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AFM, Atomic Force Microscopy Calibration
Scanning Probe Microscopy Calibration

AFM Gold Calibration Kit	TipChecker for AFM Probes	HS-Series AFM Calibration Standards and CS-XYZ AFM Calibration	Highly Oriented Pyrolytic Graphite (HOPG)
High Resolution Calibration Standards for AFM, SEM, Auger, and FIB 70, 144, and 292nm pitch	Very High Resolution Calibration Standard for AFM, STM, Auger, FIB, and SEM with 150nm and 300nm pitch	2,160 Waffle Grating Replica	PELCO® AFM Tip and Resolution Test Specimen
Critical Dimension (CD) Calibration Test Specimens (may be used on AFM)	Multiple Use Microscopy Calibration; AFM Profilometry MRS-3, MRS-4, and MRS-5	MetroChip Microscope Calibration Target	AFM Test Gratings

AFM Calibration Specimens

AFM Image of Cross Line Grating Replica	2,160 Waffle Grating Replica X-Y calibration with 2,160 lines/mm crossed line grating replica mounted on a 12mm disc. This Grating Replica is made of cellulose acetate. PELCO® Technical Notes, Calibration Specimen for Atomic Force Microscope, Product No. 607-AFM PELCO® Technical Notes, Calibration Specimen for Scanning Tunneling Microscope, Product No. 607-STM
Prod # Description Unit Price Order / Quote 607-AFM X-Y Cross Line Grating Replica, mounted on 12mm Specimen Disc each $44.00 Qty: 607-STM X-Y Cross Line Grating Replica, Carbon/Au/Pd Coated, mounted on 12mm specimen disc each 52.50 Qty:
	Highly Oriented Pyrolytic Graphite – HOPG HOPG is widely used as a substrate for specimens to be examined in scanning probe microscopes (SPM, STM and AFM). It may also be used as a calibration specimen. HOPG consists of layered planes of carbon atoms (002) which are highly oriented with respect to each other. This prarallelness is characterized by the mosaic spread angle. We offer three grades of HOPG: HOPG grade ZYH with a mosaic spread of 3.5° ± 1.5° with a grain size of 30-40nm HOPG grade ZYB with a mosaic spread of 1.2° ± 0.2° with a grain size of up to 1µm HOPG grade ZYA with a mosaic spread of 0.8° ± 0.2° with a grain size ranging up to 10µm PELCO® Technical Notes, Highly Ordered Pyrolytic Graphite - HOPG, Product No. 626, 626-1 and 626-2
Prod # Description Unit Price Order / Quote 626 HOPG grade ZYH, 10x10mmx2mm each $115.00 Qty: 626-1 HOPG grade ZYB, 10x10mmx2mm each 165.00 Qty: 626-2 HOPG grade ZYA, 10x10mmx1.5mm each 345.00 Qty:

PELCO® AFM Tip and Resolution Test Specimen Colloidal cobalt provides an excellent substrate for AFM tip characterization and instrument operation. Image at top demonstrates height calibration at 1nm (red line profile) and 3nm (green line profile) on the standard. Available on 5x5mm silicon wafer chips unmounted or mounted on 12mm stainless steel metal disk. Tip characterization down to angstrom resolution is easily attained. Image at top demonstrates 1 and 3nm height resolution accurate to 0.05nm.

Prod #	Description	Unit	Price	Order / Quote
628	PELCO® AFM Tip and Resolution Test Specimen, Unmounted	each	$145.00	Qty:
628-AFM	PELCO® AFM Tip and Resolution Test Specimen, Mount AFM	each	155.00	Qty:

TipChecker for AFM probes When imaging a sample by AFM, it is imperative to know the condition of the AFM probe, since this determines the quality and correctness of the image. The TipChecker is an SPM sample for fast, convenient and efficient determination of the AFM tip condition. The clear differences between the tips becomes apparent even with a single scan line. The TipChecker offers a fast and easy way to compare and categorize different AFM tips with respect to tip apex, shape and sharpness. The TipChecker sample enables checking if the tip is still good, starts showing wear or is blunted or broken without the need for scanning an entire image or using SEM inspection. The Tipchecker sample works perfectly with Auto Tip Qualification and Tip Characterization software that is available on the market.

good tip worn tip blunt or broken tip

Figures showing a comparison between different AFM probe tips used to image the TipChecker sample. Scan is 1x1µm for all images, height is 100nm. Each image is shown with a representative cross-section scan. The BudgetSensors TipChecker sample consists of an extremely wear-resistant thin film coating deposited on a silicon chip. The thin film coating shows a granular, sharply peaked nanostructure ideal for reversely imaging an AFM probe's apex. The die size of the BudgetSensors TipChecker is 5x5mm and comes glued onto a 12mm diameter, stainless steel, magnetic disc, ready to be placed into your AFM set. Prod # Description Unit Price Order / Quote TC1 BudgetSensors TipChecker for AFM probes each $180.00 Qty:

Diagrams showing construction and patterns.

HS-Series AFM Calibration Standards Step heights of 20, 100 or 500nm. The HS-series calibration standards offers an easy and reliable way to calibrate AFM systems. Primarily designed for accurate Z-axis calibration the standards also offer X- and Y-axis calibration for bigger scanners in the 40-100um range. The structure symmetry enables calibration without the need to rotate and re-align the sample in between x- and Y-axis calibration. The HS-series feature silicondioxide structure arrays on a 5x5mm silicon chip. The fabrication process ensures excellent uniformity of the structures across the chip. There are three step heights available with nominal values of: 20nm, 100nm, and 500nm. The actual value will be supplied with the delivered calibration standard. Arrays of structures with different shape and pitch are integrated on the chip. The larger square of 1 x 1mm contains square pillars and holes with a 10um pitch. The smaller center square of 500 x 500µm contains circular pillars and holes as well as lines in both X- and Y-direction with a 5um pitch. The silicon chips are available unmounted or mounted on a 12mm standard AFM disc using a high quality electrically conductive epoxy.

Prod # Description Unit Price Order / Quote HS-20MG AFM Calibration Standard, step height 20nm, mounted each $200.00 Qty: HS-20MG-UM AFM Calibration Standard, step height 20nm, unmounted each 200.00 Qty: HS-100MG AFM Calibration Standard, step height 100nm, mounted each 200.00 Qty: HS-100MG-UM AFM Calibration Standard, step height 100nm, unmounted each 200.00 Qty: HS-500MG AFM Calibration Standard, step height 500nm, mounted each 200.00 Qty: HS-500MG-UM AFM Calibration Standard, step height 500nm, unmounted each 200.00 Qty: go to BudgetSensors AFM Probes

CS AFM XYZ Calibration Standard The CS-20NG represents an advanced XYZ calibration grid that enables reliable calibration of AFM systems down to the nanometer level. The XYZ calibration standard features silicon dioxide structures on a 5x5mm silicon chip. The calibration area is in the middle of the chip and can be easily located by the optical system of the AFM. The structure step height is in the range of 20nm. The actual height value will be supplied with the delivered calibration standard. CS-20NG has three different x-y array sizes, all with the same 20nm height. The large 1x1mm square contains square pillars and holes with a 10µm pitch. The middle square contains circular pillars, holes and lines with a 5µm pitch. The small central area contains circular holes with a 500nm pitch. The CS-20NG is suitable for both lateral and vertical AFM scanner calibration. The structure symmetry enables calibration in one step without the need to rotate the sample between X- and Y-calibration. The XYZ calibration standard is mounted on a 12mm, standard AFM disc using a high quality electrically conductive epoxy resin.

Prod # Description Unit Price Order / Quote HS-20NG AFM XYZ Calibration Standard, mounted on a 12mm AFM disk each $590.00 Qty: go to BudgetSensors AFM Probes

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Page Last Updated: June 24, 2010