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Scanning electron microscopy resolution is tested in terms of a combination of criteria; namely, resolved gaps and the number of gray levels in the image. This is to ensure that the resolution has not been distorted by using the contrast to maximize visibility of edges. High resolution images ideally should show fine detail together with a lack of noise evidenced by a good range of gray levels.
Three special ultrahigh resolution calibration specimens, gold on carbon, are excellent for SEM and FESEM resolution calibration.
Store your calibration and test specimens in a vacuum desiccator such as the #16179 PELCO® SEM Sample Stub Vacuum Desiccator.
PELCO® Technical Notes for Gold on Carbon SEM Resolution Test Specimens (pdf)
![]() see mount selections, types A-P |
Resolution Test Specimen, Gold on Carbon 1particle size range from approximately 5nm to 150nmEach specimen has a square grid pattern with large crystals in the center of each square and very fine crystals at the edges of each grid (as illustrated). Thus, medium and high resolution gap tests are performed on the same specimen. The larger crystals show facets which allow assessment of the gray level reproduction available at high resolution. |
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![]() see mount selections, types A-P |
High Resolution Test Specimen, Gold on Carbon 2particle size range from <3nm to 50nmParticularly suited for assessing the image quality of high resolution SEMs, such as those fitted with a field emission source. A magnification of at least x80,000 is required to clearly resolve the gold particles. |
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![]() see mount selections, types A-P |
Ultra High Resolution Test Specimen, Gold on Carbon 3particle size range from <2nm to 30nmFor ultra high resolution performance testing, this specimen has a smaller gold island particle size compared to the 617 specimen described previously. Suitable for testing field emission SEM's at instrument magnifications of x100,000 and above. |
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Low Voltage Resolution Test Specimen, Gold on Carbon 4particle sizes range from 30nm to 500nmWhen operating at low accelerating voltages or using older instruments, difficulties may be experienced in imaging the standard gold on carbon resolution specimens. This may be due to inferior resolution at low voltage or poor signal to noise ratio when operating at high scanning rates with small spot sizes. The larger gold islands give high contrast while retaining small gaps for resolution measurement. This makes the specimen easier to use at non-optimal operating conditions. |
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