum Silicide	TaSi2	P	2N5
121.	Tellurium	Te	B	2N
122.	Terbium	Tb	F	2N5
123.	Thallium Chloride	TlCl	P	3N8
124.	Thorium Oxide	ThO2	P	2N5
125.	Thulium	Tm	F	2N5
126.	Tin	Sn	F	2N5
127.	Tin Oxide	SnO2	EM	2N5
128.	Titanium	Ti	F	2N7
128A.	Titanium Al Carbide	Ti2AlC	HP	2N5
129.	Titanium Carbide	TiC	HP	2N5
130.	Titanium Diboride	TiB2	HP	2N5
131.	Titanium Dioxide	TiO2	EM	2N5
132.	Titanium Nitride	TiN	P	4N5
132A.	Titanium Oxide	TiO	HP	3N
133.	Titanium Silicide	TiSi2	P	3N
134.	Tungsten	W	F	4N
135.	Tungsten Carbide	WC	HP	4N8
136.	Tungsten Nitride	WN	P	3N
137.	Tungsten Oxide	WO3	P	2N+
138.	Tungsten Silicide	WSi2	P	Opt
139.	Uranium 238 *Note: partially oxidized	U	F	4N
140.	Vanadium	V	F	2N5
141.	Vanadium Carbide	VC	HP	4N
141A.	Vandium Nitride	VN	HP	2N5
142.	Vanadium Oxide	V2O5	P	4N
142A.	YtterbIum	Yb	F	3N
143.	Yttrium	Y	F	3N
143A.	Yag	YALO	C	?
144.	Yttrium Oxide	Y2O3	P	4N
145.	Zinc	Zn	F	4N8
146.	Zinc Oxide	ZnO	HP	?
147.	Zinc Selenide	ZnSe	C	?
148.	Zinc Sulfide	ZnSe	C	?
149.	Zirconium	Zr	F	2N8
150	Zirconium Carbide	ZrC	HP	?
150A	Zirconium Nitride	ZrN	P	2N5
151	Zirconium Oxide	ZrO2	C	2N7

Mineral		Formula (approximate)
152.	Acanthite	Ag2S
153.	Albite	NaAlSi3O8
154.	Almandine	Fe3²⁺Al2(SiO4)3
155.	Andradite	Ca3Fe2³⁺(SiO4)3
156.	Anorthite	CaAl2Si2O8
157.	Barite	BaSO4
158.	Benitoite	BaTiSi3O9
159.	Biotite (black mica)	K(Mg,Fe²⁺)3(Al,Fe³⁺)Si3O10(OH,F)2
160.	Bytownite	(Na, Ca)Al(Al,Si)Si2O8
161.	Calcium Caronate	CaCO3
162.	Cassiterite	SnO2
163.	Chalcocite	Cu2S
164.	Cinnabar	HgS
165.	Chrysoberyl	BeAl2O4
166.	Covellite	CuS
167.	Cuprite	Cu2O
168.	Diamond (additional cost)	C (cleaved ~1mm)

Mineral		Formula (approximate)
169.	Diopside	CaMgSi2O6
170.	Dolomite	CaMg(CO3)2
170A.	Fayalite	Fe2²⁺SiO4
171.	Fluorapatite	Ca5(PO4)3F
172.	Forsterite	Mg2SiO4
173.	Hematite	Fe2O3
174.	Hornblende (Amphibole)	Ca2(Mg,Fe²⁺)4Al(Si7Al)O22(OH,F)2
175.	Kyanite	Al2O3.SiO2
176.	Magnetite	Fe3O4
177.	Orthoclase	K2O.Al2O3.6SiO2
178.	Quartz	SiO2
179.	Rutile	TiO2
180.	Sodalite	Na4(AlCl)Al2(SiO4)3
181.	Spinel	MgAl2O4
182.	Willemite (Troosite)	Zn2SiO4
183.	Wollastonite	CaSiO3

Note: electron probe compositions provided upon request or with standard.

SRM# National Institute of Standards & Technology (formerly NBS) Please see note below regarding alloys.
Glasses		B2O3	Na2O	MgO	Al2O3	SiO2	Cl	K2O	CaO	TiO2	V2O5	Cr2O3	MnO2	Fe2O3	ZrO2	PbO	Bi2O3	BaO	ZnO	CoO	CuO
184.	612		14.0		2.0	72.0			12.0		+50 ppm of 51 other elements
185.	93a	12.5	3.9		2.2	80.8	.06	.01	.01	.01				.028	.04
186.	K252					40.0							5.0					35.0	10.0	5.0	5.0
187.	K229					30.0										70.0
188.	K326	30.0	2.0	30.1		29.9			8.0
189.	K309				15.0	40.0			15.0					15.0				15.0

Ti Alloys		Fe	C	Mn	P	S	Si	Cu	Zn	Pb	Sn	Ni	Cr	V	Mo	Ti	As	W	Zr	Nb	Ta	Al	Co
190.	654b	.23					.045	.004			.023	.028	.025	4.31	.013	88.05			.008			6.34
191.	1128	.134	.011								3.04		2.96	15.13		75.64						3.06
Miscellaneous NIST Standards
192.	1104	.088			.005			61.33	35.31	2.77	.43	.07
193.	1108	.044		.0025				64.9	34.4	0.06	.39	.033
194.	1110	.033						84.5	15.2	0.03	.051	.053
195.	1230	Bal	.044	.64	.023	.0007	.43	.14				2.42	14.8	.23	1.18	2.12						.24	.15
195A.	1243	.79	.024	.019	.003	.0018	.018	.007				58.78	19.20	.12	4.25	3.06			.053			1.23	12.46
196.	C2402	7.3	.01	.64	.007	.018	.85	.19				51.5	16.15	.22	17.1			4.29					1.5
197.	SRM-482 5 wires in one 3mm ø mount. Cu:Au (20:80, 40:60, 60:40, 80:20) + pure Cu (additional cost)
197A.	SRM-481 6 wires in one 3mm ø mount. Ag:Au (pure Ag, pure Au, 20:80, 40:60, 60:40, 80:20) (additional cost)
Steels		Fe	C	Mn	P	S	Si	Cu	Zn	Pb	Sn	Ni	Cr	V	Mo	Ti	As	W	Zr	Nb	Ta	Al	Co
198.	461	Bal	.15	.36	.053	.019	.047	.34		.003	.022	1.73	.13	.024	.3	.01	.028	.01	<.005	.011	.002	.005	.26
199.	462	Bal	.40	.94	.045	.019	.28	.20		.006	.066	.70	.74	.058	.08	.037	.046	.053	.063	.096	.036	.02	.10
200.	464	Bal	.54	1.32	.017	.021	.48	.094		.02	.043	.13	.078	.29	.029	.004	.018	.022	.01	.037	.069	.005	.02
201.	465	Bal	.037	.032	.008	.01	.029	.019		<.0005	.001	.026	.004	.002	.005	.20	.01	.001	.002	.001	.001	.19	.08
202.	466	Bal	.065	.11	.012	.009	.025	.033		.001	.005	.051	.011	.007	.011	.057	.014	.006	<.005	.005	.002	.01	.04
203.	467	Bal	.11	.23	.003	.009	.26	.067		.000	.1	.088	.036	.041	.021	.26	.14	.20	.094	.29	.23	.16	.07
204.	468	Bal	.26	.47	.023	.02	.075	.26		<.0005	.009	1.03	.54	.17	.20	.011	.008	.077	<.005	.006	.005	.04	.16
205.	661	Bal	.39	.66	.015	.015	.223	.042			.01	1.99	.69	.011	.19	.02	.017	.01	.009	.22	.02	.02	.03
206.	663	Bal	.57	1.50	.02	.005	.74	.09		.0022		.32	1.31	.31	.30	.05	.01	.04	.05	.049		.24	.05
207.	664	Bal	.87	.25	.01	.025	.066	.25		.024		.14	.06	.10	.49	.23	.05	.10	.069	.15	.11		.15
208.	665	Bal	.008	.0057	.002	.0059	.008	.0058				.041	.007	.0006	.005	.0006	.002						.01
209.	1761	Bal	1.03	.68	.043	.033	.19
210.	1762	Bal	.034	2.03	.036	.03	.36
211.	1763	Bal	.20	1.59	.012	.022	.65
212.	1764	Bal	.59	1.22	.023	.012	.06
213.	1765	Bal	.006	.14	.007	.004	.005
214.	1766	Bal	.015	.06	.004	.002	.01
215.	1767	Bal	.051	.02	.005	.009	.02
216.	1768	Bal	.001	.014	.0013	.0003		.0006				.0014										.002	.002

Alloys- Certified by a group of laboratories, NIST traceable. Analysis provided with each alloy purchased.
Stainless Steels		Low Alloy		Nickel/Cobalt		Copper/Brass/Bronze
+ High Temperature		+ Specialty
217.	AISI 303	233.	C-4140	242.	Inco 600	249.	CDA 360
218.	AISI 304	234.	C-4340	243.	Inco 625	250.	CDA 510
219.	AISI 316	235.	C-8620	244.	Inco 718	251.	CDA 655
220.	AISI 321	236.	Tool Steel A-6	245.	Inco 800	252.	CDA 857
221.	AISI 410	237.	Tool Steel D-2	246.	Hastelloy C-22
222.	AISI 440C	238.	Tool Steel H-13	247.	Hastelloy C-276
223.	PH13-8MO	239.	Tool Steel M-2	248.	Hastelloy X
224.	15-5 PH	240.	2-Cr-lMo (36a)
225.	17-4PH	241.	9-Cr-lMo (38a)
226.	CARP 20CB3
227.	Maraging 300
228.	HK-40

Miscellaneous Standards:
229.	BPSG (not a NIST standard), 4% P, 3.3% B.
230.	Al-Cu: NIST traceable standard for energy dispersive x-ray detector calibration (additional cost).
231.	C-Cu-Ag: Standard for electron backscattering adjustment. Used for gun shot residue calibration
232.	GSR- Gun shot residue: mixture of Ba, Sb, Pb particles in epoxy and carbon coated.
Faraday Cup, for beam current measurement, is available for all of the retainers and will take one of the spaces.
PLEASE READ CAREFULLY! The metal alloys on this list cannot be assumed to be homogenous at the micrometer scale. If you intend to use ZAF corrections electron beam excited x-ray analysis (wavelength or energy dispersive) the sample volume must be homogenous within the electron excited volume. It is a misuse to use these metal alloys for bulk quantitative analyses. Nevertheless, they are useful for comparison purposes (in a least square sense) to compare against unknown materials. Every effort is made to insure that cutting, grinding, and polishing of the materials do not alter their composition. If you do not see a standard on the list that you would like, please contact us for availability. We can also prepare your materials for our mounts.

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UHV-EL Reference Standardsfor EDS/WDS

Ultra High Vacuum Compatible Micro and Macro AnalysisStandard for Surface and X-ray Analysis

Retainers

Round UHV-EL Retainer can be ordered in Standard or Custom Configuration

Reference Standards for UHV-EL Retainers

UHV-EL Reference Standards
for EDS/WDS

Ultra High Vacuum Compatible
Micro and Macro Analysis
Standard for Surface and X-ray Analysis