High Magnification, High Resolution Calibration Reference
and Traceable Standard for SEM, AFM, Auger, and FIB

A precision, holographic pattern featuring high accuracy, usability and stability. This specimen provides excellent contrast in back-scatter as well as secondary electron imaging. Its moderate ridge height makes it convenient for AFM. It provides accurate calibration for high resolution, nanometer-scale measurements.

Period: 292 nm pitch, one-dimensional grating. Accurate to +/- 1% (3 standard deviations). Surface: Titanium lines on silicon wafer, 3 x 4mm. Line height (about 30 nm) and line width (about 130 nm) are not calibrated. Characteristics: High contrast, excellent edge definition. Use SEM beam voltages from under 1 kV to 30 kV. Useful from 5,000x to over 200,000x. In AFM, use in contact, tapping and other modes with image sizes from 500nm to 20nm. In Auger and Focused Ion Beam (FIB), use similar conditions as for SEM. Available mounted or unmounted to accommodate all SEM stages. Available mounted on 12 mm steel discs for AFM use. Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. The calibration reference comes with a non-traceable, manufacturer's certificate. This states the average period, based on batch measurements. The Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technische Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically +/- 2 nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision.

Prod #	Description	Unit	Price	Order / Quote
SEM Reference Standards, non-certified, unmounted and mounted:
643-1	300nm High Resolution SEM Reference Standard, Unmounted	each	$1,124.00	Qty:
643-1A	300nm High Resolution SEM Reference Standard on Mount A	each	1,100.00	Qty:
643-1B	300nm High Resolution SEM Reference Standard on Mount B	each	1,236.00	Qty:
643-1C	300nm High Resolution SEM Reference Standard on Mount C	each	1,236.00	Qty:
643-1D	300nm High Resolution SEM Reference Standard on Mount D	each	1,236.00	Qty:
643-1E	300nm High Resolution SEM Reference Standard on Mount E	each	1,236.00	Qty:
643-1G	300nm High Resolution SEM Reference Standard, You Supply Mount	each	1,236.00	Qty:
643-1K	300nm High Resolution SEM Reference Standard on Mount K	each	1,236.00	Qty:
643-1L	300nm High Resolution SEM Reference Standard on Mount L	each	1,236.00	Qty:
643-1M	300nm High Resolution SEM Reference Standard on Mount M	each	1,236.00	Qty:
643-1O	300nm High Resolution SEM Reference Standard on Mount O	each	1,100.00	Qty:
643-1P	300nm High Resolution SEM Reference Standard on Mount P	each	1,100.00	Qty:
AFM Reference Standard, non-certified, mounted on disk:
643-1AFM	300nm High Resolution AFM Reference Standard on 12mm steel disk, non-certified	each	1,100.00	Qty:
SEM Reference Standards, Certified Traceable, Calibration Certificate Provided, unmounted and mounted:
643-11	300nm High Resolution SEM Reference Standard, Certified, unmounted	each	P.O.R.	Qty:
643-11A	300nm High Resolution SEM Reference Standard, Certified, on Mount A	each	P.O.R.	Qty:
643-11B	300nm High Resolution SEM Reference Standard, Certified, on Mount B	each	P.O.R.	Qty:
643-11C	300nm High Resolution SEM Reference Standard, Certified, on Mount C	each	P.O.R.	Qty:
643-11D	300nm High Resolution SEM Reference Standard, Certified, on Mount D	each	P.O.R.	Qty:
643-11E	300nm High Resolution SEM Reference Standard, Certified, on Mount E	each	P.O.R.	Qty:
643-11G	300nm High Resolution SEM Reference Standard, Certified, You Supply Mount	each	P.O.R.	Qty:
643-11K	300nm High Resolution SEM Reference Standard, Certified, on Mount K	each	P.O.R.	Qty:
643-11L	300nm High Resolution SEM Reference Standard, Certified, on Mount L	each	P.O.R.	Qty:
643-11M	300nm High Resolution SEM Reference Standard, Certified, on Mount M	each	P.O.R.	Qty:
643-11O	300nm High Resolution SEM Reference Standard, Certified, on Mount O	each	P.O.R.	Qty:
643-11P	300nm High Resolution SEM Reference Standard, Certified, on Mount P	each	P.O.R.	Qty:
AFM Reference Standard, Certified Traceable, Calibration Certificate Provided, mounted on disk:
643-11AFM	300nm High Resolution AFM Reference Standard on 12mm steel disk, Certified	each	P.O.R.	Qty:

see mounts for detailed description
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